Edwards STP-iX455, Инструкция по эксплуатации

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STP-iX455/iXL455 Series Instruction Manual
5-2
In
sta
lla
tio
n
Figure 5.1 Attaching Positions of the Baking Heater and Air-cooling Unit
5.2 Cooling the STP Pump
When performing baking or pumping gases, or when operating the STP pump in area of
high humidity or subjected to heat source for unavoidable reason, cool the STP pump.
Use an air-cooling unit (optional accessory), when cooling the STP pump.
The air-cooling unit U0-64 cools only control unit. The air-cooling unit U1-64 cools both
STP pump and control unit. Select the best method which fits your vacuum equipment.
Air-cooling fan Cooling area
Condition
Baking
Gas pumping
*1
(SCCM)
Environment
U0-64 Control unit N
2
0 to 180
・
Areas of high
humidity
・
Areas subjected
to heat source
Ar 0 to 100
U1-64 Pump and
control unit
Yes
N
2
0 to 300
Ar 0 to 200
*1:
The values shown in the table are typical; they are not guaranteed.
Baking heater
Air-cooling unit
(optional accessory)