Edwards STP-iX455, Инструкция по эксплуатации

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STP-iX455/iXL455 Series Instruction Manual
4-14
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2) When securing the inlet port flange with claw clamps
Refer to Table 4.3 for destructive torque.
When securing the inlet port flange with only the claw clamp, the vacuum equipment
cannot withstand the maximum destructive torque generated by the worst-case failure.
To make the vacuum equipment withstand abnormal torque, secure the base with all 4
screw-holes for legs or all 4 legs. Follow "CAUTION" in Section 4.3.4 about legs and bolts
for securing the base.
For the claw clamp-type, use the required number of claw clamps as specified in Table 4.4.
Position the claw clamps evenly on the circumference.
Table 4.4 Number of Claw Clamps by Size of Flange
Size of Flange Number of Claw Clamps
ISO160 or less 4 or more
ISO200 to 250 6 or more
ISO320 or more 8 or more
Figure 4.8 Example of Securing the STP Pump
(When securing the inlet port flange with claw clamps)
Vacuum equipment
Claw clamps
Secure the base
4
1 2
3 5
6 7
FAILURE
ROTATION
POWER
X5 STP-Link
X6 VENT VALVE
X1 DC POWER
X4 X3 COM1
X2 REMOTE