Edwards STP-iX455, Инструкция по эксплуатации

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STP-iX455/iXL455 Series Instruction Manual
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1 Precautions for Safe Operation of the STP Pump
1.1 Usable Gases
Chlorine or fluorine system gases can be used in the only corrosion resistant pumps (type
C or other models). When you use gases including alkaline metals, but excluding Li, gases
including Ga, Hg, In, or Sn, or HBr, contact Edwards.
◇ To prevent an accident, confirm the characteristics of gases to be used, referring
to the Material Safety Data Sheet (MSDS) you obtain from the gas supplier.
And, keep MSDS and a safety advice of gas supplier.
CAUTION
◇
NEVER use corrosive gases (chlorine, fluorine, or other system gases) in the STP
pump without anti-corrosion treatment.
◇ Introduce a dry N
2
gas (purge gas) to protect the inside of the STP pump when
using reactive or corrosive gas. The use of reactive or corrosive gas may result in
product damage.
◇
DO NOT use any pyrophoric gas.
◇
Cool the STP pump to prevent the STP pump from overheating when pumping
gases.
1.2 Maintenance and Inspection Precautions
Perform any maintenance or inspection of the STP pump, following Section 13,
"Troubleshooting, Maintenance, and Inspection".
CAUTION
◇ Always turn OFF the primary power, then turn OFF the primary power supply and
isolate the electrical energy source (Lockout/Tagout) on the vacuum equipment
before performing any maintenance or inspection.
◇
NEVER touch any portions other than those designated when performing
maintenance.
Careless touch may cause electric shock and/or a short-circuiting of the internal
circuit, resulting in product damage or a problem.