Edwards STP-iX455, Инструкция по эксплуатации

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STP-iX455/iXL455 Series Instruction Manual
3
◇ NEVER use any gas that is not specified as usable in this Manual. The use of such gas may
corrode the STP pump and damage it.
◇ Always check the STP pump has stopped, then turn OFF the primary power supply and
isolate the electrical energy source (Lockout/Tagout) on the vacuum equipment before
proceeding to any of the following operations. Failure to do so may cause the STP pump to
rotate accidentally, which may injure operators seriously or result in electric shock.
Connect or disconnect cables;
Perform inspections such as deposit and/or the air cooling fan; or
Perform investigations into probable causes and action/measures taken in the event of
occurrence of a problem.
◇
When removing or installing the pump or at maintenance and inspection, follow the
precautions below. Failure to do so might hurt your back or cause injuries due to occurrence
of an accident such as fall.
Use a crane or the like when lifting the heavy product of 18 kg or more.
When lifting by hands for unavoidable reason, two or more people must always conduct
it.
◇
When "emergency off" (EMO) circuit is installed in the vacuum equipment, consider the
following to stop the STP pump safely when the EMO circuit operates.
When the EMO circuit operates, atmosphere might be introduced in the STP pump
depending upon the backing-pump. Unite the exhaust gas system to prevent
atmosphere from being introduced into the STP pump when the EMO circuit operates.
(example: shut the valve) When atmosphere is introduced into the STP pump, the touch
down bearing may not operate normally.
◇
Connect the cables securely. NEVER bend nor place heavy objects on the cable. Doing so
may result in electric shock or product damage.
◇
NEVER remove the splinter shield from the STP pump. Doing so may result in product
damage.
◇
DO NOT put foreign objects into the STP pump. Doing so may result in product damage.
◇
Always use the power voltage specified on the nameplates of the STP pump and the
external power supply unit. Wire the power cable securely. Incorrect wiring may result in
electric shock or product damage.
◇
The wipes used for clean the flange of the pump might become hazardous waste depending
upon the solvent (alcohol). Dispose of the contaminated wipes appropriately according to the
regulations of each national and/or local government.
◇ NEVER turn OFF the external power supply while the STP pump is rotating. Doing so may
result in product damage.
◇ Perform investigations into probable causes and remove them before restarting the STP
pump in the event of the occurrence of a problem. The use of the abnormal STP pump may
result in product damage.
◇
DO NOT move the STP pump while the STP pump is in operation. Doing so may result in
product damage.