Edwards nEXT240, Инструкция по эксплуатации

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Maintenance
B800-00-880 Issue A
The green Normal LED does not light
or the pump is not rotating at full
speed or the pump fails whilst
running Is the inlet pressure too high? If so reduce the pumping load or
check for a gross leak into the
system.
Is the pump running too hot? Increase the cooling to your pump.
You may need to change from air-
cooling to water-cooling (refer to
Section 2 for maximum inlet
pressure and cooling requirements).
You may need to increase cooling-
water flow or decrease the water
temperature or do both. Check that
external heat sources (such as
system bakeout heaters) are not
excessive.
Does the rotor rotate freely? If not, the pump-bearings may be
damaged. Contact your supplier or
Edwards.
The yellow service LED is flashing a
repeated sequence See flashing service codes in Section
5.5.1
Ultimate pressure cannot be reached Is the pressure limited by water
vapour?
Bake the system and pump.
Are any of the vacuum gauges
contaminated? If so clean or replace them.
Is the pumping speed insufficient
(due to poor conductance between
the pump and the gauge or too large
a chamber)? Increase the conductance or reduce
the volume.
Is the interstage inlet pressure
>0.5 mbar (50 Pa) If the interstage inlet pressure is too
high, inlet pressure at the
turbomolecular inlet is increased;
ensure that the interstage inlet
pressure is <0.5 mbar (50 Pa).
Is the backing pressure
>10 mbar (1x10
3
Pa)
If so, the backing pressure may be
too high. Check for backing pipeline
leaks. If the throughput is high you
may need a larger backing pump.
Is the high vacuum area of the
system contaminated? If so, clean the high vacuum system.
Check the rest of your system for
leaks and contamination. If found, repair the leaks and clean
the contamination.
Remove the pump from the system
and test the ultimate pressure of the
pump alone (refer to
Section 2 )
If inlet pressure is poor, check the
pump for contamination and refer to
Section 5 . Leak-test the pump. If the
leak rate >1x10
-7
mbar l s
-1
(1x10
-5
Pa l s
-1
) contact your supplier
or Edwards.
The pump is very noisy or there is
excessive vibration or both Is the pump rotational speed the
same as the resonant frequency of
the attached system? If so, change the natural frequency
of your system or isolate the pump
using flexible bellows.
Is the vibration being transmitted
from the rotary backing pump? If so, fit flexible bellows or a
vibration isolator in the backing line.
Table 25 - Fault finding (continued)
Symptom Check Action