Chandler Engineering AMETEK 7200, Инструкция по эксплуатации

Страница: 7 / 77

PREFACE P - 3
Gas Injection Flow Rate and
H
2
O Confining Flow Rate
(as measured by N
2
gas flow
Through thermal gas
Mass Flow Meter):
0 – 5 sccm (std. cc/min.) of N
2
(nitrogen), referenced to
std. conditions of 70
o
F (21
o
C), 760 mm Hg (1.00 atm.,
14.696 psia, 101.3 kPa, 1.013 bar)
Flow Rate Measurement
Accuracy: ± 1.2 % of Full Scale (+/- 0.06 sccm)
at manufacturer-calibrated inlet conditions of Inlet
Pressure = 1000 psig (6.895 MPa, 68.95 bar, 68.05
atm.), Temperature = 70
o
F (21
o
C)
Flow Rate Measurement
Resolution: 0.01 sccm
Environmental Conditions
Environment: Indoor Use
Altitude: 6561.6 ft (2000m)
Temperature: 41°F - 104°F (5°C - 40°C)
Relative Humidity: 0% to 95% non-condensing
Weights and Dimensions
Dimensions: 37 ” (9 4 cm) H x 44” (112cm) W x 2 9 ” (7 4cm) D
Net Weight: 1000 lbs. (454 kg)