Edwards nEXT240, Инструкция по эксплуатации

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B800-00-880 Issue A
Page 8 © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Technical data
CAUTION
Do not use a nEXT pump to pump mercury vapour and do not allow mercury (for example, from a McLeod gauge)
to come into contact with the pump. If you do, the pump rotor may corrode and fail.
Note: Concentrations of gases may be modified by the compression of the pump.
The pumps are designed to pump the following residual gases normally used in high-vacuum systems:
You can use the pump to pump oxygen and water vapour, subject to the following conditions:

Oxygen – when the pump is purged by an inert gas, oxygen can be pumped at concentrations above 20% by
volume. Refer to
Section 2.4 for Purge gas specification. However, if the pump is not purged, the oxygen
concentration must be less than 20% by volume.

Water vapour - you must ensure that vapour does not condense inside the pump; refer to Section 3.9.3 .
If you wish to pump a gas not in the list above, contact your supplier for advice. If you do not contact your supplier,
you may invalidate the warranty on the pump. The pump is not suitable for pumping aggressive or corrosive gases.
Table 3 - nEXT 240 pumps technical data
WARNING
Do not expose any part of the human body to vacuum.

Air

Carbon dioxide

Methane

Neon

Propane

Krypton

Butane

Helium

Carbon monoxide

Ethane

Nitrogen

Argon

Hydrogen
Parameter
nEXT240D
ISO100
nEXT240D
CF100
nEXT240T
ISO100
nEXT240T
CF100
Mass 5.7kg 8.8kg 6kg 9.1kg
Inlet Flange DN100ISO-K DN100CF DN100ISO-K DN100CF
Outlet Flange DN25NW DN25NW DN25NW DN25NW
Vent Port 1 / 8 inch BSPP 1 / 8 inch BSPP 1 / 8 inch BSPP 1 / 8 inch BSPP
Purge Port 1 / 8 inch BSPP 1 / 8 inch BSPP 1 / 8 inch BSPP 1 / 8 inch BSPP
Interstage Port DN25NW DN25NW DN25NW DN25NW
Booster Port DN25NW DN25NW DN25NW DN25NW
Inlet Pumping Speed
N
2
He
H
2
240 l/s
230 l/s
165 l/s 240 l/s
230 l/s
165 l/s 240 l/s
230 l/s
165 l/s 240 l/s
230 l/s
165 l/s
Inlet Compression Ratio
N
2
He
H
2
>1 x 10
11
3 x 10
5
1 x 10
4
>1 x 10
11
3 x 10
5
1 x 10
4
>1 x 10
11
1 x 10
6
1.5 x 10
4
>1 x 10
11
1 x 10
6
1.5 x 10
4