background image

l

Make sure that the seals of the drain plugs are not damaged and
that they sit properly. Replace them if necessary.

l

Screw on the drain plugs again

l

Dispose of the used oil according to applicable environmental pro-
tection regulations

Checking the cooling liquid

Checking the level of the cooling liquid

l

Make sure that the vacuum system has been switched off and that
it cannot be switched on again accidentally

l

Check the level of the cooling liquid in the cylinder upper plate

u

Unscrew and remove the purge cap (CLV1) on cylinder upper
plate

u

Cooling liquid must be just at the level of the purge cap (space
in the expansion vessel).

l

Check the level of the cooling liquid in the cylinder endplate B-side
(opposite side of the motor)

u

Unscrew, but do not remove completely the purge cap (CLV2)

u

The level is OK only if the cooling liquid try to flow out.

WARNING

Be carefull, the cooling liquid quantity which could flow, could be
important.

If the level is below:

u

Top up with cooling liquid (see "Refilling cooling liquid")

Filling in new cooling liquid

l

Prepare the quantity of cooling liquid needed (see "Cooling liquid
type/ quantity")

NOTE

: The quantity of cooling liquid specified in the installation hand-

book is of informative nature only.

l

Make sure that the drain plugs have been fitted properly and that
they do not leak

l

Unscrew purge cap (CLV 1) on cylinder upper plate

l

Check the level of the cooling liquid: if the cooling liquid level is at
the purge cap on cylinder upper plate, do not unscrew the purge
cap on cylinder endplate B-side as the cooling liquid will flow out-
side, otherwise follow the procedure

l

Unscrew purge cap (CLV 2) on cylinder endplate B-side

l

Unscrew the filler cap for the cooling liquid

l

Fill in again by filler hole until cooling liquid arrives at the level of
the purge cap of cylinder endplate B-side

l

Stop fill in

l

Close the purge cap on cylinder upper plate

l

Make sure that the seals of the filler cap are not damaged and that
they sit properly. Replace if necessary.

l

Screw on the filler plug again

l

Wipe cooling liquid that may have run on outside surfaces of
vacuum system

Refilling cooling liquid

Cooling liquid does not normally have to be refilled outside the recom-
mended cooling liquid change intervals.

l

Make sure that the vacuum system has been switched off and that
it cannot be switched on again accidentally

l

Unscrew the filler cap (CLF) for the cooling liquid

l

Check the level of the cooling liquid: if the cooling liquid level is at
the purge cap on cylinder upper plate, do not unscrew the purge
cap on cylinder endplate B-side as the cooling liquid will flow out-
side otherwise follow the procedure

l

Open purge cap (CLV1) on cylinder upper plate and purge cap
(CLV2) on cylinder endplate B-side

l

Fill in by filler hole until cooling liquid flows by purge cap on
cylinder endplate B-side

l

Stop fill in

l

Close the purge cap on cylinder endplate B-side

l

Fill in again by filler hole until cooling liquid flows by purge cap of
cylinder upper plate

l

Close the purge cap of cylinder upper plate

l

Screw on the cooling liquid filler cap again

l

If liquid has run on to the outside surfaces of the vacuum system,
wipe it off

Draining the cooling liquid

l

Make sure that the vacuum system has been switched off and that
it cannot be switched on again accidentally

l

Make sure that the vacuum system has been adjusted to atmo-
spheric pressure

l

Place a container under the drain plug (CLD) for the cooling liquid

l

Unscrew drain plug of cooling liquid

l

Unscrew filling cap on cylinder upper plate

l

Unscrew purge cap on cylinder endplate B-side

When cooling liquid stops running out:

l

Screw purge caps

l

Close the drain plug for the cooling liquid

l

Make sure that the seals of the filler cap are not damaged and that
they sit properly. Replace if necessary.

l

Dispose of the used cooling liquid according to applicable environ-
mental protection regulations

Checking the cooling water

Checking the cooling water flow

l

Checking the cooling water flow regularly

If the flow drops, check for leaks

u

Make sure that the specifications of the cooling water are
followed

Checking the nitrogen

Checking the nitrogen flow

l

Checking the nitrogen flow regularly (only when DP runs)

If the flow drops, check for leaks

u

Make sure that the specifications of the nitrogen are followed

Checking the current consumption

u

Check the current intensity of the motors of the DP and MB
vacuum pumps

An increased intensity is an indication for a fault

Checking the sound silencer (accessory)

l

Make sure that the condensate does not collect at the exhaust of
the vacuum system

l

Drain the condensate at the drain opening and collect it in a con-
tainer

l

Dispose of the condensate according to applicable environmental
protection regulations

l

Check the sound absorber regularly and clean it if necessary

COBRA DS 8163 A

Checking the oil

0870772605

Page 29

Содержание COBRA DS 8163 A

Страница 1: ...i Screw and Roots Vacuum Pumps COBRA DS 8163 A Standard version Busch Manufacturing Korea Ltd 189 51 Soicheon ro Majang myun Icheon si Gyunggi do 467 813 Republic of Korea 0870772605 181024 Original i...

Страница 2: ...24 Signal control mode Select LL mode EXTERN 24 Current control mode Select LL mode AUTO 25 Maintenance 26 Maintenance program 26 Daily 26 Weekly 26 Monthly 26 Yearly 27 Every 16000 hours of operatio...

Страница 3: ...VFD DP3 DP1 DP2 MB PTB COBRA DS 8163 A MB Roots WY A075 DP 1 Backing vacuum pump DP 600 C DP 2 Backing vacuum pump DP 600 C DP 3 Backing vacuum pump DP 600 C IN Inlet MB Roots WY A075 PTB Pump termin...

Страница 4: ...COBRA DS 8163 A Page 4 0870772605 ESS OUT ECO MSF PTB COBRA DS 8163 A ECO Eletrical power supply ESS Emergency stop switch MSH Main switch OUT Discharge PTB Pump terminal box...

Страница 5: ...on gas end of cylinder ECO Combined power and sensor connection EV Expansion vessel FME Flow meter nitrogen FS 1 Flow switch cooling liquid FS 2 Flow switch cooling water HE Heat exchanger IN Inlet MV...

Страница 6: ...CWC Cooling water connection CWV 2 Regulating valve cooling water ECO Electrical connection FS 3 Flow switch cooling water IN Inlet MTB Motor terminal box ODP Oil drain plug OFP Oil fill plug OSG Oil...

Страница 7: ...cer BUPS Back up power supply CWC Cooling water connection ECP Ground EOCR Electronic Over Current Relay EXB Extension board PLCM PLC module RC Remote control MAC Magnetic contactor MCP Motor Circuit...

Страница 8: ...lating valve cooling water DGR 1 Regulating valve dilution gas middle of cylinder DGR 2 Regulating valve dilution gas end of cylinder ECO Combined power and sensor connection EV Expansion vessel FME F...

Страница 9: ...essured gas is conveyed to the re spective silencers Principle of the screw vacuum pump DP The COBRA NS vacuum pumps work by the principle of screw pumps Two parallel screws 7 rotate in opposite direc...

Страница 10: ...ounted at the motor endplate The flow of the cooling water is controlled by a flow switch FS 1 If the flow is under 1 l min during a minimum time of 30 seconds then the pump stops The temperature swit...

Страница 11: ...s realised by the LCD The vacuum pump is delivered with a circuit breaker Safety Intended use DEFINITION To rule out any misunderstanding the term handling of the vacuum system covers transport storag...

Страница 12: ...TE Type 2 work includes tasks where the energized circuits are or can be measured by placing probes through suitable openings in the covers or insulators Type 3 Equipment is energized Energized circui...

Страница 13: ...l the BUSCH Semicon service team in charge of the maintenance of the pumps l Before restarting the vacuum system reactivate the FDP1 thermal relay by pressing on Reset If this does not work wait 60 se...

Страница 14: ...S 1 FS 2 Depends on alarm function set in the PLC for water flow Set at factory General Stop ie the contactors open and remove power to mo tors S Nitrogen flow to low Nitrogen flowmeter FME Depends on...

Страница 15: ...a means of adapted lifting control the slope of the vacuum system 5 The packaging material must be disposed of in accordance with local and national regulations This handbook is contained in the deli...

Страница 16: ...5 bar Approximate flow rate 0 200 l min l Make sure that the ambient conditions correspond to the protection class of the motor according to nameplate l Make sure that the vacuum system is placed on o...

Страница 17: ...bstances must be pre vented l Make sure that the intake lines are equipped with a shut off device upstream of the intake flange so that the flow of sucked gas can be stopped l Make sure that the intak...

Страница 18: ...If the direction is wrong an error message appears on the LCD reverse two connection phase poles Electrical connection The vacuum system is build with voltage from 208 to 480 Volts WARNING Risk of ele...

Страница 19: ...ll in by filler hole until cooling liquid flows by purge cap on cylin der endplate B side gearings l Stop filling in cooling liquid l Close the purge cap on cylinder endplate B side l Fill in again by...

Страница 20: ...ight glasses l Make sure that the seals of the oil filler cap are not damaged Replace them if necessary l Screw on the oil filler cap hermetically tight COBRA DS vacuum system NOTE It is easier to swi...

Страница 21: ...m system is unavoidable wait until the surface temperature has cooled down or wear protective gloves CAUTION The intensity of the noise of the vacuum system is higher within a certain area of the vacu...

Страница 22: ...vacuum system deterioration by excessing temperature Switching the vacuum system on off First start up of the vacuum system l In REMOTE mode the start stop drive of the vacuum system passes through th...

Страница 23: ...exceeds the threshold and is stopped if the current level drops below the threshold and if the time delay s duration has elapsed l LL Mode External u The Load Lock mode is activated and de activated...

Страница 24: ...LL mode EXTERN Standard operational time chart COBRA DS 8163 A Page 24 0870772605 LCD start or Remote start tool pump Pump speed Booster Dry pump Pump ready Process on 1 Cold start 2 MB on delay 60Hz...

Страница 25: ...ec 2 MB on delay 30 sec COBRA DS 8163 A Standard operational time chart 0870772605 Page 25 Pump speed Booster Dry pump Pump ready pump tool Chamber open close gate valve on off 1 Cold start 2 MB on de...

Страница 26: ...oling of the vacuum pump wished or not put the label or warning board Maintenance processing on or next to the vacuum system CAUTION The oil temperature can reach a value of 90 C Danger of burns l Mak...

Страница 27: ...circuit breaker l Switch on the water outlet first then inlet and nitrogen quick connections l Make sure that the Necessary intallation instructions are fol lowed l Start the vacuum system with the r...

Страница 28: ...ccording to applicable regulations Draining used oil NOTE After switching off the vacuum system at normal operating temperature wait no more than 20 minutes before the oil is drained l Make sure that...

Страница 29: ...on again accidentally l Unscrew the filler cap CLF for the cooling liquid l Check the level of the cooling liquid if the cooling liquid level is at the purge cap on cylinder upper plate do not unscrew...

Страница 30: ...removed l Switch on the vacuum system by following the procedure described in the chapter Installation and start up Dismantling and disposal WARNING If the vacuum system has pumped gases that were con...

Страница 31: ...us pump conditions which could cause personal injury Oil quantity The quantity of oil specified in the following table is of informative nature only Check the oil level with the help of the various oi...

Страница 32: ...f informative nature only Respect the procedure of filling the cooling liquid Quantity Zitrec M 25 already mixed ready to use NS 600 C approx 26 litres CAUTION The proportion of pure glycol and water...

Страница 33: ...speed DP 60 Hz min 1 3600 Nominal motor speed with frequency inverter MB 60 Hz min 1 3600 Noise level EN ISO 2151 50 Hz 60 Hz dB A dB A 75 Ambient temperature C F 0 40 32 104 Maximal counter pressure...

Страница 34: ......

Страница 35: ...equipment and following the standards Standard Title of the standard EN ISO 12100 2010 Safety of machinery Basic concepts general principles of design EN ISO 13857 2008 Safety of machinery Safety dis...

Страница 36: ...Majang myun Icheon si Gyunggi do 467 813 Republic of Korea Phone 82 31 645 2700 Fax 82 31 631 2898 e mail busch busch co kr Malaysia Busch Malaysia Sdn Bhd 4 6 Jalan Taboh 33 22 Seksyen 33 Shah Alam T...

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