INTELLIGEN LV DISPENSE SYSTEM
9
Installation and Use Manual | Entegris, Inc.
TWO-STAGE TECHNOLOGY OPERATING PRINCIPLE
The IntelliGen dispense system uses a proven, unique
two-stage design to operate dispense and filtration
functions independently. Filtration occurs at a reduced
rate, which prevents microbubble formation and
maximizes filter performance.
The system uses two motors (one for fill and one for
dispense) and advanced fluid paths to deliver extreme
repeatability at dispense rates down to 0.1 mL/sec.
During normal operation, the dispense system
cycles through the dispense/fill, filtration, vent,
purge, fill/ready, and ready states.
1.
READY
State
– The inlet, external outlet, vent, and purge valves
are closed.
– The isolate and barrier valves remain open for
a time to allow the system to reach ambient
pressure, then the valves close.
– The dispense chamber is full of fluid and is ready
to dispense.
2.
DISPENSE/FILL
State
– The external valve opens as the dispense
motor pushes fluid through the outlet and
onto the wafer.
– The dispense rate and volume are motor-
controlled and independent of the fill and
filtration rate.
– Simultaneously during dispense, the inlet valve
opens and begins filling the inlet chamber.
3.
FILTRATION
State
– The isolate and barrier valves open and the
fill motor pushes fluid through the filter and
into the dispense chamber as the dispense
motor retracts.
– At the programmed filtration rate, the dispense
chamber fills with filtered fluid.
4.
VENT
State
– The barrier valve closes and the vent valve opens.
– The fill motor pushes fluid and bubbles upstream
of the filter membrane through the vent port.
5.
PURGE
State
– The barrier valve closes as the purge valve opens
and the dispense motor pushes fluid out of the
dispense chamber to the inlet source. This step
ensures that the dispense fluid contains no
bubbles.
6.
FILL/READY
State
– The dispense chamber is full of fluid and ready
to dispense.
