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No. 99MBB079A
10.5.22 Measuring volume Vo
Volume Vo is a value determined from the closed area (S) lower than the slice level (a)
where the mr value falls at Mr2 on the BAC (material ratio curve) and upper than the BAC.
Vo =
Mr2:%,Rvk:
m
2000
(100-Mr2)
×
Rvk
This parameter is a value that is converted from the volume (mm
3
) of the concave portion
lower than the slice level to a volume per area (cm
2
) when viewed from the top of a
workpiece, if the measured profile and slice level are assumed as a plane in a 3-dimensional
space.
Rvk
Mr2
a (slice level)
S
100
0
mr(%)
DEPTH(
μ
m)
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