Cryo-Torr Cryopump Description
1-14
P/N 8040613
C
HELIX TECHNOLOGY CORPORATION
-
TI
CRYOGENICS
Compressor Gas and Oil Flows
Helium returning from the cryopump cold head enters the compressor, and
a small quantity of oil is injected into the gas stream, thereby overcoming
helium’s low specific heat and inability to carry heat produced during
compression. Helium is then compressed and passed through a heat
exchanger for removal of compression-caused heat.
The helium continues its flow through an oil-mist separator and a charcoal
filter adsorber (cartridge), within the compressor, where oil and
contaminants are removed. A differential pressure relief valve in the
compressor limits the operating pressure differential between the helium
supply and return lines, thereby allowing compressor operation without
cold head operation. When cold head operation reaches a steady-stage
condition, further pressure regulation is unnecessary.
Cryo-Torr Interface
The Cryo-Torr Interface, shown in Figure 1-3, is required when;
connecting more than one Cryo-Torr Cryopump to a variety of
CTI-CRYOGENICS Compressors, or when connecting a single Cryo-Torr
Cryopump to the 9000 Series of compressors.
The Cryo-Torr Interface accepts input cryopump power from the
compressor and distributes it to a maximum of three Cryo-Torr
Cryopumps. The Cryo-Torr Interface also supports a Compressor Remote
feature which can be used to turn the Cryo-Torr Cryopumps off when the
compressor is turned off.
Figure 1-4: Cryo-Torr Interface
