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INTELLIGEN LV DISPENSE SYSTEM
Installation and Use Manual | Entegris, Inc.
Flushing a Nonworking Pump
Use this procedure to flush and dry a pump that is not
properly functioning and needs to be returned to the
factory for rebuild. Contact Entegris prior to returning
any device for service and to obtain appropriate forms
to certify proper decontamination and handling of the
dispense system by all personnel.
1. Remove all tubing connections and drain and
flush them separately.
2. Remove the filter and replace it with a flushing
shell.
3. Remove the pressure source from the pump
to float the valves.
4. Reattach tubing to the pump to avoid splattering
the photochemicals.
5. Empty the lines as follows:
• Pressurize the inlet line with N
2
or CDA to push
the photochemical through the filter inlet.
• Pressurize the purge line to push the photo-
chemical through the dispense line.
• Pressurize the vent line to push the photo-
chemical through the filter vent port.
6. Discharge solvent, followed by IPA, through the
pump using the inlet, purge and vent lines. Attach
a pressurized source of the fluid to each of the
lines or use a gravity feed to each of the lines.
7. Blow dry the pump by applying compressed N
2
or CDA through the inlet, purge and vent lines.
UPDATING THE FIRMWARE
Pump and MMI Firmware Matching
If a pump is changed out, or software has been
upgraded on the controller, the system may display
an MMI firmware warning. To update firmware from
the controller to a pump, follow the screen prompts.
1. On the Connections tab, select and open the pump
to be updated.
2. The MMI will detect that the pump has a different
firmware version and ask if you want to update.
3. To update, select “Download”. The download
screen will display.
CAUTION! Do not interrupt the download
process. If the pump is powered down during
the flash process, it may cease to operate. If this
occurs, please contact Entegris for assistance.
4. When the download is complete, the download
windows will close.
NOTE: In some instances, the “Download Firmware”
screen may freeze. In this case, moving the mouse
will cause it to update. In all cases, the entire firmware
download and flash process should be complete in
less than 5 minutes.
