Cryo-Torr High-Vacuum Pump Installation, Operation and Maintenance Instructions
P/N 8040613
4-3
C
HELIX TECHNOLOGY CORPORATION
-
TI
CRYOGENICS
Cryopump fails to cool down
to the required operating tem-
perature or takes too long to
reach that temperature (20K).
Low helium supply pressure.
Add gas as described in the
appropriate Compressor
manual.
Compressor problems.
Refer to Troubleshooting sec-
tion of the appropriate Com-
pressor manual.
Vacuum leak in vacuum sys-
tem or cryopump.
Check the cryopump relief
valve for proper seating.
Check cryopump for leaks.
Check vacuum system for
leaks.
Incomplete regeneration may
not have fully cleaned the
adsorbing array. Partial pres-
sures of non-condensables
(hydrogen, neon or helium)
may remain.
Regenerate the cryopump as
described in Section 3 -
Regeneration.
Table 4-1: Troubleshooting Procedures (Continued)
Problem
Possible Cause
Corrective Action
