Edwards nEXT240, Инструкция по эксплуатации

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Technical data
B800-00-880 Issue A
*
Ultimate pressure 48 hours after bakeout for CF version and without bakeout for ISO version with 2-stage rotary
vane backing pump.
Pumping speeds quoted are without an inlet screen
Table 4 - nEXT 300 pumps technical data
*
Ultimate pressure 48 hours after bakeout for CF version and without bakeout for ISO version with 2-stage rotary
vane backing pump.
Pumping speeds quoted are without an inlet screen
Table 5 - nEXT 400 pumps technical data
Interstage Pumping Speed
N
2
He
H
2
13 l/s
13 l/s
11 l/s 13 l/s
13 l/s
11 l/s 13 l/s
13 l/s
11 l/s 13 l/s
13 l/s
11 l/s
Peak Booster Pumping Speed (Nitrogen)
RV12 backing pump
XDS10 backing pump -
-
26m
3
h
-1
24m
3
h
-1
26m
3
h
-1
24m
3
h
-1
Ultimate Pressure
*
<6 x 10
-8
mbar <5 x 10
-10
mbar <6 x 10
-8
mbar <5 x 10
-10
mbar
Parameter
nEXT300D
ISO100
nEXT300D
CF100
nEXT300T
ISO100
nEXT300T
CF100
Mass 5.7kg 8.5kg 6kg 8.8kg
Inlet Flange DN100ISO-K DN100CF DN100ISO-K DN100CF
Outlet Flange DN25NW DN25NW DN25NW DN25NW
Vent Port 1 / 8 inch BSPP 1 / 8 inch BSPP 1 / 8 inch BSPP 1 / 8 inch BSPP
Purge Port 1 / 8 inch BSPP 1 / 8 inch BSPP 1 / 8 inch BSPP 1 / 8 inch BSPP
Interstage Port DN25NW DN25NW DN25NW DN25NW
Booster Port DN25NW DN25NW DN25NW DN25NW
Inlet Pumping Speed
N
2
He
H
2
300 l/s
340 l/s
280 l/s 300 l/s
340 l/s
280 l/s 300 l/s
340 l/s
280 l/s 300 l/s
340 l/s
280 l/s
Inlet Compression Ratio
N
2
He
H
2
>1 x 10
11
1 x 10
6
5 x 10
4
>1 x 10
11
1 x 10
6
5 x 10
4
>1 x 10
11
3 x 10
6
1 x 10
5
>1 x 10
11
3 x 10
6
1 x 10
5
Interstage Pumping Speed
N
2
He
H
2
13 l/s
13 l/s
11 l/s 13 l/s
13 l/s
11 l/s 13 l/s
13 l/s
11 l/s 13 l/s
13 l/s
11 l/s
Peak Booster
Pumping Speed (Nitrogen)
RV12 backing pump
XDS10 backing pump - - 26m
3
h
-1
24m
3
h
-1
26m
3
h
-1
24m
3
h
-1
Ultimate Pressure
*
<6 x 10
-8
mbar <5 x 10
-10
mbar <6 x 10
-8
mbar <5 x 10
-10
mbar
Parameter
nEXT400D
ISO160
nEXT400D
CF160
nEXT400T
ISO160
nEXT400T
CF160
Mass 6.5kg 9.5kg 6.8kg 9.8kg
Inlet Flange DN160ISO-K DN160CF DN160ISO-K DN160CF