INTELLIGEN MV DISPENSE SYSTEM
ENTEGRIS, INC.
INSTALLATION AND USE MANUAL P/N P92500 REV. A
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Using Dispense Confirmation
1. When the user is satisfied with the condition of dispense, press “Save to Reference”. Please be
patient; this may take time.
2. In the “Reference Only” section, select the recipe, then press “Load”. Data should load for reference.
3. Enter values for the Error Limit and Warning Limits:
• Error Limit: Pump will generate an error if the dispense confirmation value for the current
dispense is below the user-settable limit. The error must be cleared before operation can continue.
• Warning Limit: Pump will generate a warning if the dispense confirmation value for the current
dispense is below the user-settable limit. Pump will continue to operate.
Test results should be monitored using warning limits before using error limits for fine tuning.
• Values can be set for “tight” control or “loose” control of the dispenses.
• Enable individual tests: set to warning or error.
4. Execute one dispense.
5. After cycle completes, in the “Last Dispense with Reference”, press Load.
The Data field should fill in with confirmation test results.
Enable/disable all
confirmation alarms
Reference and last
dispense data and results
Test operation
criteria
Settable warning
and error limits
Enable warning
or error
