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INTELLIGEN LV DISPENSE SYSTEM
Installation and Use Manual | Entegris, Inc.
MAINTENANCE
—
The system needs no special maintenance beyond
periodically changing the filter and flushing the
system when necessary.
CHANGING THE FILTER
Filter replacement can be set on the MMI by using the
"Filter Cycle Alarm Limit" feature on the Systems tab.
WARNING! POTENTIAL CHEMICAL HAZARD!
Obtain the chemical supplier’s MSDS sheets
for specific health and safety information.
Wear chemical-resistant garments and eye
protection while draining the system, chang-
ing the filter and during start-up. Dispose of
the used filter in a manner that is consistent
with approved regulations and the guidance
of the chemical supplier.
NOTE: UPE filter membrane does not require pre-
wetting for use with most photochemicals. Consult
a technical support representative for additional
information on filter selection and compatibility.
1. Verify that the pump is off-line (no dispense signals
will be received during the filter changeout process).
2. Pull down the tab on the lever until it clears the catch.
3. Raise the lever to open the filter manifold and
remove the old filter.
4. Verify that only
ONE
set of o-rings is used.
WARNING! POTENTIAL CHEMICAL LEAK!
Use one set of o-rings only. Check that
the filter has o-rings. NEVER use o-rings
on both the filter and the manifold or the
system may leak.
5. Slide in a new filter.
WARNING! PINCH HAZARD! Keep
fingers clear of jaw mechanism to
prevent personal injury.
6. Lower the lever until the tab clicks into place
on the filter.
7. Dispose of the used filter in accordance
with all appropriate safety and disposal
laws, regulations, and safety requirements.
8. To prime a new filter, see
Priming the Pump
on page 37.
