DH Instruments ADCS-601, Руководство по эксплуатации и обслуживанию

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ADCS-601™ OPERATION AND MAINTENANCE MANUAL
© 2005 DH Instruments, Inc. Page II
3.3 SETUP....................................................................................................................................................38
3.3.1 POSITION THE REFERENCE BENCH .......................................................................................................38
3.3.2 INSTALL REFERENCE TURBO VACUUM AND ROUGHING PUMPS......................................................39
3.3.3 POSITION THE PG7601 AND FPG8601 PLATFORMS ON THE REFERENCE BENCH ..........................40
3.3.4 PREPARE FPG8601 ....................................................................................................................................40
3.3.5 MAKE PNEUMATIC INTERCONNECTIONS ON THE REFERENCE BENCH ...........................................41
3.3.6 POSITION CONTROL CABINET AND MAKE PNEUMATIC, COMMUNICATIONS AND ELECTRICAL
CONNECTIONS TO REFERENCE BENCH ................................................................................................42
3.3.7 CONNECT PRESSURE SUPPLIES TO CONTROL CABINET...................................................................43
3.3.8 APPLY SUPPLY PRESSURES AND CHECK GAS SUPPLY PANEL SETTINGS ....................................43
3.3.9 SET UP THE PG7601 ..................................................................................................................................44
3.3.9.1 PREPARE THE PLATFORM AND INSTALL THE PISTON-CYLINDER MODULE .................................44
3.3.9.2 INSTALL THE AMH-38 MASS SET .........................................................................................................44
3.3.9.3 INSTALL THE AMH-38 MASS HANDLER ...............................................................................................45
3.3.9.4 INSTALL THE REFERENCE VACUUM CDG ASSEMBLY .....................................................................46
3.3.10 COMPLETE FPG8601 SETUP ....................................................................................................................47
3.3.10.1 INSTALL THE PISTON-CYLINDER.........................................................................................................47
3.3.10.2 CONNECT THE MANIFOLD AND VALVE 9............................................................................................47
3.3.10.3 INSTALL THE REFERENCE VACUUM CDG ASSEMBLY .....................................................................48
3.3.11 COMPLETE REFERENCE VACUUM INTERCONNECTIONS ...................................................................49
3.3.12 INSTALL THE UTILITY VACUUM PUMP....................................................................................................49
3.3.13 SET UP THE SYSTEM CONTROLLER (PC) ..............................................................................................49
3.4 POWER UP, INITIALIZATION, VERIFICATION ....................................................................................50
3.4.1 MAIN POWER SWITCHES ..........................................................................................................................50
3.4.2 SET OR VERIFY DEVICE COMMUNICATION PORT AND OTHER SETTINGS .......................................50
3.4.2.1 COMMUNICATION PORTS.....................................................................................................................50
3.4.2.2 PG7601 EXTERNAL VACUUM GAUGE COMMUNICATION .................................................................50
3.4.2.3 EDIT AND SELECT PG7601 SETUP FILE..............................................................................................51
3.4.3 PG7601 ........................................................................................................................................................51
3.4.3.1 POWER UP..............................................................................................................................................51
3.4.3.2 INITIALIZATION .......................................................................................................................................51
3.4.4 FPG8601 ......................................................................................................................................................52
3.4.4.1 POWER UP..............................................................................................................................................52
3.4.5 START UP SYSTEM CONTROLLER AND SOFTWARE............................................................................52
3.4.6 VERIFY SYSTEM OPERATION ..................................................................................................................53
3.5 ENTER VALUE OF LOCAL GRAVITY ..................................................................................................54
3.6 SPECIFY TEST GAS SPECIES ............................................................................................................. 55
3.7 ADDITIONAL PRECAUTIONS TO TAKE BEFORE MAKING PRESSURE MEASUREMENTS ...........55
3.8 SHUT DOWN AND RESTART ............................................................................................................... 55
3.8.1 RESTART.....................................................................................................................................................55
3.8.2 SHUT DOWN ...............................................................................................................................................56
3.8.2.1 SHORT TERM SHUT DOWN ..................................................................................................................56
3.8.2.2 LONG TERM SHUT DOWN.....................................................................................................................56
4 . O P E R A T I O N . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 7
4.1 GENERAL OPERATING PRINCIPLES..................................................................................................57
4.1.1 SYSTEM CONFIGURATION........................................................................................................................57
4.1.2 READY/NOT READY INDICATIONS...........................................................................................................57
4.1.2.1 OVERVIEW ..............................................................................................................................................57
4.1.2.2 READY/NOT READY WHEN USING THE PG7601 PISTON GAUGE ....................................................57
4.1.2.3 READY/NOT READY WHEN USING THE FPG8601 FORCE BALANCED PISTON GAUGE................58
4.1.3 TRANSITION BETWEEN STANDARDS, ACTIVE AND INACTIVE STANDARD .......................................58
4.1.4 DIFFERENCE BETWEEN REQUESTED AND ACTUAL SET PRESSURE ...............................................60
4.1.5 ASOLUTE AND GAUGE MEASUREMENT MODES ..................................................................................60
4.2 FREQUENTLY USED FUNCTIONS....................................................................................................... 61
4.2.1 CONNECTING A DEVICE UNDER TEST (DUT).........................................................................................61
4.2.2 CHANGING PRESSURE UNIT OF MEASURE ...........................................................................................61
4.2.3 CHANGING MEASUREMENT MODE (ABSOLUTE, GAUGE) ...................................................................62
4.2.4 SETTING PRESSURES...............................................................................................................................62
4.2.4.1 SETTING ZERO PRESSURE ..................................................................................................................63
4.2.4.2 SETTING IDLE STATUS..........................................................................................................................63
4.2.5 PRESSURE EXERCISING THE DEVICE UNDER TEST ............................................................................63
4.2.6 SETTING A HEAD CORRECTION ..............................................................................................................64
4.2.7 STOPPING PRESSURE CONTROL, ABORTING FUNCTION EXECUTION .............................................64
4.2.8 SECURITY, USER RIGHTS.........................................................................................................................65
4.2.8.1 SETTING UP USERS AND MANAGING USER RIGHTS........................................................................65
4.2.8.2 CHANGING ACTIVE USER .....................................................................................................................66
4.2.9 PRESSURE LEAK TEST .............................................................................................................................66