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Busch – All over the World in Industry

www.buschvacuum.com

Argentina

Busch Argentina S.R.L.
Santo Domingo 3076
C1293AGN-Capital Federal
Buenos Aires
Phone: +54 11 4302 8183
Fax:

+54 11 4301 0896

e-mail: [email protected]

Australia

Busch Australia Pty. Ltd.
30 Lakeside Drive
Broadmeadows, Vic. 3047
Phone: +61 3 93 55 06 00
Fax:

+61 3 93 55 06 99

e-mail: [email protected]

Austria

Busch Austria GmbH
Industriepark Nord
2100 Korneuburg
Phone: +43 2262 / 756 65-0
Fax:

+43 2262 / 756 65-20

e-mail: [email protected]

Belgium

Busch N.V.
Kruinstraat 7
9160 Lokeren
Phone: +32 9 / 348 47 22
Fax:

+32 9 / 348 65 35

e-mail: [email protected]

Brazil

Busch do Brasil Ltda.
Estrada Municipal Santo Gastaldi, 160
13240-000 Jarinu-SP
Phone: +55 11 4016 1400
Fax:

+55 11 4016 5399

e-mail: [email protected]

Canada

Busch Vacuum Technics Inc.
1740, Lionel Bertrand
Boisbriand, Québec J7H 1N7
Phone: +1 450 435 6899
Fax:

+1 450 430 5132

e-mail: [email protected]

Chile

Busch Chile S. A.
Calle El Roble N° 375-G
Lampa - Santiago
Phone: +56 2 3765136
Fax:

+56 2 7387092

e-mail: [email protected]

China

Busch Vacuum (Shanghai) Co., Ltd
No.5, Lane 195 Xipu Road
Songjiang Industrial Estate East New Zone
Shanghai 201611 PRC
Phone: +86 (0)21 67600800
Fax:

+86 (0)21 67600700

e-mail: [email protected]

Czech Republic

Busch Vakuum s.r.o.
Jugoslávská 868/4a
613 00 Brno
Phone: +420 530 504 410
Fax:

+420 530 504 420

e-mail: [email protected]

Denmark

Busch Vakuumteknik A/S
Parallelvej 11
8680 Ry
Phone: +45 87 88 07 77
Fax:

+45 87 88 07 88

e-mail: [email protected]

Finland

Busch Vakuumteknik Oy
Sinikellontie 4
01300 Vantaa
Phone: +358 9 774 60 60
Fax:

+358 9 774 60 666

e-mail: [email protected]

France

Busch France S.A.S.
16, Rue du Bois Chaland
91090 Lisses
Phone: +33 16989 8989
Fax:

+33 16989 8958

e-mail: [email protected]

Germany

Dr.-Ing. K. Busch GmbH
Schauinslandstrasse 1
79689 Maulburg
Phone: +49 7622 681-0
Fax:

+49 7622 6 5484

e-mail: [email protected]

Hungary

Busch Vacuum Kft.
Gyári út 23.
2310 Szigetszentmiklós
Phone: +36 24 887 308
Fax:

+36 24 887 309

e-mail: [email protected]

India

Busch Vacuum India Pvt Ltd.
103, Sector 5
IMT Manesar
Gurgaon
Haryana - 122 050
Phone: +91 124 4050091
Fax:

+91 124 2292103

e-mail: [email protected]

Ireland

Busch Ireland Ltd.
A10-11 Howth Junction Business Centre
Kilbarrack, Dublin 5
Phone: +353 1 832 1466
Fax:

+353 1 832 1470

e-mail: [email protected]

Israel

Busch Israel Ltd.
1 Mevo Sivan Street
Qiryat Gat 82022, Israel
Phone: +972 (0)8 6810485
Fax

+972 (0)8 6810486

e-mail: [email protected]

Italy

Busch Italia S.r.l.
Via Ettore Majorana, 16
20834 Nova Milanese
Phone: +39 0362 370 91
Fax:

+39 0362 370 999

e-mail: [email protected]

Japan

Nippon Busch K.K.
1-23-33, Megumigaoka
Hiratsuka City, Kanagawa
Japan 259-1220
Phone: +81 463-50-4000
Fax:

+81 463-50-4004

e-mail: [email protected]

Korea

Busch

Manufacturing 

Korea,

Ltd.

189-51, Soicheon-ro, Majang-myun,
Icheon-si, Gyunggi-do, 467-813,
Republic of Korea
Phone: +82 31 645 2700
Fax:

+82 31 631 2898

e-mail: [email protected]

Malaysia

Busch Malaysia Sdn Bhd.
4&6, Jalan Taboh 33/22, Seksyen 33
Shah Alam Technology Park
40400 Shah Alam
Selangor Darul Ehsan
Phone: +60 3 5122 2128
Fax

+60 3 5122 2108

e-mail: [email protected]

Mexico

Busch Vacuum Mexico S. de R.L. de C.V.
Tlaquepaque 4865, Los Altos
Monterrey, Nuevo Leon
Mexico 64370
Phone: +52 81 8311-1385
Fax:

+52 81 8311-1386

e-mail: [email protected]

Netherlands

Busch B.V.
Pompmolenlaan 2
3447 GK Woerden
Phone: +31 348-462300
Fax:

+31 348-422939

e-mail: [email protected]

New Zealand

Busch New Zealand Ltd.
Unit D, 41 Arrenway Drive
Albany, Auckland 1330
Phone: +64 9 414 7782
Fax:

+64 9 414 7783

e-mail: [email protected]

Norway

Busch Vakuumteknikk AS
Hestehagen 2
1440 Drøbak
Phone: +47 64 98 98 50
Fax:

+47 64 93 66 21

e-mail: [email protected]

Poland

Busch Polska Sp. z o.o.
Ul. Chopina 27

87-800 Wloclawek
Phone: +48 54 2315400
Fax:

+48 54 2327076

e-mail: [email protected]

Portugal

Busch lbérica S.A., Sucursal em Portugal
Marco da Raposa - Z.I. EN 1 Norte
3750-753 Raso de Travassô - Agueda
Aveiro, Portugal
Phone: +351 234 648 070
Fax:

+351 234 648 068

e-mail: [email protected]

Russia

Busch Vacuum Russia OOO
Kotlyakovskaya str., 6/9
115201 Moscow
Phone: +7 495 6486726
Fax:

+7 495 6486724

e-mail: [email protected]

Singapore

Busch Vacuum Singapore Pte. Ltd.
77A Joo Koon Circle
Singapore 629098
Phone: +65 6488 0866
Fax:

+65 6288 0877

e-mail: [email protected]

South Africa

Busch Vacuum South Africa (Pty) Ltd.
87 Mimetes Road
Denver
Johannesburg
Phone: +27 11 856 0650/6
Fax:

+27 11 856 0625

e-mail: [email protected]

Spain

Busch Ibérica S.A.
Pol. Ind. Coll de la Manya
C/ Jaume Ferran, 6-8
08403 Granollers
Phone: +34 93 861 61 60
Fax:

+34 93 840 91 56

e-mail: [email protected]

Sweden

Busch Vakuumteknik AB
Bråta Industriområde
435 33 Mölnlycke
Phone: +46 31-338 00 80
Fax:

+46 31-338 00 89

e-mail: [email protected]

Switzerland

Busch AG
Waldweg 22
4312 Magden
Phone: +41 61 / 845 90 90
Fax:

+41 61 / 845 90 99

e-mail: [email protected]

Taiwan

Busch Taiwan Corporation
1F. No. 69, Sec. 3, Beishen Road
Shenkeng Township,
Taipei County 222
Phone: +886 2 2662 0775
Fax:

+886 2 2662 0796

e-mail: [email protected]

Thailand

Busch Vacuum (Thailand) Co., Ltd.
29/10 Moo 7, Soi Poolchareon,
Bangna-Trad Road,
Bangchalong, Bangplee
Samutprakarn 10540
Phone: +66 2 3370360-2
Fax:

+66 2 3370363

e-mail: [email protected]

Turkey

VAKUTEK
Emlak Kredi Ishani No: 179
34672 Üsküdar-Istanbul
Phone: +90 216 310 0573
Fax:

+90 216 343 5126

e-mail: [email protected]

United Arab Emirates

Busch Vacuum FZE
A-3/71, Sharjah Airport International Free zone (SAIF-Zone),
P.B.No: 121855, Sharjah
Phone: +971 06 5529 174
Fax:

+971 6 5528 653

e-mail: [email protected]

United Kingdom

Busch (UK) Ltd
Hortonwood 30
Telford Shropshire TF1 7YB
Phone: +44 1952 677 432
Fax:

+44 1952 677 423

e-mail: [email protected]

USA

Busch LLC
516-B Viking Drive
Virginia Beach, VA 23452
Phone: +1 757 463-7800
Fax:

+1 757 463 7407

e-mail: [email protected]

Содержание COBRA DS 8163 A

Страница 1: ...i Screw and Roots Vacuum Pumps COBRA DS 8163 A Standard version Busch Manufacturing Korea Ltd 189 51 Soicheon ro Majang myun Icheon si Gyunggi do 467 813 Republic of Korea 0870772605 181024 Original i...

Страница 2: ...24 Signal control mode Select LL mode EXTERN 24 Current control mode Select LL mode AUTO 25 Maintenance 26 Maintenance program 26 Daily 26 Weekly 26 Monthly 26 Yearly 27 Every 16000 hours of operatio...

Страница 3: ...VFD DP3 DP1 DP2 MB PTB COBRA DS 8163 A MB Roots WY A075 DP 1 Backing vacuum pump DP 600 C DP 2 Backing vacuum pump DP 600 C DP 3 Backing vacuum pump DP 600 C IN Inlet MB Roots WY A075 PTB Pump termin...

Страница 4: ...COBRA DS 8163 A Page 4 0870772605 ESS OUT ECO MSF PTB COBRA DS 8163 A ECO Eletrical power supply ESS Emergency stop switch MSH Main switch OUT Discharge PTB Pump terminal box...

Страница 5: ...on gas end of cylinder ECO Combined power and sensor connection EV Expansion vessel FME Flow meter nitrogen FS 1 Flow switch cooling liquid FS 2 Flow switch cooling water HE Heat exchanger IN Inlet MV...

Страница 6: ...CWC Cooling water connection CWV 2 Regulating valve cooling water ECO Electrical connection FS 3 Flow switch cooling water IN Inlet MTB Motor terminal box ODP Oil drain plug OFP Oil fill plug OSG Oil...

Страница 7: ...cer BUPS Back up power supply CWC Cooling water connection ECP Ground EOCR Electronic Over Current Relay EXB Extension board PLCM PLC module RC Remote control MAC Magnetic contactor MCP Motor Circuit...

Страница 8: ...lating valve cooling water DGR 1 Regulating valve dilution gas middle of cylinder DGR 2 Regulating valve dilution gas end of cylinder ECO Combined power and sensor connection EV Expansion vessel FME F...

Страница 9: ...essured gas is conveyed to the re spective silencers Principle of the screw vacuum pump DP The COBRA NS vacuum pumps work by the principle of screw pumps Two parallel screws 7 rotate in opposite direc...

Страница 10: ...ounted at the motor endplate The flow of the cooling water is controlled by a flow switch FS 1 If the flow is under 1 l min during a minimum time of 30 seconds then the pump stops The temperature swit...

Страница 11: ...s realised by the LCD The vacuum pump is delivered with a circuit breaker Safety Intended use DEFINITION To rule out any misunderstanding the term handling of the vacuum system covers transport storag...

Страница 12: ...TE Type 2 work includes tasks where the energized circuits are or can be measured by placing probes through suitable openings in the covers or insulators Type 3 Equipment is energized Energized circui...

Страница 13: ...l the BUSCH Semicon service team in charge of the maintenance of the pumps l Before restarting the vacuum system reactivate the FDP1 thermal relay by pressing on Reset If this does not work wait 60 se...

Страница 14: ...S 1 FS 2 Depends on alarm function set in the PLC for water flow Set at factory General Stop ie the contactors open and remove power to mo tors S Nitrogen flow to low Nitrogen flowmeter FME Depends on...

Страница 15: ...a means of adapted lifting control the slope of the vacuum system 5 The packaging material must be disposed of in accordance with local and national regulations This handbook is contained in the deli...

Страница 16: ...5 bar Approximate flow rate 0 200 l min l Make sure that the ambient conditions correspond to the protection class of the motor according to nameplate l Make sure that the vacuum system is placed on o...

Страница 17: ...bstances must be pre vented l Make sure that the intake lines are equipped with a shut off device upstream of the intake flange so that the flow of sucked gas can be stopped l Make sure that the intak...

Страница 18: ...If the direction is wrong an error message appears on the LCD reverse two connection phase poles Electrical connection The vacuum system is build with voltage from 208 to 480 Volts WARNING Risk of ele...

Страница 19: ...ll in by filler hole until cooling liquid flows by purge cap on cylin der endplate B side gearings l Stop filling in cooling liquid l Close the purge cap on cylinder endplate B side l Fill in again by...

Страница 20: ...ight glasses l Make sure that the seals of the oil filler cap are not damaged Replace them if necessary l Screw on the oil filler cap hermetically tight COBRA DS vacuum system NOTE It is easier to swi...

Страница 21: ...m system is unavoidable wait until the surface temperature has cooled down or wear protective gloves CAUTION The intensity of the noise of the vacuum system is higher within a certain area of the vacu...

Страница 22: ...vacuum system deterioration by excessing temperature Switching the vacuum system on off First start up of the vacuum system l In REMOTE mode the start stop drive of the vacuum system passes through th...

Страница 23: ...exceeds the threshold and is stopped if the current level drops below the threshold and if the time delay s duration has elapsed l LL Mode External u The Load Lock mode is activated and de activated...

Страница 24: ...LL mode EXTERN Standard operational time chart COBRA DS 8163 A Page 24 0870772605 LCD start or Remote start tool pump Pump speed Booster Dry pump Pump ready Process on 1 Cold start 2 MB on delay 60Hz...

Страница 25: ...ec 2 MB on delay 30 sec COBRA DS 8163 A Standard operational time chart 0870772605 Page 25 Pump speed Booster Dry pump Pump ready pump tool Chamber open close gate valve on off 1 Cold start 2 MB on de...

Страница 26: ...oling of the vacuum pump wished or not put the label or warning board Maintenance processing on or next to the vacuum system CAUTION The oil temperature can reach a value of 90 C Danger of burns l Mak...

Страница 27: ...circuit breaker l Switch on the water outlet first then inlet and nitrogen quick connections l Make sure that the Necessary intallation instructions are fol lowed l Start the vacuum system with the r...

Страница 28: ...ccording to applicable regulations Draining used oil NOTE After switching off the vacuum system at normal operating temperature wait no more than 20 minutes before the oil is drained l Make sure that...

Страница 29: ...on again accidentally l Unscrew the filler cap CLF for the cooling liquid l Check the level of the cooling liquid if the cooling liquid level is at the purge cap on cylinder upper plate do not unscrew...

Страница 30: ...removed l Switch on the vacuum system by following the procedure described in the chapter Installation and start up Dismantling and disposal WARNING If the vacuum system has pumped gases that were con...

Страница 31: ...us pump conditions which could cause personal injury Oil quantity The quantity of oil specified in the following table is of informative nature only Check the oil level with the help of the various oi...

Страница 32: ...f informative nature only Respect the procedure of filling the cooling liquid Quantity Zitrec M 25 already mixed ready to use NS 600 C approx 26 litres CAUTION The proportion of pure glycol and water...

Страница 33: ...speed DP 60 Hz min 1 3600 Nominal motor speed with frequency inverter MB 60 Hz min 1 3600 Noise level EN ISO 2151 50 Hz 60 Hz dB A dB A 75 Ambient temperature C F 0 40 32 104 Maximal counter pressure...

Страница 34: ......

Страница 35: ...equipment and following the standards Standard Title of the standard EN ISO 12100 2010 Safety of machinery Basic concepts general principles of design EN ISO 13857 2008 Safety of machinery Safety dis...

Страница 36: ...Majang myun Icheon si Gyunggi do 467 813 Republic of Korea Phone 82 31 645 2700 Fax 82 31 631 2898 e mail busch busch co kr Malaysia Busch Malaysia Sdn Bhd 4 6 Jalan Taboh 33 22 Seksyen 33 Shah Alam T...

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