DH Instruments ADCS-601, Руководство по эксплуатации и обслуживанию

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TABLE OF CONTENTS
Page I © 2005 DH Instruments, Inc.
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T A B L E O F C O N T E N T S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . I
T A B L E S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . V
F I G U R E S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . V I
A B O U T T H I S M A N U A L . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . I X
1 . I N T R O D U C T I O N . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
1.1 SPECIFICATIONS....................................................................................................................................1
1.1.1 ADCS SYSTEM GENERAL SPECIFICATIONS ............................................................................................1
1.1.2 PG7601 PISTON GAUGE SPECIFICATIONS ...............................................................................................2
1.1.2.1 AMBIENT AND PISTON-CYLINDER CONDITION MEASUREMENTS ....................................................2
1.1.2.2 PISTON-CYLINDER MODULE ..................................................................................................................2
1.1.2.3 MASS SET .................................................................................................................................................3
1.1.3 FPG8601 GENERAL SPECIFICATIONS.......................................................................................................3
1.1.3.1 AMBIENT AND PISTON-CYLINDER CONDITION MEASUREMENTS ....................................................3
1.1.4 PRESSURE MEASUREMENT AND CONTROL SPECIFICATIONS ............................................................3
1.1.4.1 10 TO 380 KPA, PG7601 AND PPC3-700K ..............................................................................................3
1.1.4.2 1 TO 15 KPA, FPG8601 AND PPC3-100K ................................................................................................4
2 . S Y S T E M O V E R V I E W . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.1 ADCS-601 SYSTEM.................................................................................................................................5
2.1.1 REFERENCE BENCH..................................................................................................................................12
2.1.2 CONTROL CABINET ...................................................................................................................................13
2.1.3 GAS SUPPLY PANEL .................................................................................................................................15
2.2 PRESSURE STANDARDS..................................................................................................................... 16
2.2.1 PG7601 PISTON GAUGE ............................................................................................................................16
2.2.1.1 PG7601 PLATFORM................................................................................................................................17
2.2.1.2 PG7601 TERMINAL .................................................................................................................................17
2.2.1.3 PG7601 10 KPA/KG PISTON-CYLINDER MODULE...............................................................................18
2.2.1.4 AMH-38 AUTOMATED MASS HANDLER ...............................................................................................19
2.2.1.5 AMH-38 MASS SET .................................................................................................................................21
2.2.2 FPG8601 FORCE BALANCED PISTON GAUGE .......................................................................................21
2.2.2.1 FPG8601 PLATFORM .............................................................................................................................23
2.2.3 PPC3 PRESSURE CONTROLLERS ...........................................................................................................23
2.2.4 RPM4 A116K REFERENCE PRESSURE MONITOR..................................................................................25
2.3 VACUUM PUMPS ..................................................................................................................................27
3 . I N S T A L L A T I O N . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 9
3.1 UNPACKING AND INSPECTION........................................................................................................... 29
3.1.1 ADCS CONTROL CABINET ........................................................................................................................30
3.1.2 ADCS REFERENCE BENCH AND ACCESSORIES...................................................................................30
3.1.3 PG7601 PLATFORM AND BELL JAR ........................................................................................................32
3.1.4 PG7601 PISTON-CYLINDER MODULE (PC-7100/7600-10,TC) ................................................................32
3.1.5 PG7601 MASS SET (MS-AMH-38)..............................................................................................................33
3.1.6 PG7601 AUTOMATED MASS HANDLER (AMH-38) ..................................................................................34
3.1.7 FPG8601 PLATFORM, PISTON-CYLINDER AND ACCESSORIES...........................................................34
3.1.8 FPG8601 MASS SET (MS-8601-2)..............................................................................................................35
3.1.9 SCROLL VACUUM PUMPS ........................................................................................................................35
3.1.10 TURBO MOLECULAR VACUUM PUMP .....................................................................................................35
3.1.11 SYSTEM CONTROLLER.............................................................................................................................36
3.2 SITE REQUIREMENTS.......................................................................................................................... 36