INTELLIGEN MV DISPENSE SYSTEM
ENTEGRIS, INC.
INSTALLATION AND USE MANUAL P/N P92500 REV. A
11
Installation
This section covers the site requirements, tools and
equipment to install the system. Technical support
is available for all installation types.
NOTE: All components are shipped
in pro-
tective packaging to prevent damage during
transport. If damage is found, please file a
damage claim with the transportation carrier
and contact customer support immediately.
CAUTION! Avoid particulate contamination.
Do not unwrap any cleanroom-packaged item
until immediately before installation.
WARNING! Only technically qualified
personnel should install the system.
Wear chemical-resistant garments and
eye protection. Chemicals are not supplied
with this equipment. Obtain a chemical
MSDS for each chemical used with the
system and follow all safety requirements.
CAUTION! Fittings and components damage
easily; handle them with extreme care.
Do not scratch or over-tighten any part.
Handling
Use care when lifting and carrying the pump. The
pump weighs in excess of 5 kg (11 lb), has blunt
edges, and can cause pinch or other personal injury.
WARNING! PINCH HAZARD! Pump weight in
excess of 5 kg (11 lb). Use care in lifting and
carrying the pump to prevent personal injury.
Facility Requirements
• Filtered N
2
or CDA, 551 kPa (80 psig)
• Vacuum >20 in Hg
• 24 VAC input power
WARNING! Installation location must provide
adequate exhaust ventilation and monitoring.
The installation location should incorporate
secondary containment and spill detection.
Facility must have appropriate alarm and
shutdown procedures for the chemicals in use.
Tools and Materials
Verify all system facility hookups including liquid
and power supplies. The following tools and materi-
als are required:
• Inlet/outlet tubing appropriately sized for the sys-
tem and compatible with the fluid in use
• Tube cutter
• Adjustable wrench
• Electrical power cable
• Tie wraps
• Cleanroom wipes
• Pillar insertion tool/fixture
• Flaring tools
• Mounting hardware
• Impact 2 V2 (OF style)
(sold separately)
• External stop/suckback valve
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