INTELLIGEN MV DISPENSE SYSTEM
6
INSTALLATION AND USE MANUAL P/N P92500 REV. A
ENTEGRIS, INC.
Specifications
Dispense
performance:
Volume
0.1 – 10.0 mL in 0.001 mL increments
Rate
0.1 – 3.0 mL/sec in 0.001 mL/sec increments
Repeatability
<0.02 mL 3 sigma
Viscosity range*
100 – 300 cP
Maximum dispense pressure** 0.40 MPa (60 psi)
Recharge
performance:
Fill rate, filtration rate,
vent rate, purge rate
0.1 – 3.0 mL/sec in 0.01 mL/sec increments
Vent frequency
Auto-venting or 1 – 10,000 dispense cycles
Mechanical:
Wetted surfaces
Modified PTFE, PTFE, Kalrez®
Connection type
Insert style, Super Pillar®, Super 300 Type Pillar or Flowell™ 60 series
Filter
Impact® 2 V2 (OF style)
Inlet, outlet and vent tubing
OD
6.35 mm (0.25”) or 6.0 mm (0.24”)
ID
3.97 mm (0.15628”) or 4.0 mm (0.16”)
Gas
Inlet gas type
Regulated N
2
or CDA
Inlet gas pressure 448 kPa – 469 kPa (65 psi – 68 psi)
Vacuum
- 68 kPa (20 in -Hg min.)
Dimensions:
Height
242.6 mm (9.55")
Width
60.7 mm (2.39")
Depth
235.0 mm (9.25")
Weight:
Approx. 5 kg (11 lb)
Electrical:
Current rating
1.25A
Input voltage (system)
24 VDC ±10%
Serial communication
Specifications are dependent on interface module use
Parallel communication
Triggers and acknowledgments
Certifications:
See provided documentation.
Environment:
Indoor use only
Altitude below 2000 m (2187.22 yd)
Ambient temperature 5°C – 40°C (41°F –104°F)
Maximum relative humidity 80% for temperatures up to 31°C (88°F) decreasing linearly to
50% relative humidity at 40°C (104°F)
Mains supply fluctuations from 22 – 26 VDC
Transient overvoltages of overvoltage category II
Pollution degree 2
* Depends on tool configuration. Contact applications support for detailed window of operation.
** Maximum pressure is a limit on the Window of Operation. Actual volumes and rates may be restricted to comply with the pressure
limits for a given viscosity, tubing diameter, tubing length and tubing height.
