Edwards STP-iX455, Инструкция по эксплуатации

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STP-iX455/iXL455 Series Instruction Manual
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5 Baking, Cooling the STP Pump and Gas Pumping
5.1 Baking the STP Pump
To attain a less pressure in a shorter time and reduce the exhaust time, bake the
vacuum equipment and STP pump.
◇
The surfaces of the STP pump and its peripheral equipment will become
extremely hot when performing baking. NEVER touch them with bare hands.
◇ When baking the STP pump, always cool it to prevent overheating.
◇
Start baking after cooling is started.
Set the temperature of the baking heater to 120 °C or lower.
◇
DO NOT pump gases during baking to prevent overheating.
◇
To exhaust the gas discharged from the vacuum equipment and the inner wall of
the STP pump, run the STP pump during baking.
5.1.1 Attaching a Baking Heater
The baking heater is not included in the scope of supply.
When preparing the baking heater at your company, refer to the external appearance on
each Instruction Manual of the STP pump before purchasing it.
Install the baking heater near the inlet port flange in the perimeter of the envelope. (see
Figure 5.1).
◇
Wind the baking heater around the surface of the STP pump tightly.
If the baking heater is not wound tightly, the loose parts will overheat.
◇ DO NOT apply excessive force to the cable for the baking heater.