INTELLIGEN MV DISPENSE SYSTEM
4
INSTALLATION AND USE MANUAL P/N P92500 REV. A
ENTEGRIS, INC.
Handling
Each dispense system is manufactured with strict
assembly, test, and inspection processes to ensure
high-quality assembly and protection from unin-
tended chemical release. As with all chemical
handling systems, the dispense system has chemical
connection points which must be handled with
care, including:
• Fluid ports on the top surface
• Filter fittings
The pump mechanism has additional connecting
points:
• Pressure sensor ports on the back (under the
top cover)
• Between valve plate (front) and pump block
• Pump diaphragm mechanism in the pump block
A potential for chemical leak can occur at the above
cited points. Use care to ensure that o-rings are
either on the filter or on the manifold, never on
both, or the system will leak. Refer to filter installa-
tion instructions in this manual.
Do not loosen any screws on the mechanism unless
specifically directed to do so by an Entegris service
engineer. Handle the dispense system with care to
prevent damage to any fluid handling point.
Additional points of critical assembly and perfor-
mance include pneumatic tubings, pressure and
vacuum connecting points, and solenoid manifold
tubes (inside bottom cover or backplane). Use
care to prevent any damage to the unit which
could result in chemical leakage.
Chemical Leaks
In the event of a suspected or confirmed chemical
leak from the pump or in the vicinity of the pump,
please follow the instructions below:
1. Determine chemical currently in use with pump.
2. Obtain Material Safety Data Sheet.
a. Determine if any incompatible materials may
come in contact with the leaking material.
b. Isolate incompatibles with barriers including
spill containment, closing valves, and remov-
ing the chemical supply if it is safe to do so.
c. Identify appropriate chemical protection
equipment requirements including gloves,
face and eye protection and chemical protec-
tive clothing to prevent exposure to or
contact with chemicals.
d. Determine if the chemical has permissible
exposure limits or short term exposure limits:
– Identify limits requiring respiratory
protection.
– Ensure that appropriate monitoring
devices are available to measure air levels.
3. Only employees properly trained to clean up
spills of hazardous materials should conduct
clean up activities. Consult local authorities
or identified hazardous materials emergency
response agencies or contractors for assistance
if the facility does not have trained employees
for spill cleanup or containment.
4. Ensure adequate monitoring and protective
equipment is available for cleanup of hazardous
materials.
5. Obtain supplies for cleanup and containment
compatible with the chemical.
6. Obtain compatible containers to collect spilled
material and cleanup materials.
7. Ensure adequate ventilation is provided before
opening cabinet or equipment where a buildup
of vapors could occur. If flammable material is
in use:
a. Monitor area for flammable levels with
appropriate monitoring devices.
b. Isolate all power sources or potential
sources of sparks.
c. Use intrinsically safe tools and monitoring
equipment.
