Cryo-Torr High-Vacuum Pump Installation, Operation and Maintenance Instructions
P/N 8040613
2-9
C
HELIX TECHNOLOGY CORPORATION
-
TI
CRYOGENICS
Cryopump Start-up Procedure
1. Close the Hi-Vac valve to isolate the Cryo-Torr Cryopump.
2. Initiate a Nitrogen purge of the Cryo-Torr Cryopump for one hour.
3. Open the roughing valve and rough the Cryo-Torr Cryopump to 50
microns. Close the roughing valve.
NOTE: If step 4 cannot be acheived, repeat step 3.
4. Check the rate-of-rise. The rate-of-rise should be 10 microns/
minute.
NOTE: Cryo-Torr Cryopump power is turned ON/OFF when compressor
power is turned ON/OFF.
5. Turn compressor power ON.
6. Wait for the second stage temperature (T2) to be less than 17 K.
7. Open the Hi-Vac valve.
Cryopump Shutdown Procedure
Typically, a cryopump can be left in operation continuously if you are not
processing or not using the vacuum chamber, by simply closing the Hi-Vac
value to isolate the cryopump from your vacuum chamber. You are now
able to load, unload, repair or replace components in the chamber and the
cryopump will be available for restarting the process as necessary.
1. Close the Hi-Vac valve to isolate the cryopump.
2. Shut off the cryopump by removing the input power cable to the
cryopump motor.
3. Initiate Nitrogen gas purge.
4. Continue Nitrogen gas purge until ambient temperature is reached.
5. Shut off the Nitrogen gas purge.
