Installation
2-2
P/N 8040613
C
HELIX TECHNOLOGY CORPORATION
-
TI
CRYOGENICS
Installation
The cryopump may be installed in any orientation without affecting its
performance.
Before mounting the cryopump to the vacuum system, a high-vacuum
isolation valve (Hi-Vac valve) should be installed between the cryopump
and vacuum chamber to isolate the cryopump from the chamber during
rough pumping, cooldown, and regeneration.
Install the cryopump to the vacuum system as follows:
1. Remove the protective cover from the main flange of the
cryopump.
2. Clean all sealing surfaces and install the O-ring or metal seal gasket
as appropriate.
3. Mount the cryopump to the Hi-Vac valve or vacuum chamber
mounting flange. Be sure all mounting bolts are secure.
Vent Pipe Connection
The cryopump pressure relief valve can be vented directly into the room or
can be connected to an exhaust system.
WARNING
If toxic, corrosive, or flammable gases are pumped, a vent pipe must
be connected to the cryopump relief valve and directed to a safe
location.
When connecting a vent pipe to your cryopump, the 1.30-inch diameter x
1.38-inch long volume around the relief valve must remain open for proper
relief valve operation.
Vent pipe adapters are available from CTI-CRYOGENICS
(P/N 8080250K008).
