PIM00411
12-9
Pressure [MPa]
Pressure command
×「
P25
:
Pressure
coincidence detection range
」
/100
Pressure Command
「
P26
:
The minimum value of
pressure coincidence detection
」
「
P26
:
The minimum value of
pressure coincidence detection
」
Pressure command
×「
P25
:
Pressure
coincidence detection range
」
/100
Flow rate [L/min]
Flow rate command
Flow rate command
×「
P27
:
Flow rate
coincidence detection range
」
/100
「
P26
:
The minimum value of flow
rate coincidence detection
」
「
P26
:
The minimum value of flow
rate coincidence detection
」
Flow rate command
×「
P27
:
Flow rate
coincidence detection range
」
/100
The timing diagram of the coincidence signal output is shown in the figure below.
Flow rate
Pressure
Pressure and
flow rate
coincidence
output
Pressure
coincidence
output
Pressure command
Flow rate command
Pressure coincidence detection range
Flow rate coincidence detection
range
Pressure
Flow rate
C
o
in
c
id
e
n
c
e
s
ig
n
a
l
Flow rate
coincidence
output