l
Carefully lift up the control panel (CP) halfway
l
Disconnect the earth connection wire (ECW)
l
Disconnect the tool interface cable (TI)
l
Let the control panel (CP) on the vacuum pump
l
Unscrew the oil fill plug (OFP)
l
Fill in oil
l
Make sure that the oil level lies between the MIN and MAX
markings on the oil sight glass
l
Make sure that the seal of the oil filler cap is not damaged. Replace
it if necessary
l
Screw on the oil filler cap hermetically tight
l
Connect the tool interface cable (TI) and the earth connection wire
(ECW)
l
Put the control panel (CP) back at his original place
NOTE
: It is easier to switch on the vacuum pump with cold oil when
the intake line is not closed or when the intake flange is not covered by
a rubber plate.
l
Start the vacuum pump
If the intake line is equipped with a shut-off device:
u
Close the shut-off device
If the intake line is not equipped with a shut-off device:
u
Place a rubber plate on the intake flange
l
Let the vacuum pump run for a few minutes
l
Stop the vacuum pump and wait a few minutes
l
Make sure that the oil level still lies between the MIN and MAX
markings on the oil sight glass
If the oil level is below the MIN marking:
u
Fill in more oil
If the intake line is equipped with a shut-off device:
u
Open the shut-off device
If the intake line is not equipped with a shut-off device:
u
Remove the rubber plate from the intake flange and connect
the intake line to the intake flange
CAUTION
The vacuum pump may not be lifted anymore when it has been
filled with oil.
l
Make sure before every transport that the oil has been drained out
of the vacuum pump.
CAUTION
The vacuum pump must remain in a horizontal position when it has
been filled with oil.
Checking the direct cooling
The flow of the cooling water is checked by the flowmeter CWM. The
flowmeter must be connected in such a way that switching-on leads to
an alarm and stopping of the vacuum pump when the flow drops
below 0,3 l/min.
Saving the operating parameters
As soon as the vacuum pump is working under normal conditions after
being switched on:
l
Measure the working current of the motor and save it as reference
value for all future maintenance and repair work
Recommendations on operation
Application
WARNING
The vacuum pump is designed for use under the conditions speci-
fied here.
If these conditions are not met, there is a risk of damage to or total
destruction of the vacuum pump and its components!
The vacuum pump may only be switched on under the specified
conditions.
The COBRA BC vacuum pumps are designed for use in the field of
microelectronics and similar industries.
They can be used to suck gases and gas mixtures.
WARNING
When using toxic, inflammable and/ or explosive gases, make sure
that the system corresponds in design to applicable local and na-
tional safety regulations and that all applicable safety measures are
followed.
All product-specific safety regulations must be observed.
Solid particles must not get into the vacuum pump. Procedural errors
can result in the pump sucking in a certain quantity of liquid. If the
pump has sucked in liquid, a short drying time is necessary at the end
of the procedure.
The allowed maximum inlet gas temperature depends on the inlet
pressure and the type of gas: the lower the inlet pressure (Pa), the
higher the drawn gas temperature (TGas) can be.
The following indicative values for air can be considered:
– Pa > 50 mbar, TGas < 80°C
– Pa < 50 mbar, TGas < 200°C
Installation and start-up
BC 0101 G
Page 12
0870704904 (En)
OFP
Oil fill plug
OSG
Oil sight glass
ECW
ECP
CP
TI
TIC
Control panel
CP
ECP
Earth connection pump
Tool interface
TI
ECW
Earth connection wire
OFP
OSG
Tool interface connection
TIC
CAUTION
Before you change the type of oil, make sure that the new type is
compatible with the old type. If necessary, flush the vacuum pump.
Содержание COBRA BC 0101 G
Страница 22: ...Note...
Страница 23: ...Note...