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Cryo-Torr Cryopump Description

1-4

P/N 8040613

HELIX TECHNOLOGY CORPORATION

CRYOGENICS

Specifications

Table 1-1: Cryo-Torr 4F Cropump Specifications

Parameter

Specifications

Rough Pump Connection

NW 25 ISO KF

Integrated Hardware

Second Stage Diode

Pumping Speeds:

Water

Air

Hydrogen

Argon

1100 liters/sec
370 liters/sec
370 liters/sec
310 liters/sec

Argon Throughput

300 scc/min. (4 torr liters/seccond)

Capacity:

Argon

Hydrogen

100 std. liters
3 std. liters @ 5 x 10

-6

torr

Crossover

100 torr-liters

Cooldown Time

75 minutes nominal

Dimensions

Length - 21.9 inches (556 mm)

Weight

46 lbs. (101.2 kg)

Содержание CRYO-TORR 10

Страница 1: ...HELIX TECHNOLOGY CORPORATION TI CRYOGENICS HELIX TECHNOLOGY CORPORATION http www helixtechnology com Cryo Torr High Vacuum Pump Installation Operation and Maintenance Instructions 8040613 Rev A 4 200...

Страница 2: ...tion is strictly prohibited Any correspondence regarding this document should be forwarded to Helix Technology Corporation Mansfield Corporate Center Nine Hampshire Street Mansfield Massachusetts 0204...

Страница 3: ...pe Connection 2 2 Roughing Pump Connection 2 3 Helium Return and Supply Line Connections 2 5 Power Cable Connection 2 5 Crossover Pressure Calculations 2 6 Optimizing Crossover Pressure 2 7 Cryo Torr...

Страница 4: ...gure 2 2 Gas and Electrical Component Location on a Typical Cryo Torr Cryopump 2 4 Tables Table 1 1 Cryo Torr 4F Cropump Specifications 1 4 Table 1 2 Cryo Torr 8 Cryopump Specifications 1 5 Table 1 3...

Страница 5: ...rinciple that gases can be condensed and held at extremely low vapor pressures achieving high speeds and throughputs as described in Tables 1 1 1 8 Your Cryo Torr High Vacuum Pump is a highly reliable...

Страница 6: ...Cryo Torr Cryopump Description 1 2 P N8040613 C HELIX TECHNOLOGY CORPORATION TI CRYOGENICS Figure 1 1 Cryo Torr High Vacuum Pumps CRYO TORR 8 CRYO TORR 8F CRYO TORR 4F CRYO TORR 10...

Страница 7: ...uum Pump Installation Operation and Maintenance Instructions P N 8040613 1 3 C HELIX TECHNOLOGY CORPORATION TI CRYOGENICS Figure 1 2 Cryo Torr High Vacuum Pumps CRYO TORR 250F CRYO TORR 400 CRYO TORR...

Страница 8: ...tion NW 25 ISO KF Integrated Hardware Second Stage Diode Pumping Speeds Water Air Hydrogen Argon 1100 liters sec 370 liters sec 370 liters sec 310 liters sec Argon Throughput 300 scc min 4 torr liters...

Страница 9: ...gh Pump Connection NW 25 ISO KF Integrated Hardware Second Stage Diode Pumping Speeds Water Air Hydrogen Argon 4000 liters sec 1500 liters sec 2500 liters sec 1200 liters sec Argon Throughput 700 scc...

Страница 10: ...25 ISO KF Integrated Hardware Second Stage Diode Pumping Speeds Water Air Hydrogen Argon 4000 liters sec 1500 liters sec 2200 liters sec 1200 liters sec Argon Throughput 700 scc min 8 9 torr liters s...

Страница 11: ...ugh Pump Connection NW 25 ISO KF Integrated Hardware Second Stage Diode Pumping Speeds Water Air Hydrogen Argon 9000 liters sec 3000 liters sec 5000 liters sec 2500 liters sec Argon Throughput 1500 sc...

Страница 12: ...on NW 25 ISO KF Integrated Hardware Second Stage Diode Pumping Speeds Water Air Hydrogen Argon 1100 liters sec 350 liters sec 480 liters sec 285 liters sec Argon Throughput 75 scc min 1 torr liter sec...

Страница 13: ...ough Pump Connection NW 25 ISO KF Integrated Hardware Second Stage Diode Pumping Speeds Water Air Hydrogen Argon 9500 liters sec 4000 liters sec 6800 liters sec 3300 liters sec Argon Throughput 1500 s...

Страница 14: ...25 ISO KF Integrated Hardware Second Stage Diode Pumping Speeds Water Air Hydrogen Argon 16 000 liters sec 6000 liters sec 12 000 liters sec 5000 liters sec Argon Throughput 500 scc min 6 3 torr lite...

Страница 15: ...ction NW 25 ISO KF Integrated Hardware Second Stage Diode Pumping Speeds Water Air Hydrogen Argon 30 000 liters sec 10 000 liters sec 10 000 liters sec 8400 liters sec Argon Throughput 500 scc min 6 3...

Страница 16: ...the second stage cold station depending on operating conditions Within the drive unit displacer assembly the drive unit actuates the displacer regenerator assembly located in the cold head cylinder a...

Страница 17: ...1 13 C HELIX TECHNOLOGY CORPORATION TI CRYOGENICS Figure 1 3 Cutaway View of a Typical Cryo Torr High Vacuum Pump GAS FLOW FROM USER S VACUUM SYSTEM INTO INLET OF CRYOPUMP MOUNTING FLANGE 80K CONDENS...

Страница 18: ...valve in the compressor limits the operating pressure differential between the helium supply and return lines thereby allowing compressor operation without cold head operation When cold head operation...

Страница 19: ...5 C HELIX TECHNOLOGY CORPORATION TI CRYOGENICS Figure 1 5 Typical Cryo Torr System with 9000 Series Compressor USER S VACUUM CHAMBER CRYO TORR POWER CABLE HELIUM RETURN LINE HELIUM SUPPLY LINE 9600 CO...

Страница 20: ...N8040613 C HELIX TECHNOLOGY CORPORATION TI CRYOGENICS Figure 1 6 Typical Cryo Torr System with 8200 Compressor USER S VACUUM CHAMBER CRYO TORR POWER CABLE HELIUM RETURN LINE HELIUM SUPPLY LINE 8200 CO...

Страница 21: ...yopumps Refer to Figure 2 1 and the appropriate installation procedure within this section for the type of cryopump being installed Figure 2 1 Block Diagram for Cryo Torr System Installation Installat...

Страница 22: ...opump 2 Clean all sealing surfaces and install the O ring or metal seal gasket as appropriate 3 Mount the cryopump to the Hi Vac valve or vacuum chamber mounting flange Be sure all mounting bolts are...

Страница 23: ...ons The roughing pump connects to the Cryo Torr Cryopump roughing valve The valve will accept an ISO NW 25 flange A molecular sieve roughing trap to minimize oil backstreaming from your roughing pump...

Страница 24: ...OLOGY CORPORATION TI CRYOGENICS Figure 2 2 Gas and Electrical Component Location on a Typical Cryo Torr Cryopump HELIUM GAS RETURN FITTING HELIUM GAS SUPPLY FITTING TEMPERATURE SENSOR COLD HEAD ELECTR...

Страница 25: ...e from the supply connector on the cartridge to the gas supply connector on the Cryo Torr Cryopump 4 Attach the supply and return line identification decals CTI CRYOGENICS supplied to their respective...

Страница 26: ...ed bringing the vacuum chamber down to a pressure typically less than 10 6 torr This momentary pulse of gas and water molecules is cryo condensed on the arrays of the Cryo Torr Cryopump To determine t...

Страница 27: ...e in temperature is noted then drop the value by a small amount 10 This will be the optimum pressure for that vacuum chamber Cryo Torr Cryopump Capacity Calculations Cryopump capacity is defined as th...

Страница 28: ...ion cycles can also be easily calculated when the crossover pressure and vacuum chamber volume are known Where N Number of crossover cycles V Volume of vacuum chamber liters P Pressure of vacuum chamb...

Страница 29: ...wer is turned ON OFF 5 Turn compressor power ON 6 Wait for the second stage temperature T2 to be less than 17 K 7 Open the Hi Vac valve Cryopump Shutdown Procedure Typically a cryopump can be left in...

Страница 30: ...nform to DOT regulations If the cryopump is stored while attached to your vacuum system the cryopump vacuum vessel should be kept at a slight positive atmospheric pressure with dry nitrogen or argon I...

Страница 31: ...aseous state and thereby released from the cryopump through the pressure relief valve to the atmosphere WARNING If toxic corrosive or flammable gases are pumped a vent pipe must be connected to the cr...

Страница 32: ...rays to room temperature Reducing the time required to rough the cryopump because the dry inert purge gas will minimize the amount of residual water vapor in the 15K array Diluting hazardous gases and...

Страница 33: ...o vacuum leaks are present 6 Perform the rate of rise test as follows a Once the roughing cycle has roughed the cryopump starting pressure to between 50 100 microns close the roughing valve b Observe...

Страница 34: ...cryopump Leak checking below the Hi Vac valve should be performed with the cryopump shut OFF and at room temperature Leak checking while the cryopump is operating may mask leaks that are present due...

Страница 35: ...ys is loose which is preventing good thermal contact with the cold station Warm the cryopump to ambi ent temperature and retighten the array mounting screws to 15 20 in lbs High base pressure of vacuu...

Страница 36: ...l Compressor problems Refer to Troubleshooting sec tion of the appropriate Com pressor manual Vacuum leak in vacuum sys tem or cryopump Check the cryopump relief valve for proper seating Check cryopum...

Страница 37: ...nate the compressor if the contamination of the system is not severe Separate decontamination of the compressor is required whenever the compressor has been opened to atmosphere or the pressure droppe...

Страница 38: ...nd line for 10 to 15 seconds Turn the regulator knob counter clockwise until the helium stops flowing c Loosely connect the charge line to the 1 8 inch Hoke valve on the maintenance manifold d Purge t...

Страница 39: ...eaning the Cryo Torr Cryopump WARNING If the cryopump has been used to pump toxic or dangerous materials you must take adequate precautions to safeguard personnel Cleaning the arrays or other interior...

Страница 40: ...ing array because you may severely contaminate the adsorbent in the cleaning process 4 Wearing lint free gloves reassemble the cryopump Replace any indium gasket damaged during disassembly with a gask...

Страница 41: ...24 hours a day seven days a week All other customers must call their local Customer Support Center Please have the following information available when calling so that we may assist you Product Part...

Страница 42: ...rive Santa Clara California 95054 U S A Tel 408 592 5940 Tel 800 324 6449 within USA Fax 408 988 6630 Dial 800 FOR GUTS 800 367 4887 24 hours a day seven days a week United States and Canada Helix Tec...

Страница 43: ...Corporation Fleming Road Kirkton Campus Livingston West Lothian Scotland EH54 7BN Tel 44 1 506 460017 Fax 44 1 506 411122 Dial 44 1 506 460017 24 hours a day seven days a week Japan Helix Technology C...

Страница 44: ...Unit 1 12 Pioneer Avenue Thornleigh NSW 2120 Sydney Australia Tel 612 9 4810748 Fax 612 9 4810910 Dial 612 9 4810748 24 hours a day seven days a week Australia New Zealand Tasmania Helix Technology C...

Страница 45: ...lle Phillips Products Ashwini Enterprises C 2 13 03 Sector 16 Vashi New Bombay 400 705 India Tel 91 22 766 1107 Fax 91 22 766 2631 Israel Helix Technology Corporation CTI Cryogenics Products Vacuum Sy...

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