Installation
2-8
P/N 8040613
C
HELIX TECHNOLOGY CORPORATION
-
TI
CRYOGENICS
Example:
For a sputtering application of continuously flowing argon gas at 70 scc/
min, the duration of continuous operation with this gas flow (between
regeneration) would be:
Crossover Cycle Calculations
The number of crossover cycles between regeneration cycles can also be
easily calculated when the crossover pressure and vacuum chamber
volume are known:
Where:
N = Number of crossover cycles
V = Volume of vacuum chamber (liters)
P = Pressure of vacuum chamber prior to crossover (torr)
(roughing pressure)
Example:
For a vacuum chamber of 100 liters and a roughing pressure of 1.5 torr, the
number of crossover cycles between regeneration cycles would be:
A =
16.6 x 2000 (std liters)
70 (scc/min)
474 hours
=
N =
760,000 torr-liters
P x V
N =
760,000 torr-liters
1.5 (torr) x 100 (liters)
= 5,060 cycles
