Edwards STP-iX455, Инструкция по эксплуатации

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STP-iX455/iXL455 Series Instruction Manual
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4.3.1 Cleaning the Seal
Inspect the seals of inlet and outlet port flanges for dirt or oil spots before installing the
STP pump to the vacuum equipment.
Take the following measures for cleaning the seals:
● Clean off with a pure gas.
● Wipe with proper solvent (such as alcohol).
◇ A splinter shield is attached to the inlet port flange to prevent foreign materials
from falling into the STP pump.
Always leave the splinter shield attached during operation.
◇
The wipes used for clean the flange of the pump might become hazardous waste
depending upon the solvent (alcohol). Dispose of the contaminated wipes
appropriately according to the regulations of each national and/or local
government.
◇
The splinter shield cannot perfectly prevent foreign materials from falling into the
STP pump.
DO NOT install the STP pump in such a manner that foreign materials can easily
fall into it (for example, Si wafers or samples are positioned above the STP pump).
If installing the STP pump in such a manner, always attach a shield plate with
sufficient conductance above the STP pump to prevent foreign materials from
falling into it. Foreign materials falling into the STP pump through the splinter
shield may result in product damage.
◇
Be careful not to scratch the flange of the STP pump.
Check whether or not there are scratches on the surface, before installing the STP
pump.