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INTELLIGEN LV DISPENSE SYSTEM

11

Installation and Use Manual | Entegris, Inc.

INSTALLATION

—

This section covers the site requirements, tools, and
equipment to install the system. Technical support is
available for all installation types.

NOTE: All components are shipped in protective packaging
to prevent damage during transport. If damage is found,
please file a damage claim with the transportation carrier
and contact customer support immediately.

CAUTION! Avoid particulate contamination. Do
not unwrap any cleanroom-packaged item until
immediately before installation.

WARNING! Only technically qualified personnel
should install the system. Wear chemical-resis-
tant garments and eye protection. Chemicals
are not supplied with this equipment. Obtain
a chemical MSDS for each chemical used with
the system and follow all safety requirements.

CAUTION! Fittings and components
damage easily; handle them with
extreme care. Do not scratch or
over-tighten any part.

HANDLING

Use care when lifting and carrying the pump. The
pump weighs in excess of 5 kg (11 lbs), has blunt
edges, and can cause pinch or other personal injuries.

WARNING! PINCH HAZARD! Pump
weight in excess of 5 kg (11 lbs). Use
care in lifting and carrying the pump
to prevent personal injury.

FACILITY REQUIREMENTS

• Filtered N

2

or CDA, 551 kPa (80 psig)

• Vacuum >20 in Hg

• 24 VAC input power

WARNING! Installation location must provide
adequate exhaust ventilation and monitoring.

The installation location should incorporate
secondary containment and spill detection.
Facility must have appropriate alarm and
shutdown procedures for the chemical in use.

TOOLS AND MATERIALS

Verify all system facility hookups including liquid and
power supplies. The following tools and materials are
required:

• Inlet/outlet tubing appropriately sized for the

system and compatible with the fluid in use

• Tube cutter

• Adjustable wrench

• 13 mm wrench

• Electrical power cable

• Tie wraps

• Cleanroom wipes

• Pillar insertion tool/fixture

• Flaring tools

• Mounting hardware

• Impact 8G and Impact2 V2 (OF style)

(sold separately)

• External stop/suckback valve

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Содержание IntelliGen LV

Страница 1: ...IntelliGen LV Dispense System Installation and use manual ADVANCED MATERIALS HANDLING MANUAL ...

Страница 2: ...rinciple 9 Quick Filter Changeout 10 Installation 11 Handling 11 Facility Requirements 11 Tools and Materials 11 Installing the Pump 12 Storage 14 MMI Software 14 Installing Software 14 Connect Tab 15 System Tab 17 Priming Tab 18 Status Tab 21 Alarms Tab 23 Recipe Tab 24 Recharge Tab 24 Utility Tab 24 Info Tab 25 Self Test Tab 25 Profiling Tab 25 Confirmation Tab 27 Maintenance 32 Changing the Fil...

Страница 3: ...or manufacturability Although every effort has been made to ensure ac curacy of the information contained in this manual the manufacturer assumes no responsibility for inadvertent errors Contents of the manual are subject to change without notice INTENDED AUDIENCE This manual is intended for technicians involved in semiconductor manufacturing and assumes that each individual is familiar with the p...

Страница 4: ...otential hazards Always follow established industrial safety practices when operating the equipment CAUTION End of life statement De commission ing of the system or any part of the system shall be in a manner that is consistent with appropriate regulations and guidelines WARNING Chemicals are not supplied with this equipment Refer to the chemical supplier s MSDS for specific health and safety info...

Страница 5: ...ver or backplane Use care to pre vent any damage to the unit which could result in chemical leakage CHEMICAL LEAKS In the event of a suspected or confirmed chemical leak from the pump or in the vicinity of the pump please follow the instructions below 1 Determine chemical currently in use with pump 2 Obtain MSDS a Determine if any incompatible materials may come in contact with the leaking materia...

Страница 6: ...c When disconnecting nitrogen and or any pressurized gas wear appropriate PPE gloves then close the facility gas supply to prevent gas release when disconnecting lines 9 If spilled chemical is within equipment wipe all surfaces carefully with wipes appropriate for the chemical 10 If chemical is contained in the tubing or the pump provide collection container under the lines or pump during removal ...

Страница 7: ...8 psi Maximum operating pneumatic pressure 0 28 MPa 40 psi Pneumatic leak pressure 0 30 MPa 43 psi Vacuum 68 kPa 20 in Hg min Dimensions Height 200 1 mm 7 878 Width 60 7 mm 2 39 Depth 209 17 mm 8 235 Weight Approximately 5 kg 11 lbs Electrical Current rating 1 25A maximum Input voltage system 24 VDC 10 Serial communication Specifications are dependent on interface module use Parallel communication...

Страница 8: ...thyl acetate Ethyl acetyl acetate ethyl acetoacetate Ethyl alcohol Ethyl benzene Ethyl cyclohexane Ethyl lactate Ethyl malonate diethyl malonate malonic ester Ethyl pyruvate Gamma butyrolactone 2 Heptone methyl amyl ketone Hexane 2 Hexanone methyl butyl ketone propylacetone HMDS hexamethyldisilazane Hexamethyldisiloxane 1 6 hexanediol diacrylate 2 hydroxy 2 methylpropiophenone IPA isopropyl alcoho...

Страница 9: ...unications power cable Vacuum inlet Pressure inlet Fluid inlet Vent Fluid outlet Top View 6 35 mm 0 25 Back View 38 0 mm 1 50 60 7 mm 2 39 8 00 mm 0 25 Front View Side View 209 2 mm 0 23 9 80 mm 0 39 216 5 mm 0 52 2 0 mm 0 08 7 50 mm 0 29 62 0 mm 2 44 60 7 mm 2 29 200 1 mm 7 88 200 1 mm 7 88 189 5 mm 7 46 ...

Страница 10: ...er is full of fluid and is ready to dispense 2 DISPENSE FILL State The external valve opens as the dispense motor pushes fluid through the outlet and onto the wafer The dispense rate and volume are motor controlled and independent of the fill and filtration rate Simultaneously during dispense the inlet valve opens and begins filling the inlet chamber 3 FILTRATION State The isolate and barrier valv...

Страница 11: ...s rapid priming of the filter resulting in signi ficant chemical savings The following diagram shows the absolute minimum required clearances for filter replacement filter jaw clearance highlighted in red The filter can be placed in the service area then slid into the manifold This feature allows easy installation into tight areas with drip trays etc below the equipment CAUTION DRIP HAZARD If the ...

Страница 12: ...r over tighten any part HANDLING Use care when lifting and carrying the pump The pump weighs in excess of 5 kg 11 lbs has blunt edges and can cause pinch or other personal injuries WARNING PINCH HAZARD Pump weight in excess of 5 kg 11 lbs Use care in lifting and carrying the pump to prevent personal injury FACILITY REQUIREMENTS Filtered N2 or CDA 551 kPa 80 psig Vacuum 20 in Hg 24 VAC input power ...

Страница 13: ...l Supply 1 Connect power communications cable Contact Entegris for any pinout or connection details Step 4 Connect N2 and Vacuum Supplies 1 Connect filtered and regulated N2 or CDA supply to the inlet connection Do not turn on the supply at this time 2 Connect vacuum supply to the vacuum connector Rating is 20 in Hg Step 5 Install the Filter The dispense system cannot operate without a filter or a...

Страница 14: ...e and the system and between the system and the point of dispense CAUTION DRIP HAZARD Do not over tighten fittings Excessive force will damage the internal seals Tighten the fittings by hand then use a small adjustable wrench to tighten for the final 1 4 turn 1 Insert Pillar sleeve and tube assembly into the fluid fitting adapter 2 Hand tighten Pillar nut 3 Use 13 mm wrench to hold the fluid fitti...

Страница 15: ...dispense profile or any referenced dispense profile accessed from the Confirmation page for four traces dispense pressure dispense motor position fill pressure and fill motor position A self test page with tests designed to evaluate the status of the dispense pump An improved alarms page that allows the user to search and sort alarms history to determine changes to the system Every header column c...

Страница 16: ...he Server Port and COM information The exact COM port will depend on the specific computer connec tion and system setup 2 Enter the Address or click Scan to search for pump connections Each IntelliGen LV system can be assigned a unique address from 1 to 63 3 Click Connect to connect to the pump The Connect tab will record all previous connections with the latest connection at the top ...

Страница 17: ... Entegris Inc 4 A Time Synchronization screen may appear Read the instructions displayed to synchronize the time stamps between the computer and the dispense system When communications have been established the MMI display will come alive with real time dispense ...

Страница 18: ... Entegris Inc SYSTEM TAB The System tab provides variables relating to the system management of the pump Variables can be changed from the default values to optimize the dispense system Use the mouse over feature to obtain more information on displayed variables ...

Страница 19: ...load an existing priming sequence Use Creating a Sequence to create a new priming sequence Samples of priming sequences are provided in the Appendix page 37 Loading a Sequence from a Saved File A priming sequence can be loaded from a previously created sequence 1 Click on the Menu logo 2 Select File 3 Select Import 4 Select Priming 5 Select number to be assigned 6 Select priming file to be downloa...

Страница 20: ...r Type select a type of priming 2 Under Count enter how many times the type of priming is to be performed 3 For each step type rates can be changed based on application needs 4 Continue adding types and counts that will purge the system of air 5 Press Apply 6 Press Start to begin priming 7 Priming sequence can be saved by clicking on the menu logo Select File Select Save Select Number Assign name ...

Страница 21: ...vided into three sections In the top section pump status and priming step are displayed In the middle section an estimated time of completion and count down are displayed In the priming field finished steps are highlighted in light blue the current step is highlighted in dark blue and unfinished steps remain in gray ...

Страница 22: ...play Warning The dispense pump will still function When an error has been triggered the status will display Error The dispense pump will stop dispensing Pump status bar Information and cycle counts Last dispense information Quick access commands System pressure and vacuum readings with color display Green OK Yellow Close to specification Red Out of specification Enhanced realtime pump representati...

Страница 23: ... will clear all active warnings and errors This will open the vent valve relieving pressure on the fill side of the filter This will open the outlet valve relieving pressure on the fill and dispense side of the filter This will close all open valves This will start and end the recording of realtime data displayed on the realtime graph below This will execute one dispense of the selected recipe ...

Страница 24: ...rror Pump stops dispensing after completing the cycle Motors are not disabled Clear alarm Investigate for changes in the system System warning Event occurred but did not affect the system Pump continues normal operation Investigate cause of warning Clear alarm Information Event occurred but did not affect the system Pump continues normal operation No effect Alarm log only Each header description o...

Страница 25: ...ress Open To Save Select recipe to save assign a name to the file then press Save Use the mouse over feature to obtain more information on displayed variables RECHARGE TAB The Recharge tab allows access to the variables that control the Recharge portion of the dispense cycle including vent purge fill and filtration and maximum dispense volume Use the mouse over feature to obtain more information o...

Страница 26: ...uid being used SELF TEST TAB The Self Test tab includes tests that evaluate motor backlash the performance of the fill and dispense motors and the accuracy of the pressure sensors NOTE Execution of these tests is setup dependent Refer to test description to obtain setup PROFILING TAB The Profiling tab allows dispense profiles to be plotted saved and imported individually or for comparison The trac...

Страница 27: ...nd Profile B Example plots are shown below This will load the latest dispense to the graph below This shows or hides the profile from the graph below This will load a saved csv file to the graph below This will save the cycle number displayed in the Latest text field to a csv file Single profile display Comparison profiles displayed ...

Страница 28: ...rning or error Alarm limits upper and lower can be set by the user A referenced dispense profile can be saved and viewed for each recipe Last dispense cycle number Load both profiles onto the profiling page Load last dispense profile load data into test field Load only reference profile onto profiling screen Test field conditions Save last dispense to reference of this recipe number Select referen...

Страница 29: ...dispense is below the user settable limit The error must be cleared before operation can continue Warning Limit Pump will generate a warning if the dispense confir mation value for the current dispense is below the user settable limit Pump will continue to operate Test results should be monitored using warning limits before using error limits for fine tuning Values can be set for tight control or ...

Страница 30: ...ress Load The Data field should fill in with confirmation test results Confirmation Example Since All Confirmation Alarms was disabled the data field shows what the results would have been if the confirmations test was enabled The results show one test condition would have triggered an error Pump shows Ready because alarms are disabled ...

Страница 31: ...e Manual Entegris Inc Reading the Results Read the results as a sentence In this example Air Detect Volume would have triggered an alarm if enabled Result shown in data field and Overall Confirmation Status To enable tests enable All Confirmation Alarms ...

Страница 32: ...lecting a reference and then pressing Load in the Reference Only section When pressing Load in Last Dispense with Reference section the reference profile will load automatically Standard profiling commands and features apply to the confirma tion profiles 2 The reference profile is always Profile B 3 Press Load Latest to compare each subsequent dispense as Profile A 4 Use the Trace Display function...

Страница 33: ... for use with most photochemicals Consult a technical support representative for additional information on filter selection and compatibility 1 Verify that the pump is off line no dispense signals will be received during the filter changeout process 2 Pull down the tab on the lever until it clears the catch 3 Raise the lever to open the filter manifold and remove the old filter 4 Verify that only ...

Страница 34: ...g the PAC crystals In general the PAC crystals may not dissolve in a solvent base and a stronger solvent such as N methyl pyrrolidinone NMP may be required PAC crystals remaining in the pump may act as nucleation sites and cause particu lates Flushing of the pump is accomplished using the Priming functions described in the Priming section of this manual In general the rates entered when flushing t...

Страница 35: ... through the pump using the inlet purge and vent lines Attach a pressurized source of the fluid to each of the lines or use a gravity feed to each of the lines 7 Blow dry the pump by applying compressed N2 or CDA through the inlet purge and vent lines UPDATING THE FIRMWARE Pump and MMI Firmware Matching If a pump is changed out or software has been upgraded on the controller the system may display...

Страница 36: ...mp is in error state Clear alarms If condition persists contact Entegris technical support Improper N2 or CDA pressure or vacuum Verify N2 or CDA and vacuum supply pressure No chemical in pump Replace source bottle and prime pump Replace filter if chemical has dried out Bubbles in tubing Check fitting connections and tubing for leaks Poor Quality Dispense PROBLEM SOLUTION Air trapped in lines Perf...

Страница 37: ...th the low suckback rate and high suckback volume For example 0 05 cc s and 0 5 cc respectively This gives the chemical 10s to flow back Optimize the parameters accordingly High Particle Counts on Wafer PROBLEM SOLUTION Filter media is too open Use smaller pore size filter Filter not being fully wetted during installation or priming Perform multiple purge cycles using higher than normal filtration...

Страница 38: ... the air from the filter down stream of the membrane Inlet cycles will recirculate the fluid through the filter and back to the inlet with a small amount of vent This completes the wetting of the mem brane without excessive use of chemical PRIMING SETTINGS SETTING DESCRIPTION RANGE Cycle type Type of priming for that step Includes Stop Loop Vent Outlet Purge Inlet Soak Backflush to vent Backflush ...

Страница 39: ...ODUCT WARRANTIES For Product Warranties visit www entegris com and select the Legal Notices link from the footer Repair Service Rebuild and warranty service is available through Entegris Call 1 800 394 4084 or contact your Regional Customer Service Center for more infor mation Entegris will expedite processing by provid ing a Return Materials Authorization RMA number MSDS requirements and importan...

Страница 40: ...ED WARRANTY Entegris products are subject to the Entegris Inc General Limited Warranty To view and print this information visit entegris com and select the Legal Trademark Notices link in the footer Entegris does not warrant any failure in the case of customers using unapproved foreign components FOR MORE INFORMATION Please call your Regional Customer Service Center today to learn what Entegris ca...

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