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Edwards nEXT240, Инструкция по эксплуатации

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© Edwards Limited 2009. All rights reserved. 

Page 71

Edwards and the Edwards logo are trademarks of Edwards Limited.

Service, spares and accessories

B800-00-880 Issue A

7.4.3

WCX water-cooler

A water-cooler can be fitted to the nEXT pump refer to 

Section 2.5

 to check the suitability of the cooling-water 

supply.

7.4.4

BX bakeout band

A BX bakeout band accelerates the degassing of the pump to enable it to achieve lower pressures. It may also be used 
to protect the pump from condensation of contaminants. The bakeout bands are available in 110 – 120 V or 220 – 240 
V versions.

Note:

The bakeout band is only for use with CF variants

7.4.5

TAV vent-valve and vent-port adaptor

Two solenoid-operated vent-valves are available for system venting. The valves are 24 V d.c., normally-open and can 
be driven by the Controller. The solenoid-valve is fitted in place of the manual-valve, or alternatively can be fitted 
with an adaptor (supplied with the valve) and can be used with any suitable NW10 flanged port on your vacuum 
system.

TAV5 is suitable for smaller vacuum systems. TAV6 has a higher conductance and is suitable for larger vacuum systems 
(typically with volume greater than 10 litres).

7.4.6

VRX vent-restrictor

Use a VRX fixed orifice vent-restrictor to restrict flow of vent gas into the pump. You can fit a VRX vent-restrictor to 
the inlet of a TAV5 or TAV6 vent-valve or to a PRX10 purge-restrictor. Refer to 

Table 21

 for information on the 

selection of the correct VRX vent-restrictor and to 

Table 32

 for the item numbers of the vent-restrictors available.

ACX nEXT Radial Fan

B80000820

ACX nEXT Axial Fan

B80000819

ACX nEXT Radial Fan (with Phoenix connector)  B80000818
ACX nEXT Axial Fan (with Phoenix connector)

B80000817

Water-Cooler

Item Number

WCX nEXT water cooling kit

B800-00-815

Bakeout Band

Item Number

For use with

BX250 (110 V)

B580-52-041

nEXT240

BX250 (240 V)

B580-52-061

nEXT240

BX300 (110 V)

B800-00-814

nEXT300

BX300 (240 V)

B800-00-816

nEXT300

BX450 (110 V)

B580-52-043

nEXT400

BX450 (240 V)

B580-52-063

nEXT400

Product

Orifice Diameter

Item Number

TAV5 vent-valve

0.5 mm

B580-66-010

TAV6 vent-valve

1.0 mm

B580-66-020

Table 32 - Vent restrictors

Vent-restrictor

Orifice diameter (mm)

Item number

VRX10

0.1

B580-66-021

Содержание nEXT240

Страница 1: ...Original Instruction Manual nEXT Turbomolecular Pumps nEXT240 nEXT300 and nEXT400 Description Item Number nEXT240D B812XXXXX nEXT240T B813XXXXX nEXT300D B822XXXXX nEXT300T B823XXXXX nEXT400D B832XXXXX...

Страница 2: ......

Страница 3: ...as specification 18 2 5 Cooling water 18 2 6 Materials exposed to gases pumped 18 2 7 Electrical data 19 2 8 Logic interface connector 19 2 9 Controller connector socket 20 2 10 Indicator LEDs 23 2 11...

Страница 4: ...5 Normal speed setting 47 4 1 6 Timer setting and options 48 4 1 7 Analogue signal options 49 4 1 8 Factory settings 49 4 1 9 Assigning a multi drop address 49 4 2 Configuring the nEXT pump using a TI...

Страница 5: ...71 7 4 4 BX bakeout band 71 7 4 5 TAV vent valve and vent port adaptor 71 7 4 6 VRX vent restrictor 71 7 4 7 Vent port adaptor 72 7 4 8 PRX purge restrictor 72 Index 75 For return of equipment complet...

Страница 6: ...Indicator LEDs 23 15 Operating and storage environment 23 16 Checklist of components 25 17 Summary of commands that can be sent to the nEXT pump 37 18 Command abbreviations 38 19 Error codes 38 20 Ven...

Страница 7: ...This page has been intentionally left blank B800 00 880 Issue A Page v Edwards Limited 2009 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited...

Страница 8: ...he use of WARNINGS and CAUTIONS is defined below CAUTION Cautions are given where failure to observe the instruction could result in damage to the equipment associated equipment and process The units...

Страница 9: ...rovides an interstage port between the turbomolecular blades and Siegbahn drag mechanism nEXT pumps are supplied with an inlet screen fitted into the centering O ring for ISO version pumps and into en...

Страница 10: ...drive electronics uses the motor within the pump as a generator This means the nEXT pumps have their own regenerative supply and do not require a separate battery for emergency power back up The rege...

Страница 11: ...end of the timeout period the controller will trigger a Fail condition and will decelerate the pump to rest When you receive the pump the Timer function will be enabled however you can disable it if...

Страница 12: ...h one connector For serial control either RS232 default or RS485 can be selected using a slide switch located on the controller see Section 3 7 The logic interface can be plugged directly into the Edw...

Страница 13: ...operating under parallel control with the serial link active the start control signal is available as described in Section 1 5 1 but the standby control line is not since it is used as a serial data...

Страница 14: ...protection installed IP40 WARNING Vent dangerous gases and gas mixtures safely do not expose people to these gases If pumping hazardous gases or vapours observe the safety recommendations of the supp...

Страница 15: ...to Section 3 9 3 If you wish to pump a gas not in the list above contact your supplier for advice If you do not contact your supplier you may invalidate the warranty on the pump The pump is not suita...

Страница 16: ...ISO100 nEXT300D CF100 nEXT300T ISO100 nEXT300T CF100 Mass 5 7kg 8 5kg 6kg 8 8kg Inlet Flange DN100ISO K DN100CF DN100ISO K DN100CF Outlet Flange DN25NW DN25NW DN25NW DN25NW Vent Port 1 8 inch BSPP 1...

Страница 17: ...Speed N2 He H2 400 l s 390 l s 325 l s 400 l s 390 l s 325 l s 400 l s 390 l s 325 l s 400 l s 390 l s 325 l s Inlet Compression Ratio N2 He H2 1 x 1011 1 x 108 5 x 105 1 x 1011 1 x 108 5 x 105 1 x 1...

Страница 18: ...115 sccm 100 sccm 90 sccm 105 sccm Natural Convection 30oC Ambient 10 sccm 10 sccm 35 sccm 25 sccm 45 sccm 25 sccm Argon Water Cooling 40oC Ambient 35 sccm 35 sccm 63 sccm 42 sccm 70 sccm 49 sccm Forc...

Страница 19: ...880 Issue A Page 12 Edwards Limited 2009 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Technical data Figure 1 nEXT240 Performance Curve Figure 2 nEXT300 Performac...

Страница 20: ...Edwards Limited 2009 All rights reserved Page 13 Edwards and the Edwards logo are trademarks of Edwards Limited Technical data B800 00 880 Issue A Table 7 nEXT400 Performance Curve...

Страница 21: ...cal data Figure 3 nEXT 240D dimensions mm 1 Earth point 2 Envelope vent 3 Removable cap RS232 RS485 switch vent valve socket 4 LED indicators on drive unit 5 Base mounting holes and fan mountings 6 Bo...

Страница 22: ...0 Issue A Figure 4 nEXT 300D dimensions mm 1 Earth point 2 Envelope vent 3 Removable cap RS232 RS485 switch vent valve socket 4 LED indicators on drive unit 5 Base mounting holes and fan mountings 6 B...

Страница 23: ...cal data Figure 5 nEXT 400D dimensions mm 1 Earth point 2 Envelope vent 3 Removable cap RS232 RS485 switch vent valve socket 4 LED indicators on drive unit 5 Base mounting holes and fan mountings 6 Bo...

Страница 24: ...the vent options and the vent valve connection refer to Section 4 1 3 for configuring the venting options Figure 6 Maximum allowed rate of pressure rise during venting pressure against time with pump...

Страница 25: ...Purge gas specification Reference data Purge gas Dry air nitrogen argon or other inert gases Maximum dew point at atmospheric pressure 22 C Maximum size of particulates 1 m Maximum concentration of o...

Страница 26: ...e for your application 2 8 Logic interface connector nEXT pumps have a 15 way logic interface connector on the end of the logic interface cable The logic interface connector can be plugged directly in...

Страница 27: ...20mA to 0V 28 8Vdc maximum external pull up voltage FAIL status output Type Open collector transistor Fail Off 3 3 k pull up to 12 V d c OK On 0 1 V d c sinking 1 7 mA 0 8 V d c sinking 20 mA Current...

Страница 28: ...echnical data B800 00 880 Issue A Figure 7 Controller Connector showing pin numbers Table 13 Controller technical data Description Data Connector plug Phoenix part number FK MC1881338 Voltage output 2...

Страница 29: ...0 00 880 Issue A Page 22 Edwards Limited 2009 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited Technical data Figure 8 Interface circuits for nEXT turbo pump controll...

Страница 30: ...the rotational speed is very low or stopped If a service is due this LED flashes in a sequence to indicate which service operation is required Refer to Section 5 5 Normal LED This green LED remains on...

Страница 31: ...B800 00 880 Issue A Page 24 Edwards Limited 2009 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank...

Страница 32: ...days If the pump is not to be used immediately store the pump in suitable conditions following the procedure described in Section 6 1 Do not discard the packing materials retain them to re package the...

Страница 33: ...k of tripping WARNING Install the pump in the vacuum system before the logic interface cable is connected to the control equipment and before the electrical supply is connected This will ensure that t...

Страница 34: ...is is not possible because of the nature of the vacuum system then the base of the pump must be fixed to a firm support refer to Section 3 3 4 for instructions on base mounting the pump 3 3 3 Inlet co...

Страница 35: ...secure in the event of a total pump seizure This method of fixing must be used if your pump supports the weight of the vacuum system The weight of the vacuum system must be no more than 20 kg 3 3 5 Ba...

Страница 36: ...n The electrical installation must be carried out by a suitably qualified person Always make the electrical connections to the nEXT pump after the pump has been installed on your vacuum system Earth t...

Страница 37: ...ctions between 0V and earth must be avoided in order to avoid unexpected offset voltages on control and status signals and possible problems with serial communications If no other connection is presen...

Страница 38: ...must connect the control input pin to the 0 V control reference To start the pump connect pin 3 Start Stop to pin 2 0 V Reference To stop the pump break the connection between pin 3 and pin 2 To put...

Страница 39: ...2 of your logic interface mating half You can use the output to control other devices in your pumping system The output can drive a low power relay of up to 24 V coil rating 3 7 Connection for serial...

Страница 40: ...as shown in Figure 11 and 12 In this configuration the PC is the serial link master and the nEXT pump is the slave The distance over which the serial link will work is dependent on any difference in...

Страница 41: ...sage you must first activate Serial Enable This is achieved by linking the Serial Enable input signal pin 5 to pin 2 of your logic interface mating half We recommend that you incorporate this link int...

Страница 42: ...Every complete command message you send will receive a response either a status code or a data return The nEXT pump can only deal with one message at a time It will only accept a new message once the...

Страница 43: ...be ignored and no reply will be sent The correct structure to use is as follows a valid start character either a character for a store operation or a character for a query operation followed by a com...

Страница 44: ...ent if 50 speed or hard vent if 50 speed Hard vent if stop or hard vent if fail and 50 speed Hard vent if stop or controlled vent if fail and 50 speed or hard vent if fail and 50 speed Hard vent if fa...

Страница 45: ...mmand abbreviations Abbreviation Meaning cr carriage return character chars characters d decimal ASCII character Note Fields showing multiple d characters are to indicate typical length All data field...

Страница 46: ...will ignore the state of the Start Stop switch on the Parallel Interface To stop the pump you must send a Serial Stop command Only when the Serial Stop command has been received by the pump can any c...

Страница 47: ...ntrol CAUTION If the pump is vented when it is at full rotational speed and the rate of pressure rise is too high the pump could be damaged and its life may be reduced We therefore recommend that eith...

Страница 48: ...Controller is capable of controlling a number of different venting options these are defined in Table 20 When you receive your pump the Controller will be configured with the factory default vent opti...

Страница 49: ...re must be less than 40 C and the water temperature must be between 10 C and 20 C We recommend that wherever possible you cool the pump by forced air cooling or water cooling See Table 4 for further p...

Страница 50: ...in doubt check the quality of your cooling water supply and if necessary provide treatment and filtration Connect the cooling water supply to the water cooler on the pump as described below Either of...

Страница 51: ...B800 00 880 Issue A Page 44 Edwards Limited 2009 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank...

Страница 52: ...arallel Interface Mode and you do not wish to reconfigure the Controller settings go straight to Section 4 3 4 1 Configuring the nEXT pump using serial commands Refer to Table 17 for a summary of the...

Страница 53: ...be in the following format If the character d is 8 then the fan is enabled If it is anything else you will need to configure the Controller to run the fan 4 1 3 Controlled venting options If you are u...

Страница 54: ...l rotational speed The reply you receive will be in the following format The Standby Speed is now stored in memory within the nEXT pump To check what Standby Speed is set you can send a query as follo...

Страница 55: ...uery as follows The reply you receive will be as follows The Timer is permanently enabled during ramp up however it is optional whether you have it enabled at other times When you receive the pump it...

Страница 56: ...command To reset the Controller to factory settings send the following command The reply you receive will be as follows The factory settings are restored in the memory within the nEXT pump 4 1 9 Assi...

Страница 57: ...out the multi drop address of the nEXT pump The reply you receive will be as follows where dd denotes the multi drop address of the pump You can disable multi drop mode by assigning the pump an addres...

Страница 58: ...g the TIC to operate the vent valve refer to Section 4 7 Note The backing pump and nEXT pump can be started at the same time the nEXT pump will not be damaged and can operate as an effective baffle Ho...

Страница 59: ...Speed is reached To return the pump to full speed disconnect the Standby control input from the 0 V control reference on the logic interface connector 4 4 3 Stop the pump Stop the nEXT pump by discon...

Страница 60: ...reaches Standby Speed If it is running faster than Standby Speed it will decelerate until Standby Speed is reached To return the pump to full speed send the following command The reply you receive wil...

Страница 61: ...tandby Speed in Parallel Interface Mode because the two functions share the same logic interface pins The Analogue Output signals are always available irrespective of whether you send commands in para...

Страница 62: ...f the system detects that any internal temperatures are too high the power supplied to the pump motor is reduced the pump may not therefore be able to maintain full rotational speed if it is too hot I...

Страница 63: ...CAUTION Pumps with ISO flanges are not suitable for bakeout only pumps with CF flanges must be used When baking the pump to above 70 C at the inlet flange the pump must be water cooled to prevent dama...

Страница 64: ...r serial depending on the control mode Then send a Start command to ramp the pump up to designated speed Either Parallel or Serial Control Timer enabled Regenerative power maintains all output signals...

Страница 65: ...B800 00 880 Issue A Page 58 Edwards Limited 2009 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank...

Страница 66: ...dge or bearing service kit and replace the bearing and or oil cartridge on site see Section 7 2 5 3 Rotor life The fatigue life of nEXT Turbo pump rotors is typically 40 000 to 50 000 cycles As a prec...

Страница 67: ...rfaces of the pump in a well ventilated location When you use cleaning solutions and solvents to clean the pump observe all precautions specified by the manufacturer Avoid inhalation of any particulat...

Страница 68: ...auge or too large a chamber Increase the conductance or reduce the volume Is the interstage inlet pressure 0 5 mbar 50 Pa If the interstage inlet pressure is too high inlet pressure at the turbomolecu...

Страница 69: ...2 or RS485 communication Left for RS485 Right for RS232 Right for parallel control and monitoring Fail signal or standby signal not working Check slide switch is in the correct position for the RS232...

Страница 70: ...laced Refer to Section 7 2 LED on 3sec LED off 3sec Pump service required The turbo impeller has reached its expected life It is recommended that the pump is returned to an Edwards service centre for...

Страница 71: ...u will receive the following reply where the first returned number refers to motor rotational speed in revolutions per second Hz The System Status Word returned is made up of 8 hexadecimal digits To d...

Страница 72: ...er Status flag Active flags means 0 Fail Fail status condition active 1 Stopped speed Below stopped speed 2 Normal speed Above normal speed 3 Vent valve closed Vent valve energised 4 Start Start comma...

Страница 73: ...loader software version The reply you will receive is as follows where String1 is the Boot loader software version number 3 0 The vent valve is open 4 0 There is no active Start command 5 1 Serial ena...

Страница 74: ...described in Section 3 4 Keep the pump upright at all times to prevent the drainage of oil from the bearing reservoir 5 Avoid long term storage if possible When long term storage is necessary the pump...

Страница 75: ...B800 00 880 Issue A Page 68 Edwards Limited 2009 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank...

Страница 76: ...support on site maintenance service or repair of your equipment For more information about service options contact your nearest Service Centre or other Edwards company 7 2 1 Returning a pump for serv...

Страница 77: ...available for use with the nEXT pumps are described in the following section Figure 14 shows how the accessories are fitted to the pump 7 4 2 ACX air cooler An ACX air cooler can be fitted to the nEX...

Страница 78: ...system TAV5 is suitable for smaller vacuum systems TAV6 has a higher conductance and is suitable for larger vacuum systems typically with volume greater than 10 litres 7 4 6 VRX vent restrictor Use a...

Страница 79: ...urge restrictor The PRX10 is a modified DN10NW centring ring that filters the purge gas and restricts its flow rate to the recommended flow of 25 sccm You must fit a vent port adaptor to the purge por...

Страница 80: ...s and the Edwards logo are trademarks of Edwards Limited Service spares and accessories B800 00 880 Issue A Figure 18 nEXT exploded accessories view 1 BX 250 Bake out band DN100CF envelope shown 2 BX...

Страница 81: ...emarks of Edwards Limited Service spares and accessories Figure 19 nEXT exploded accessories view 1 DN10NW Adaptor 2 VRX Vent restrictor 3 Manual vent valve fitted 4 TAV Solenoid vent valve 5 Purge pl...

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