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INTELLIGEN LV DISPENSE SYSTEM
Installation and Use Manual | Entegris, Inc.
STORAGE
Short-term “Wet” Storage
A wet pump should be left in auto-recirculation
mode to recirculate fluid and avoid problems related
to stagnant chemical.
Long-term “Dry” Storage
For long-term storage, the pump should be flushed
and cleaned prior to performing a shut-down. See
the Flushing the System section of this manual
(page 33).
MMI SOFTWARE
—
The new and improved user-friendly MMI (Man-
Machine Interface) Software provides more infor-
mation at the point of dispense for better control
of the dispense.
New features include:
• A pressure sensor on the fill side of the dispense
pump to better understand what is occurring
during the fill stage. This allows better recharge
control and also provides an indication of when
filter replacement is necessary.
• An improved dispense confirmation page with
additional tests to determine the changes that
occur between dispenses with the ability to
compare dispenses and the referenced dispense
assigned to the recipe number.
• An improved profiling page that allows side-by-side
comparisons between last dispense profile, any
saved dispense profile, or any referenced dispense
profile (accessed from the Confirmation page) for
four traces: dispense pressure, dispense motor
position, fill pressure, and fill motor position.
• A self-test page with tests designed to evaluate
the status of the dispense pump.
• An improved alarms page that allows the user
to search and sort alarms history to determine
changes to the system. Every header column
can be sorted.
• An information page that allows the user to assign
names for fab, tool, coater, resist, or fluid. This page
also is a quick reference pump information page.
• A mouse-over feature that provides a brief descrip-
tion, the minimum and maximum limits, and the
default value.
• The ability to record pump information in real time
and save to csv file.
INSTALLING SOFTWARE
To program the pump, you must establish commu-
nications with a host computer, laptop or similar
system, using the supplied software.
To install the software and establish communications
with the dispense system:
1. Verify that a filter has been installed in the pump.
2. Connect the cables as appropriate for your
configuration, as covered in the Installation
section of this manual (page 12).
3. Verify that power is being supplied to the
dispense system.
4. Install the MMI software into a separate
directory on your computer, then double-
click on the *.exe file to start the program.
