l
Before each transport requiring a means of adapted lifting, control
the slope of the vacuum system (< 5°).
CAUTION
The vacuum system must remain in a horizontal position when it has
been filled with oil.
Recommendations on operation
Application
WARNING
The vacuum system is designed for use under the conditions speci-
fied here.
If these conditions are not met, there is a risk of damage to or total
destruction of the vacuum system and its components!
The vacuum system may only be switched on under the specified
conditions.
The COBRA DS vacuum pumps are designed for use in the field of mi-
croelectronics and similar industries.
They can be used to suck gases and gas mixtures.
WARNING
When using toxic, inflammable and/ or explosive gases, make sure
that the vacuum system corresponds in design to applicable local
and national safety regulations and that all applicable safety mea-
sures are followed.
All product-specific safety regulations must be observed.
Solid particles must not get into the vacuum system. Procedural errors
can result in the vacuum system sucking in a certain quantity of liquid.
If the vacuum system has sucked in liquid, a short drying time is neces-
sary at the end of the procedure
The allowed maximum inlet gas temperature depends on the inlet pres-
sure and the type of gas: the lower the inlet pressure (Pa), the higher
the drawn gas temperature (TGas) can be.
The following indicative values for air can be considered:
– Pa > 50 mbar, TGas < 80°C
– Pa < 50 mbar, TGas < 200°C
The vacuum system is intended for use in a potentially non-explosive
environment.
Max. permissible number of startings per hour: 6.
As far as temperature is concerned, the vacuum system is suitable for
continuous duty at any pressure between atmosphere and ultimate
pressure.
The vacuum system is tight down to ultimate pressure.
CAUTION
The surface temperature of the vacuum system can exceed 50 °C
when the vacuum system is in operation.
Danger of burns!
The vacuum system may not be touched when it is in operation. If
touching the vacuum system is unavoidable, wait until the surface
temperature has cooled down or wear protective gloves.
CAUTION
The intensity of the noise of the vacuum system is higher within a
certain area of the vacuum system.
Risk of hearing damage.
Users must wear ear protection when spending a longer period of
time in the vicinity of a non-insulated vacuum system.
CAUTION
The COBRA DS vacuum pumps can be delivered without oil.
Operation without oil will result in damage to the vacuum system!
The vacuum system must remain in a horizontal position when it has
been filled with oil.
CAUTION
The COBRA DS vacuum pumps can be delivered without cooling
liquid.
Operation without cooling liquid will result in damage to the
vacuum system!
CAUTION
The cooling water flow, which is checked by the flow switch FS 2,
must be at least 28 l/min.
l
Make sure that all caps, safeguards and similar covers are mounted
l
Make sure that the safeguards are switched on
l
Make sure that the inlet and outlet for the cooling air are not
covered or closed and that the flow of cooling air is not impaired in
any way
l
Make sure that the vacuum system does not leak. Leakages of
dangerous substances must be prevented
l
Make sure that the “Necessary installation instructions” are
followed and especially that adequate cooling is ensured
The following must be noted when the vacuum system is shut down
for a longer period of time:
CAUTION
If there is a risk of frost, all the cooling water must be drained out of
the vacuum system if the vacuum system is shut down for a longer
period of time!
–
Drain the cooling liquid
u
Open the drain cap (CLD) under the vacuum pump
u
Unscrew the filler cap for the cooling liquid and the purge cap
on B-side (gearings)
u
Drain the cooling liquid completely
u
Screw on the filler cap for the cooling liquid again
u
Screw on the drain cap (CLD) under the vacuum pump
u
Collect the cooling liquid and recycle it or dispose of it
according to local or national regulations
–
Drain the cooling water
u
Open the CWV 1 and CWV 2 valves and Danfoss to 1
u
Pull off the connections for the inlet and outlet of the cooling
water
u
Drain the cooling water completely
COBRA DS 8163 A
Installation and start-up
0870772605
Page 21
Содержание COBRA DS 8163 A
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