INTELLIGEN LV DISPENSE SYSTEM
5
Installation and Use Manual | Entegris, Inc.
5. Obtain supplies for cleanup and containment
compatible with the chemical.
6. Obtain compatible containers to collect spilled
material and cleanup materials.
7. Ensure adequate ventilation is provided before
opening cabinet or equipment where a buildup of
vapors could occur. If flammable chemical is in use:
a. Monitor area for flammable levels with appropri-
ate monitoring devices.
b. Isolate all power sources or potential sources
of sparks.
c. Use intrinsically safe tools and monitoring
equipment.
8. Isolate pump from power sources to prevent fluids
from flowing through unit during cleanup of leak
or spill.
a. Use appropriate lockout/tagout procedures to
de-energize unit.
b. De-energize all areas of unit that may be in
contact with spilled or leaking material.
c. When disconnecting nitrogen and/or any
pressurized gas, wear appropriate PPE gloves,
then close the facility gas supply to prevent
gas release when disconnecting lines.
9. If spilled chemical is within equipment, wipe all
surfaces carefully with wipes appropriate for the
chemical.
10. If chemical is contained in the tubing or the pump,
provide collection container under the lines or
pump during removal to collect chemical and
prevent additional spills.
11. Decontaminate surfaces with appropriate decon-
tamination materials per recommendation of
chemical manufacturer.
12. Contain cleanup materials, contaminated debris,
and equipment.
13. Dispose of materials in accordance with local,
state, and national regulatory requirements.
14. Provide any required service to the equipment and
verify all spilled material is collected and cleaned
from surfaces.
15. Replace any equipment and secure lines in
accordance with normal maintenance and
service requirements.
16. Confirm air levels are safe.
17. Return equipment to service per standard
procedures.
