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Edwards STP-301 Series, Инструкция по эксплуатации

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MT-21E-003-D 

BOC Edw ards Japan Limited 

Dec. 2003 

Copyright 2003 BOC Edw ards Japan Limited. All rights reserved. Printed in Japan. 

 
 
 
 
 
 
 
 

STP-301/451 Series

 

Turbomolecular Pump

 

INSTRUCTION MANUAL 

(Third Edition- d) 

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 

Read through the Safety Precautions and each section 
of this Manual carefully before using the STP pump. 

Keep this Manual in a place where you can quickly 
access it at any time. 

 
 
 
 

Содержание STP-301 Series

Страница 1: ...ed All rights reserved Printed in Japan STP 301 451 Series Turbomolecular Pump INSTRUCTION MANUAL Third Edition d Read through the Safety Precautions and each section of this Manual carefully before using the STP pump Keep this Manual in a place where you can quickly access it at any time ...

Страница 2: ... SYMBOLS The following symbols are used in this manual Death or Serious Personal Injury Failure to follow the guidelines marked with this symbol may result in death or serious personal injury Minor Personal Injury Product and or Peripheral Equipment Damage Failure to follow the guidelines marked with this symbol may result in minor personal injury product and or peripheral equipment damage NOTICE ...

Страница 3: ...ve etc And keep MSDS and a safety advice of gas supplier Warn of the danger of the gas w ith the w arning label w hen the use gas is hazardous chemicals materials Alw ays execute gas purge in the pump w ith the inert gas and then exhaust residual gases thoroughly from the STP pump w hen removing the STP pump from the vacuum equipment Secure safety by w earing personal protective equipment w hen us...

Страница 4: ...alled Doing so may result in product damage When removing or installing the pump or at maintenance and inspection follow the precautions below Failure to do so might hurt your back or cause injuries due to occurrence of an accident such as fall Use a crane or the like w hen lifting the heavy product of 18kg or more When lifting by hands for unavoidable reason tw o or more people must alw ays condu...

Страница 5: ...ies Instruction Manual 4 tuning Once tuning is completed re tuning is not required unless the configuration the STP pump serial number the STP control unit serial number and the STP connection cable length is changed ...

Страница 6: ...t Wire the pow er cable securely Incorrect w iring may result in electric shock or product damage The w ipes used for clean the flange of the pump might become hazardous w aste depending upon the solvent alcohol Dispose of the contaminated w ipes appropriately according to the regulations of each national and or local government NEVER turn OFF the primary pow er DO NOT sw itch the breaker OFF w hi...

Страница 7: ...igh vacuum type chemical specific 1 For the specifications of other models contact BOC Edwards In this manual the above STP pump series is collectively called the STP pump APPLIED STANDARDS The STP pump conforms to the following directives and standards Applied Directives EC Machinery Directive EC Electromagnetic Compatibility Directive EC Low Voltage Directive Applied Standards EN292 1 EN292 2 EN...

Страница 8: ...sues a policy of continuing improvement in design and performance of this product The right is therefore reserved to vary specifications and design without notice Understand that the product you purchased and its contents including specifications described in this manual may differ REQUEST If you find inaccuracies or errors in this manual advise distributor or the nearest Service office ...

Страница 9: ...s w hich are not specified by BOC Edw ards 4 Maintenance personnel other than those authorized by BOC Edw ards or service office have disassembled reconditioned or tampered the product 5 Defect resulting from the not specified use of the product 6 When the product is used under special conditions w ithout obtaining the w ritten consent of BOC Edw ards Particular gases strong magnetic field and the...

Страница 10: ...STP 301 451 Series Instruction Manual 9 4 SPARE PARTS Fuse and air cooling fan for control unit Touch down bearing Heater ...

Страница 11: ...o Install the STP Pump 4 5 4 3 1 Cleaning the Seal 4 6 4 3 2 STP Pump Installation Positions 4 7 4 3 3 How to Secure the STP Pump 4 8 4 3 4 Vacuum Piping 4 12 4 3 5 Connecting the Ground Cable 4 13 4 3 6 Connecting the Purge Port For the Chemical Specific Pump Type C 4 14 5 Baking Cooling the STP Pump and Gas Pumping 5 1 5 1 Baking the STP Pump 5 1 5 1 1 Attaching a Baking Heater 5 1 5 2 Cooling t...

Страница 12: ...ates 7 4 7 5 Remote Operation I O TB2 7 5 7 5 1 Pow ering ON 7 5 7 5 2 Starting Stopping the STP Pump 7 5 7 5 3 Starting the STP Pump After Stopping 7 6 7 5 4 Pow ering OFF 7 6 7 5 5 Starting the STP Pump after a Safety Function Operates 7 6 7 6 Remote Operation CON4 Optional Accessory 7 7 7 6 1 Pow ering ON 7 7 7 6 2 Starting Stopping the STP Pump 7 7 7 6 3 Starting the STP Pump After Stopping 7 ...

Страница 13: ...rmalities Errors and Accumulated Running Time 11 5 11 2 3 Abnormalities When Pow ering ON 11 7 11 2 4 Abnormalities When Performing the STP Pump Start Operation 11 7 11 2 5 Other Abnormalities 11 8 11 3 Maintenance and Inspection 11 9 11 3 1 Inspecting the Air Cooling Fan 11 9 11 3 2 Replacing the Fuses 11 10 11 3 3 Cleaning and Decontamination 11 11 11 3 4 Inspecting for Deposit 11 11 11 3 5 Over...

Страница 14: ...Rated Contacts for Relays CR4 and 6 8 4 Table 8 4 I O TB2 Terminal Block 8 5 Table 8 5 CON4 Connector Remote Input Signal 8 7 Table 8 6 Rated Coils for Relays CR1 2 and 3 8 8 Table 8 7 CON 4 Connector Remote output signal 8 9 Table 8 8 Rated Contacts for Relays CR4 5 6 7 8 9 and 10 8 11 Table 8 9 Remote Cable Connections Single Side Connector Type 8 11 Table 10 1 States of Lamps and REMOTEOutput S...

Страница 15: ...igure 6 5 Peripheral Spaces of the STP Control Unit 6 8 Figure 6 6 Example of Securing the STP Control Unit 6 9 Figure 6 7 External Dimensions of Ground Cable 6 10 Figure 6 8 External Dimensions of STP Connection Cable 6 10 Figure 6 9 External Dimensions of STP Connection Cable 6 11 Figure 6 10 How to Secure the Pow er Cable 6 13 Figure 7 1 STP Pump Operation Procedures 7 9 Figure 8 1 I O TB1 Remo...

Страница 16: ...em gases in the STP 301 STP 451 pump or other models w ithout anti corrosion treatment Introduce a dry N2 gas purge gas to protect the inside of the STP pump w hen using reactive or corrosive gases Cool the STP pump to prevent the STP pump from overheating w hen pumping gases 1 2 Precautions on Maintenance and Inspection Read through Section 11 Troubleshooting Maintenance and Inspection before per...

Страница 17: ...tion Label This label indicates precautions for operating the STP pump Follow these precautions 2 STP Control Unit Caution Label This label indicates precautions for operating the STP control unit Follow these precautions 3 STP Pump Installation Warning Label This label indicates the installation of the STP pump Install the STP pump according to the precautions in Section 4 Installing the STP Pump...

Страница 18: ...in operation 5 STP Control Unit Safety Instruction Label This label indicates instructions before operating the STP control unit 6 High Voltage Device Caution Label The STP control unit is equipped with a high voltage device This label warns operators to pay attention to the high voltage device 7 Rotational Direction Instruction Label This label indicates the rotational direction of the STP pump T...

Страница 19: ...in this label 200 V specification 100 V specification 9 Hot Surface Warning Label This label instructs operators so as not to touch the hot surface of the STP pump The use of the baking heater optional accessory may lead to a considerable rise in temperatures outside the STP pump This label warns operators so as not to burn hands only when using the baking heater ...

Страница 20: ...n by 2 pairs of radial direction active magnetic bearings that consist of radial sensor 3 and radial electromagnet 4 A pair of axial direction active magnetic bearings consists of axial sensor 5 and axial electromagnet 6 to support the rotor in the axial direction Because the rotor is thus supported without mechanical contact it can rotate with low vibration There is less heat generated from magne...

Страница 21: ...uction Manual 2 2 Installation 1 Rotor Blade 2 Stator Blade 3 Radial Sensor 4 Radial Electromagnet 6 Axial Electromagnet 5 Axial Sensor 8 Touch Down Bearing 7 Touch Down Bearing Figure 2 1 Cross Sectional View of the STP Pump ...

Страница 22: ...aging materials such as the corrugated fiberboard container and cushioning material for possible reuse 3 2 Accessories Table 3 1 Accessories Item Q ty Remarks STP control unit 1 Primary power cable 1 1 With a single side connector STP connection cable 1 1 With both side connectors Ground cable 1 1 With both side crimp type terminal lugs Inlet port cover 1 Outlet port cover 1 STP connector cover 1 ...

Страница 23: ...ns Connected to the STP connection cable 4 Ground Terminal Used for grounding Connect the ground cable between this terminal and the ground terminal of the STP control unit The ground terminal is marked with label 5 Purge Port KF 2 10 Chemical Specific Pump Type C Introduces a purge gas This port is attached only to the chemical specific pump type C In order to protect the inside of the STP pump w...

Страница 24: ...STP 301 451 Series Instruction Manual 4 2 Installation Figure 4 1 Configuration of the STP Pump ...

Страница 25: ...hout anti corrosion treatment If the STP pump is used in an area w ith radiation contact BOC Edw ards Install the STP pump in a place meeting the following requirements Ambient Temperature 0 to 40 C Ambient Relative Humidity 30 to 95 no dew condensing Environment A place free of externally applied mechanical shock A place free of a heat source Keep clear of the heat source or attach a thermal shie...

Страница 26: ...o secure the STP pump The shape and size of the bench differ depending upon the type of STP pump Follow the precautions of the WARNING CAUTION or NOTICE see Section 4 3 3 How to Secure the STP Pump The STP pump is provided w ith a high speed rotor Any internal abnormality error may result in a jump in rotational torque leading to personal injury or peripheral equipment damage Design and secure the...

Страница 27: ...nual 4 5 Installation The bolt may not be able to be inserted from the low er side of the inlet port according to the shape of the inlet port flange When the external appearance of the STP pump is not in the manual contact BOC Edw ards ...

Страница 28: ...451 Series Instruction Manual 4 6 Installation 4 3 How To Install the STP Pump Install the STP pump to the vacuum equipment as shown in Figure 4 2 Figure 4 2 Installation of the STP Pump to the Vacuum Equipment ...

Страница 29: ... solvent alcohol Dispose of the contaminated w ipes appropriately according to the regulations of each national and or local government The splinter shield cannot perfectly prevent foreign particles from falling into the STP pump DO NOT install the STP pump in such a manner that foreign particles can easily fall into it for example Si w afers or samples are positioned above the STP pump If install...

Страница 30: ...ns When installing the STP pump in a horizontal or slanted position it is recommended to install it so that the direction of the outlet port is on a vertical or horizontal plane in the direction of the gravity This makes it possible to reduce the load on the magnetic bearing and the heat generated by the STP pump Outlet Port Outlet Port Outlet Port Outlet Port Direction of Gravity Figure 4 4 Posit...

Страница 31: ...ng cannot be used depend on the type of the STP pump Refer to Table 4 1 for tightening torque of the bolt Table 4 1 Tightening torque of bolt Size of bolt Tightening torque of bolt Nm M8 12 0 M10 24 1 M12 42 1 When making the leg to secure the base make them shortened more than ones attached to the STP pump Use a material that has a tensile strength of 600N mm2 or more When securing the base use s...

Страница 32: ...P STP 301 Type of flange VG100 ISO100F ISO100 ICF152 Torque in pump abnormality Nm 3 8 103 3 8 103 3 8 103 Base 8 positions securing No Yes No Yes No Yes Type of bolt Standard Type of steel 1 Stainless steel Recommended securing bolt for TMP Flange Strength 1 70 or more Model of TMP STP 451 Type of flange VG150 ISO160F ISO160 ICF203 Torque in pump abnormality Nm 3 8 103 3 8 103 3 8 103 Base 8 posi...

Страница 33: ...the base with all 8 screw holes for legs or all 8 attached legs Follow CAUTION on page 4 9 about legs and bolts for securing the base For the claw clamp type use the required number of claw clamps as specified in Table 4 3 Position the claw clamps evenly on the circumference Table 4 3 Number of Claw Clamps by Size of Flange Size of Flange Number of Claw Clamps ISO 160 or less 4 or more ISO 200 to ...

Страница 34: ...base When the base cannot be secured because of the equipment design install the pump with a torque restraint like the one shown in Figure 4 7 b Use a damper only at the vertically upright position DO NOT remove the bolts and nuts attached to reinforce the damper Figure 4 7 Example of securing the STP pump When installing the damper in the inlet port flange Vacuum Equipment Vacuum Equipment Secure...

Страница 35: ... gas capacity of the vacuum equipment length and material of the piping Select an backing pump in accordance with the capacity and starting method simultaneous starting starting after generating roughing vacuum suitable for the vacuum equipment you use 5 Connect the STP pump and the backing pump using stainless steel or aluminum alloy tubing flexible tubing vacuum rubber or Teflon tubing and other...

Страница 36: ...utlet port flange applicable continuously for natural air cooled To attain the ultimate pressure show n in Table 13 1 STP Pump specifications set the pressure at the outlet port flange to 1 3 Pa 10 2 Torr 4 3 5 Connecting the Ground Cable Connect the ground cable yellow green between the ground terminal of the STP pump and the ground terminal of the STP control unit When the resistance between the...

Страница 37: ...order to protect the inside of the STP pump As shown in Figure4 8 introduce a dry N2 gas through the electromagnetic vent valve needle valve or similar valve must be prepared by the customer from the purge port For instructions on how to introduce the purge gas see Section 5 3 Gas Suction When not introducing the purge gas close the purge port w ith the blank flange attached at delivery Figure 4 8...

Страница 38: ...t and the inner w all of the STP pump run the STP pump during baking 5 1 1 Attaching a Baking Heater 1 Attach a baking heater optional accessory as near as possible to the inlet port flange 2 Affix the Hot Surface Warning Label to the surface of the STP pump so that the operator can see it clearly at any time See Figure 5 1 Attaching Positions of the Cooling Unit and Baking Heater Check the rated ...

Страница 39: ...g conditions Amount of water 2 L min Temperature 5 to 25 C Water pressure 2 9 ｘ 105 Pa 3 kgf cm2 or lower Use clean w ater as much as possible Cooling w ater containing foreign materials may corrode or clog the cooling w ater pipe When the cooling system is clogged w ith foreign materials clogs may possibly be removed by feeding cooling w ater reversibly When the STP pump is overheated due to shor...

Страница 40: ...the rated voltage of the air cooling unit before use Procure a breaker or fuses for the air cooling unit remote terminal block TB1 incorporates fuses When connecting the pow er for the air cooling unit to the remote terminal block I O TB1 attach a metallic cover or a similar part to the terminal block to ensure the safety DO NOT apply excessive force to the cable for the air cooling unit Follow th...

Страница 41: ...corrosion treatment Cool the STP pump to prevent the STP pump from overheating w hen pumping gases 5 3 1 How to Introduce a Purge Gas For Chemical Specific Pump Type C When pumping reactive or corrosive gases introduce a purge gas to protect the inside of the STP pump Doing so may result in product damage Connect a needle valve or a similar part to the purge port and introduce a dry N2 gas or othe...

Страница 42: ...Figure 5 1 Attaching Positions of the Cooling Unit and Baking Heater ...

Страница 43: ...es not light 3 RESET Switch momentary push button switch white Alarm reset function valid in MANUAL operation only When a safety function operates with the FAILURE lamp lit stop the STP pump and remove the cause of the failure Then press this switch to restart the STP pump The FAILURE lamp goes out simultaneously Tuning function valid in MANUAL or REMOTE operation To perform tuning press and hold ...

Страница 44: ...ate 9 BRAKE Lamp yellow LED Lights during deceleration BRAKE state 10 POWER Lamp green LED Lights while the power is ON Goes out while the backup power is being supplied 11 FAILURE Lamp red LED Lights when any of the following abnormalities occurs The LCD displays an error message simultaneously a When the inside of the STP control unit overheats 70 C or more inside the circuit b When the inside o...

Страница 45: ...STP 301 451 Series Instruction Manual 6 3 Installation 6 5 1 2 3 7 8 9 10 11 12 4 Figure 6 1 STP Control Unit Front Panel ...

Страница 46: ... CON2 A maximum voltage 62VAC For connection of the STP connection cable 16 Ground Terminal For connection of the ground cable between the STP pump and the STP control unit 17 I O TB1 Terminal Block A maximum voltage Equal to the input voltage of this connector MAX 240VAC For remote output signals 18 I O TB2 Terminal Block A maximum voltage Equal to the input voltage of this connector MAX 240VAC F...

Страница 47: ...STP 301 451 Series Instruction Manual 6 5 Installation 13 14 15 16 17 18 19 20 21 Figure 6 2 STP Control Unit Rear Panel ...

Страница 48: ...ON see Section9 2 Setting the Rated Speed No 4 switch Remote input signal change It is valid with only the specification of remote connector CON4 special accessory The state of input terminal and connector can be changed by this switch ON OFF operation Remote input signal No 4 switch Remote connector CON4 Remote terminal block TB2 ON Valid Invalid FF Invalid Valid 22 23 Front Panel Side 8 7 6 5 4 ...

Страница 49: ...STP 301 451 Series Instruction Manual 6 7 Installation 6 1 4 Side Panel Left 24 Air Cooling Fan For cooling the inside of the STP control unit 24 Figure 6 4 STP Control Unit Side Panel Left ...

Страница 50: ...ve gas A place free of radiation A place free of strong magnetic and electric fields A place free of excessive vibration A place free of a source of electric noise Installation Condition Install the STP control unit horizontally within 10 6 2 2 Insulation Test Do not perform the insulation test insulation resistance test and withstand voltage test to the STP control unit When performing the insula...

Страница 51: ...e for connecting the cables Rear 15cm or more The minimum bending radius of the STP connection cable is 150 mm see Figure13 5 External Appearance of the STP Control Unit Cable Space DO NOT excessively bend the cables and bew are of any obstacles w hen installing the STP pump Also leave enough space to install other cables w ithout bending them excessively R ack W all Side 5cm or more 5 cm or mor e...

Страница 52: ... STP control unit during transport remove the rubber foot from the bottom and attach the STP control unit to the rack using the screw holes for the rubber foot The STP control unit cannot be supported w ith only the screw s on the front panel the STP control unit is a heavy product Alw ays support it from the bottom When installing the STP control unit DO NOT block the ventilation port of the STP ...

Страница 53: ...ype Terminal Lug M4 1 Yellow Green Wire L 20m 4mm 2 L 20m 10mm 2 φ4 3 L 20m φ6 5 L 20m Ground Terminal Crimp Type Terminal Lug M4 1 Unit mm Figure 6 7 External Dimensions of Ground Cable 76 5 24 5 STP 301 451 Series 40 69 9 44 7 φ16 45pin Pin 41pin Spcket Unit mm STP Control Unit Side STP Pump Side L type Connector Figure 6 8 External Dimensions of STP Connection Cable 1 JIS ...

Страница 54: ...ut pow er plug φ8 1 25 37 55 N L2 L L1 φ38 N L2 L L1 18 PE L L1 N L2 Plug type NEMA 6 15 250V 15A for 200V spec GND Plug type NEMA 5 15 125V 15A for 100V spec GND 50 50 φ38 STP Control Unit Side Power Side Primary 3pin Socket 1 5mm 2 X 3 cores Brown Blue Yellow Green b w ith pow er plug 2 Figure 6 9 External Dimensions of STP Connection Cable 1 JIS 2 Recognized model to UL3101 1 standard has power...

Страница 55: ...on normally 1 Connecting the Ground Cable Connect the ground cable yellow green between the ground terminal of the STP pump and the ground terminal of the STP control unit When the resistance between the ground terminals is lower than 0 1 ohms it is not necessary to connect the ground cable after installing the STP pump and the STP control unit First connect the ground cable Next connect other cab...

Страница 56: ...ou plan to use the units having different model names they may not be used even w hen the tuning is performed In the latter case contact service office Use the STP connection cable that has a label affixed The use of different cables may result in product damage ...

Страница 57: ...ble Color Remarks L L1 Brown N L2 Blue Single phase 200 to 240 V AC 10 for 200 V specification Single phase 100 to 120 V AC 10 for 100 V specification Both 50 60 Hz PE Yellow Green Ground L PE N Rear Panel AC POWER CON1 Outline of connector Confirm the pow er voltage on the name plate Connect the primary pow er cable securely to prevent incorrect w iring DO NOT apply surge voltage exceeding 1kV to...

Страница 58: ...pting capacity AIC 6 4 4 Emergency Off Circuit EMO Circuit Activation of EMO circuit of the equipment will interrupt electrical power from the STP control unit When the power is shut off the STP pump performs the same as a power failure After backup operation of a power failure the rotor lands on the touch down bearing Consider the followings when establishing the EMO circuit Unite the exhaust gas...

Страница 59: ...owing items before starting 1 Are the STP pump and the STP control unit secured according to the appropriate method 2 Is the primary power cable connected correctly to the power supply 3 Is the power voltage selected properly 4 Are the ground cable and STP connection cable securely connected Are each terminal and each connector securely locked 5 Is the label affixed correctly to the STP connection...

Страница 60: ...ntly performed the STP pump may overheat Avoid doing so 7 3 Stop Procedures Close the vacuum valve located at the outlet port flange side just before or after stopping the STP pump After closing the valve stop the backing pump DO NOT stop the backing pump w ithout closing the vacuum valve Depending upon the type of the backing pump doing so could cause a reverse flow of atmospheric air into the ST...

Страница 61: ...P pump The ACCEL lamp lights The LCD displays the current rotational speed in ACCEL 00rpm in units of 500 rpm ACCELERATION state 2 When the STP pump attains the rated speed of rotations the ACCEL lamp goes out and the NORMAL lamp lights Also the LCD displays NORMAL 00rpm NORMAL OPERATION state The STP pump can be manually started only w hen the LCD displays LEVITATION or BRAKE 00rpm In the case of...

Страница 62: ... The STP pump can be stopped w ith any message displayed in the LCD ...

Страница 63: ...WER OFF state NEVER sw itch OFF the breaker w hen any lamp of ACCEL NORMAL and BRAKE is on Doing so causes such a state as a pow er failure 7 4 6 Starting the STP Pump after a Safety Function Operates A safety function operates when an abnormality occurs in the STP pump or peripheral equipment To restart the STP pump remove the cause of the abnormality after the BRAKE lamp goes out and press the R...

Страница 64: ...rting stopping the STP pump Use one of them Table 7 1 Starting Stopping the STP Pump during Remote Operation I O TB2 Method Starting the Pump Stopping the Pump 1 1 With the circuit between 2 3 shorted short the circuit between 1 4 2 Short the circuit between 4 5 for 0 3 seconds or more However when inputting the signal simultaneously with switching ON the breaker on the rear panel continue to shor...

Страница 65: ...The STP pump can be started by remote operation w ith any message displayed on the LCD Although the STP pump sounds for several seconds w hile it is accelerating this is not an indication of abnormality ...

Страница 66: ...bnormality occurs in the STP pump or peripheral equipment To restart the STP pump remove the cause of the abnormality after the BRAKE lamp goes out and perform either operation shown in Table 7 2 The FAILURE lamp goes out and the safety function is released RESET operation Then start the STP pump For the safety functions and troubleshooting see Section 10 Safety Functions and Section 11 Troublesho...

Страница 67: ...ensure the safety ...

Страница 68: ...orrect operation a metal fitting is attached to the breaker Loosen the screw lift the metal fitting then secure it The magnetic bearing functions and the rotor levitates POWER ON state The POWER lamp lights 2 The STP control unit executes the self test If no error is found the LCD displays LEVITATION 7 6 2 Starting Stopping the STP Pump Table 7 3 Starting Stopping the STP Pump during Remote Operat...

Страница 69: ...f ACCEL NORMAL and BRAKE is on Doing so causes such a state as a pow er failure 7 6 5 Starting the STP Pump after a Safety Function Operates A safety function operates when an abnormality occurs in the STP pump or peripheral equipment To restart the STP pump remove the cause of the abnormality after the BRAKE lamp goes out and perform either operation shown in Table 7 4 The FAILURE lamp goes out a...

Страница 70: ...e STP Pump Brake state 1 Normal operation state 1 Acceleration state 1 The message disp layed can be changed by pressing the SE LE CT switch STP pump internal tem p Set value of rated speed 2 Levitation state 1 Self test completed Self test in progress Version LCD Message STP Pump State Operation Levitation state TEST COMPLETE SELF TEST Execute Self Test P021 Ver Breaker ON SELECT Switch SELECT Sw...

Страница 71: ... input to these terminals is output to the specified terminal block through operation of the STP pump FAN N O OUT 4 3 Terminals for connecting the air cooling unit The voltage input to AC POWER terminals 1 2 is output to these terminals when the STP pump is in acceleration or rated operation The voltage is cut OFF when the STP pump is under the BRAKE state see Section 5 2 2 Air Cooling Method 6 5 ...

Страница 72: ...ion the terminals between 16 13 are closed and the terminals between 16 15 are opened ACC N O OUT 17 18 Terminals for outputting the ACCELERATION state signal These terminals are closed when the STP pump is in acceleration REMOTE N O OUT 19 20 Terminals for outputting the STP pump REMOTE SELECTION state signal When the MANUAL REMOTE changeover switch on the STP front panel is set to ON remote side...

Страница 73: ... O OUT N O OUT ALARM OUT COM N C OUT BRAKE N O OUT N O OUT NORM OUT COM N C OUT ACC N O OUT REMOTE N O OUT ALARM state signal output terminals BRAKE state signal output terminals NORMAL OPERATION state signal output terminals ACCELERATION state signal output terminals REMOTE selection state signal output terminals N O Normal Open N C Normal Close COM Common Figure 8 1 I O TB1 Remote Output Signal ...

Страница 74: ...Contact Point Current 10 A Maximum Open Close Capacity AC 2500 VA DC 300 W AC 1250 VA DC 220 W Minimum Applicable Load 5 V DC 10 mA Table 8 3 shows rated contacts for relays CR4 and 6 see Figure 8 1 Table 8 3 Rated Contacts for Relays CR4 and 6 Resistance Load cos φ 1 Induction Load cos φ 0 4 L R 7 ms Rated Load 250 V AC 8 A 30 V DC 8 A 250 V AC 6 A 30 V DC 4 A Rated Current 8 A Maximum Contact Po...

Страница 75: ...a failure COMMON IN 5 3 START IN Terminals for inputting the START signal The following three methods are available 1 Short the circuits between 2 3 and 1 4 Then shorting the circuit between 4 5 for 0 3 seconds or more causes the STP pump to start When this signal is input simultaneously with switching ON the breaker on the rear panel short the circuit for 5 seconds or more 2 Short the circuit bet...

Страница 76: ... the FAILURE lamp 2 When 3 above is used input 25 V AC or 12 to 48 V DC between 3 6 for 0 3 seconds or more to turn off the FAILURE lamp With DC input the side can be connected to either 3 or 6 When performing all of the START STOP and RESET operations using method 3 show n in the above table 25 to 250 V AC can be input In this case attach a metallic cover or a similar part to the terminal block t...

Страница 77: ... in Table 8 4 In case of 1 in Table 8 4 25VAC 12 to 48VDC F1 250VAC 0 1A F4 AC250V 0 1A F2 AC250V 0 1A Approx 1mA Approx 1mA I O TB2 fuses F1 to 4 are on the substrate in the circuit For their replacement contact service office The input current of remote input signal is approx 1mA Make sure the minimum applicable load of the relay contact w hen the remote operation w ith the relay Figure 8 2 I O ...

Страница 78: ...n 2 14 RESET IN Pins for inputting the RESET signal When inputting 24VDC between 2 14 for 0 3 seconds or more the FAILURE lamp is turned off Connect the side to 2 and the side to 14 It is an equivalent to the pin for inputting the POWER OFF signal of the STP 200 300 400 series 3 15 START IN Pins for inputting the START signal When inputting 24VDC between 3 15 for 0 3 seconds or more the pump start...

Страница 79: ...nit 24VDC 0VDC 24VDC 0VDC 24VDC 0VDC Coil of relay CR1 Coil of relay CR2 START signal input pins STOP signal input pins Not Used Figure 8 3 CON4 Remote Input Signal Connector Table 8 6 shows rated coils for relays CR1 2 and 3 see Figure 8 3 Table 8 6 Rated Coils for Relays CR1 2 and 3 Rated Voltage Rated Current DC24V 8 3mA ...

Страница 80: ...onds to the pin for outputting the POWER ON signal of the STP 200 300 400 series 7 19 EMERGENCY OPERATION N O OUT Pins for outputting the EMERGENCY OPERATION state signal These pins are closed when failures are detected as follows Abnormal state of magnetic bearing Excessive Vibration However during power failure backup operation this signal is not output 8 20 FAILURE N O OUT Pins for outputting t...

Страница 81: ... Pins for outputting the NORMAL OPERATION state signal These pins are closed when the STP pump is in rated operation 10 22 Not used It corresponds to the pin for outputting the BATTERY OPERATION signal of the STP 200 300 400 series 12 Not used It is connected to the frame ground ...

Страница 82: ...MERGENCY OPERATION state signal output pins 8 20 FAILURE state signal output pins CR10 9 21 OVER TEMPERATURE state signal output pins CR9 11 23 ACCELERATION state signal output pins CR8 24 NORMAL OPERATION state signal output pins CR7 10 22 Not used 12 Frame ground FG STP Control Unit CR4 CR5 CR6 Figure 8 4 CON4 Remote Output Signal Connector ...

Страница 83: ...emote cables for CON4 are provided as optional accessories Remote cables are available in two types single side connector type and both side connector type Contact BOC Edwards for details Table 8 9 shows connections of remote cables of single side connector type Table 8 9 Remote Cable Connections Single Side Connector Type Connector Pin No Cable Color Connector Pin No Cable Color １ Brown 13 White ...

Страница 84: ... press the RESET switch on the front panel for approx 3 seconds The tuning starts with TUNING displayed in the LCD 4 When the LCD displays TUNING release the RESET switch 5 Approx one minute later the LCD displays TUNING COMPLETE and returns to the message displayed in 3 This completes the tuning The tuning can be performed only w hen the STP pump is in the LEVITATION state It cannot be performed ...

Страница 85: ...TATION TUNING Tuning Complete Tuning in Progress PUMP TEMP Press RESET switch for 3 sec LCD Message STP Pump State Operation Levitation State TEST COMPLETE SELF TEST Execute Self Test P021 Ver Breaker ON or or Figure 9 1 Tuning Procedures ...

Страница 86: ...rpm on the rated speed setting display SET 00rpm Turn the VR1 volume clockwise to increase the rated speed or counterclockwise to decrease the rated speed until the required rated speed is displayed Note that the rated speed is not yet determined in this state 3 To determine the rated speed displayed in SET 00rpm press the START switch When the STP pump is in the ACCELERATION or NORMAL OPERATION s...

Страница 87: ...ted speed or counterclockwise to decrease the rated speed until the required rated speed is displayed Note that the rated speed is not yet determined in this state 5 To determine the rated speed displayed in SET 00rpm press the START switch Note that the rated speed is not determined if the START sw itch is pressed w hen the LCD message is other than SET 00rpm 6 Press the SELECT switch once and th...

Страница 88: ...ump s internal temperature Set value of rated speed Rated speed setting mode SELECT Switch SET 00rpm DSW B No 1 ON The rated speed returns to 48 000 rpm initial setting by setting dip sw itch 1 of DSW B to OFF Figure 9 2 LCD Message in Rated Speed Setting Mode 1 The STP pump s state displayed depends on the pump s operation state Examples LEVITATION LEVITATION state ACCEL 00prm ACCELERATION state ...

Страница 89: ...lamp goes out and the LCD is turned off II The STP control unit does not detect a power failure of less than 2 seconds continuing rotating the STP pump 2 When the rotational speed is 17 000 rpm or more and less than 25 000 rpm at a power failure The STP control unit detects a power failure of approx 0 02 to 0 14 seconds and the STP pump decelerates At this time the POWER lamp goes out and the FAIL...

Страница 90: ...Lamps and REMOTE Output Signals at Pow er Failure LCD LED lamps REMOTE output signals I O TB1 Rotational speed rpm Message Backlight POWER lamp FAILURE lamp Power ON signal ALARM signal 20 000 or more POWER FAILURE ON OFF ON OFF ON 17 000 or more and less than 20 000 POWER FAILURE OFF OFF ON OFF OFF Less than 17 000 OFF OFF OFF OFF OFF OFF Table 10 2 Operations of the STP Pump after Pow er Recover...

Страница 91: ...ops Simultaneously the FAILURE lamp lights and the LCD displays error message DISTURBANCE 10 4 Motor Driver Overload When the STP pump does not attain the rated speed within approx 10 minutes after starting or when the ACCELERATION state remains unchanged during operation for approx 10 minutes the STP pump decelerates and stops Simultaneously the FAILURE lamp lights and the LCD displays error mess...

Страница 92: ...tional speed of the STP pump exceeds 51 400 rpm due to a failure in the motor driver the breaker in the STP control unit switches OFF The STP pump has no power supplied and stops Simultaneously the FAILURE lamp lights and the LCD displays error message OVERSPEED or DRIVERRA ...

Страница 93: ...erative energy The STP pump decelerates and stops The rotor lands on the touch down bearing at approx 17 000 rpm Power failure Power cable breakage Power cable disconnection Impossible Abnormal magnetic bearing Rotor descends onto the touch down bearing FAILURE DISTURBANCE ALARM The rotor stops on the touch down bearing STP connection cable breakage STP connection cable disconnection Abnormal cont...

Страница 94: ...emperature of the STP pump motor 110 or more FAILURE PUMP OVERTEMP ALARM The STP pump decelerates and stops Abnormal baking temperature Insufficient cooling Leakage of vacuum equipment or piping Continuous repetition of startup stop Extraordinarily high temperature Possible Overheating inside the STP control unit 70 or more inside the STP control unit FAILURE CONTROLLER OT ALARM The STP pump decel...

Страница 95: ...eaker OFF check probable causes and remove them 11 1 Troubleshooting Immediately After An Abnormality Error Occurs 11 1 1 In Case of a Pow er Failure Establish a sequence so that the power can be supplied to the STP control unit immediately after a power recovery 11 1 2 In Other Cases 1 After confirming the BRAKE lamp goes out and the STP pump stops remove the probable cause of the abnormality 2 P...

Страница 96: ...ays an error message If an ampersand is shown at the right of the error message it indicates that more than one error occurs In this case press the SELECT switch to display another error message The SELECT switch can also be used during remote operation Example DISTURBANCE POWER FAILURE Press SELECT Sw itch Press SELECT Sw itch ...

Страница 97: ... broken contact Service office 6 2 3 11 3 1 Abnormal magnetic bearing 1 The STP pump and the STP control unit have different serial numbers 1 Use the units having the same serial number or perform tuning 9 1 2 The cable length is changed 2 Perform tuning 9 1 Excessive external vibration vibration of 100μm0 P or more 1 External vibration impact 1 Remove the external vibration so as not to transmit ...

Страница 98: ...ss 4 3 4 13 1 3 Leakage of the piping system 3 Check the piping system 4 3 4 OVERLOAD 4 Failure of the backing pump 4 Check the backing pump for its capacity and start state use a pump with the recommended capacity or more 4 3 4 13 1 OVERSPEED STP pump overspeed detected at over 51 400 rpm Contact Service office Malfunction Information Power supply failure 1 Power failure 1 Check whether or not a ...

Страница 99: ...lure Contact Service office Malfunction Information Incorrect connection of the STP connection cable Connect the cable correctly If the cable connector is not locked lock it securely 6 4 2 STP connection cable failure Contact Service office THERMAL ERROR Thermal sensor wire breaking inside the STP pump Contact Service office Malfunction Information TEST ERROR Abnormal end of self test Contact Serv...

Страница 100: ...ber displayed at the right of the error message is an error sequence number The smaller number indicates that the error occurred more recently 2 To return to the previous pump s state message press and hold the SELECT switch again for approx 3 seconds or more or leave the error message displayed for approx 20 seconds without pressing the SELECT switch LCD Message POWER FAILURE 1 RUN 1 500 hrs LEVI...

Страница 101: ... How to check the version The version of the STP pump is displayed on the LCD immediately after the main breaker is switched ON LCD Message Main breaker ON SELFTEST ver LEVITATION TEST COMPLETE Version ...

Страница 102: ...3 2 11 2 4 Abnormalities When Performing the STPPump Start Operation Table 11 3 Troubleshooting When Performing the STPPump Start Operation Symptom Probable causes Countermeasures Refer to The ACCEL lamp does not light LCD message MANUAL operation only Press the SELECT switch one or more times until the LCD displays LEVITATION or BRAKE 00rpm 7 4 2 The MANUAL REMOTE changeover switch is not at the ...

Страница 103: ...icient ultimate pressure Failure of the backing pump Check the backing pump for its capacity and start state use a pump with the recommended capacity or more 4 3 4 13 1 Leakage of the piping system Check the piping system for leakage 4 3 4 Residual molecules If the main composition is H2 or H2O perform baking if it is other than H2 or H2O clean the inside of the vacuum equipment 5 1 If gases remai...

Страница 104: ... Failure to do so may result in the inadvertent rotation of the STPpump w hich may result in an accident Do not touch any place other those specified w hen performing maintenance or inspecting the pump and NEVER open any panel because it could cause shock malfunction or short circuit Pow er OFF the baking heater and the air cooling unit before performing maintenance or inspections The w ipes used ...

Страница 105: ...e If fuses are blow n frequently even after they are replaced contact Service office Tw o fuses are attached for replacement The following are protective fuses used in the STP control F1 F2 250 V 10 A For I O TB1 remote input output terminal protection For power input 1 and 2 and power output 3 and 4 protection Table 11 5 Recommended Spare Parts Product name Type Specifications Fuses for F1 F2 MF6...

Страница 106: ...ing overhaul in the STP control unit is executed in Service office When overhaul is needed contact Service office 11 3 4 Inspecting for Deposit Leaving the STP pump without removing the deposit may cause the STP pump to be corroded beyond repair Deposit may have accumulated inside the STP pump depending upon the type of the vacuum equipment installed to the STP pump An increase in the amount of de...

Страница 107: ... Contact w ith atmospheric air may cause a reaction of the deposit DO NOT open the STPpump to atmospheric air as much as possible ...

Страница 108: ...plating material Other semiconductor process 2 years Processes resulting in accumulation of deposits in the pump will require more frequent service Clean applications Only vacuum pumping 5 years Other use 2 years Dependent on application contact BOC Edwards The touch dow n bearing inside the STPpump w ill be w orn out after a number of full speed touch dow ns The costs of replacing parts that need...

Страница 109: ...ning the STP pump for repairs overhaul or other purposes To avoid any accident by gases or corrosion inside the STP pump particularly when corrosive reactive or flammable gases have been used ii Vacuum and hermetically seal the STP pump before transport iii Specify the type of gases used and handling precautions in the Malfunction Information and return the STP pump to Service office When returnin...

Страница 110: ...s less than 25 C Place where there are corrosive gases Place subjected to dripping water Place with a lot of dust Place with insufficient ventilation Place subjected to strong magnetic or electric fields Place subjected to radiation 12 2 Storage of the STP Control Unit If the STP control unit including cables is not used for a long period more than a few months follow the precautions below 1 Store...

Страница 111: ... exhaust gases inside the STP pump thoroughly Residual gases may result in an accident w hen disposing of the STP pump If the STP pump has been used w ith reactive or corrosive gasses alw ays clean thoroughly before disposing of it to avoid any injury Confirm the characteristics of gas to be used referring to the Material Safety Data Sheet MSDS you obtain from the gas supplier BOC Edw ards is not ...

Страница 112: ... 5 x 10 8 ICF flange VG ISO flange Maximum working pressure Pa Torr 6 7 x 10 2 5 x 10 4 Natural air cooling Allowable backing pressure Pa Torr 13 0 1 Natural air cooling Rated speed rpm 25 000 to 48 000 Starting time min 3 Stopping time min 3 Vibration μm O P 0 01 at 48 000 rpm Noise dB 50 at 48 000 rpm Baking temperature C 120 Lubricating oil Not necessary Installation position Free Cooling metho...

Страница 113: ...l STP 301 Series STP 451 Series Flange ICF 2 152 VG 1 100 ISO100 ICF 2 203 VG 1 150 ISO160 A 230 230 230 200 200 200 B 152 185 130 203 235 180 C 171 171 171 141 141 141 D 21 12 12 22 12 12 Figure 13 1 External Appearance of the STP Pump w ithout Anti Corrosion Treatment Example STP 301 ...

Страница 114: ...odel STP 301C Series STP 451C Series Flange ICF 2 152 VG 1 100 ISO100 ICF 2 203 VG 1 150 ISO160 A 230 230 230 200 200 200 B 152 185 130 203 235 180 C 171 171 171 141 141 141 D 21 12 12 22 12 12 Figure 13 2 External Appearance of the STP Pump Chemical Specific Type C Example STP 301C ...

Страница 115: ...RIAL NO MAN UFACTURING DATE WEI GHT kg RAT ED SPEED r pm MANUF ACTURED BY BOC Edwards Techn ologies Ltd Nar ashino Japan Manuf acture d by BOC Edward s at th e form er Seiko Seiki plant i n Naras hino Ja pan STP CE Figure 13 3 Label Affixing Position for the STP Pump ...

Страница 116: ...STP 301 451 Series Instruction Manual 13 5 Specification Baking Heater Figure 13 4 Label Affixing Positions for the Optional Accessories ...

Страница 117: ...em 3 phase DC brush less motor driver Output voltage under rated operation 3 phase VAC 31 to 62 Output frequency under rated operation Hz 420 to 800 Ambient temperature range C 0 to 40 Storage temperature range C 25 to 55 Mass kg 7 Dimensions mm W209 5 x H132 5 x D315 Operation switches Front Panel START switch momentary push button green STOP switch momentary push button red RESET switch momentar...

Страница 118: ...ection cable Ground cable Safety functions Magnetic bearing abnormality error detection Rotor vibration 100μm0 P or more STP pump overheat detection Motor 110 C or more Driver overload detection Motor overcurrent Power failure detection at 25 000 rpm or more detects power failure of 2 sec or more at less than 25 000 rpm detects power failure of 0 02 to 0 14 sec STP pump overspeed detection 51 400 ...

Страница 119: ...ual 13 8 315 1 6 5 122 5 5 132 5 34 85 140 34 85 209 7 29 85 150 29 85 4 φ3 6 4 85 200 4 85 25 150 25 11 110 5 11 34 230 51 18 357 6 Rubber foot 4Piece fixed wiht screw M4 150 Figure 13 5 External Appearance of the the STP Control Unit ...

Страница 120: ...CU MANUFACTURING DATE POWER CONSU MPTION P OWER SUPP LY 50 60Hz 1φ AC W EIGHT kg V VA M anufac tured by BOC Edwar ds at the f ormer Seiko Seiki plant in Nar ashino Japan MANUFACTURED BY BOC Edwards Tecnologies Ltd Narashino Japan CE Figure 13 6 Label Affixing Positions for the STP Control Unit ...

Страница 121: ... mm inch 1 100 1 00x103 39 4 0 01 1 10 0 0 394 1x10 3 0 10 1 39 4x10 3 25 4x10 3 2 54 25 4 1 Weight g kg lb 1 1 00x10 3 2 20x10 3 1x10 3 1 2 20 454 0 454 1 Pressure Pa Torr kgf cm2 1 7 50x10 3 1 02x10 5 133 1 1 36x10 3 9 81 x 104 736 1 ...

Страница 122: ...or more information contact to the nearest Service Office Manufacture BOC Edwards Japan Limited 2 4 1 Shibakoen Minato ku Tokyo 105 0011 JAPAN Telephone Domestic 03 5470 6530 International 81 3 5470 6530 Facsimile Domestic 03 5470 6521 International 81 3 5470 6521 ...

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