Edwards STP-301 Series, Инструкция по эксплуатации

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STP-301/451 Series Instruction Manual
6-16
Installation
Connecting to Semiconductor Equipment
The STP pump is a component system when installing to the semiconductor equipment.
Consider the followings when designing the semiconductor equipment.
6.4.3 Connecting to Pow er
The STP control unit receives its power from the semiconductor equipment electrical
distribution system via a circuit breaker.
Electrical energy isolation (Lockout/Tagout) is achieved by opening the main disconnect
device or circuit breaker of the semiconductor equipment, thereby: removing power
from the STP pump.
Provide the equipment with the main disconnect or circuit breaker devices rated for at
least 10,000 A
rms
symmetrical amperes interrupting capacity (AIC).
6.4.4 Emergency Off Circuit (EMO Circuit)
Activation of EMO circuit of the equipment will interrupt electrical power from the STP
control unit.
When the power is shut off, the STP pump performs the same as a power failure. (After
backup operation of a power failure, the rotor lands on the touch down bearing)
Consider the followings when establishing the EMO circuit.
◇
Unite the exhaust gas system to prevent atmosphere from being introduced into
the STP pump w hen the EMO circuit operates. (example: shut the valve) When
atmosphere is introduced into the STP pump, the touch dow n bearing may not
operate normally.
◇
The STP pump rotates for a w hile after the EMO circuit shuts off the pow er.
Perform a recovery operation after the STP pump has stopped completely.
◇
Before performing the operation check of the EMO circuit w ith regular
maintenance, stop the STP pump to prevent damage to the touch dow n bearing.