Brooks GF135, Руководство по установке и эксплуатации

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Section 5 Product Description Code
Table 5-1 GF100, GF120 & GF125 Series Product Description Code
Code Description Code Description Code Description Code Description Code Description Code Option Code Option Code Option Code Option Code Option Option Description Option Description Option Description Option Description Option Description
I. I.
I. I. I. Base Model Code
GF GF
GF GF GF High Purity/Ultra High Purity Digital Mass Flow Controllers
II. II. II. II. II. Package / Finish Specifications 100 100 100 100 100 Flow range 3 sccm -55 slpm N
2 2 2 2 2
Eq.; + 1.0% SP Accuracy; 1 sec Response; 10 Ra
120 120
120 120 120 Flow range 3 sccm -55 slpm N
2 2 2 2 2
Eq.; + 1.0% SP Accuracy; 700 msec Response; 4 Ra
125 125 125 125 125 Pressure Transient Insensitive (PTI) Flow range 3 sccm -55 slpm N
2 2 2 2 2
Eq.; + 1.0% SP Accuracy;
300-700 msec Response; 4 Ra
III. III. III. III. III. Configurability C C C C C MultiFlo capable. Standard bins or specific gas/range may be selected.
X X X X X Not MultiFlo capable. Specific gas/range required. (must select w/ SD, SL or HA special application)
IV. IV. IV. IV. IV. Special Application XX XX XX XX XX Standard
SL SL SL SL SL Safe Delivery System (GF120 Only) Full scale flow range; 4 to 25 sccm, Nitrogen Equivalent
SD SD SD SD SD Safe Delivery System (GF120 Only) Full scale flow range; >25 sccm to 1 slpm, Nitrogen Equivalent
V. V. V. V. V. Valve Configuration O O O O O Normally Open valve (not available with SD, SL or HA options)
C C C C C Normally Closed valve (must select with SD, SL or HA special application)
M M
M M
M Meter (No Valve)
VI. VI. VI. VI. VI. Gas or SH MultiFlo Bin XXXX XXXX XXXX XXXX XXXX XXXX XXXX XXXX XXXX XXXX Specific Gas Code & Range, i.e. “0004” = Argon and “010L” = 10 slpm (must select w/ SD, SL or
HA special application).
SH40 010C SH40 010C SH40 010C SH40 010C SH40 010C Standard Configuration #40, 3-10 sccm Nitrogen Equivalent (0° C Reference)
SH41 030C SH41 030C SH41 030C SH41 030C SH41 030C Standard Configuration #41, 11-30 sccm Nitrogen Equivalent (0° C Reference)
SH42 092C SH42 092C SH42 092C SH42 092C SH42 092C Standard Configuration #42, 31-92 sccm Nitrogen Equivalent (0° C Reference)
SH43 280C SH43 280C
SH43 280C SH43 280C SH43 280C Standard Configuration #43,93-280 sccm Nitrogen Equivalent (0° C Reference)
SH44 860C SH44 860C SH44 860C SH44 860C SH44 860C Standard Configuration #44, 281-860 sccm Nitrogen Equivalent (0° C Reference)
SH45 2.6L SH45 2.6L SH45 2.6L SH45 2.6L SH45 2.6L Standard Configuration #45, 861-2600 sccm Nitrogen Equivalent (0° C Reference)
SH46 7.2L SH46 7.2L SH46 7.2L SH46 7.2L SH46 7.2L Standard Configuration #46, 2601-7200 sccm Nitrogen Equivalent (0° C Reference)
SH47 015L SH47 015L
SH47 015L SH47 015L SH47 015L Standard Configuration #47, 7201-15000 sccm Nitrogen Equivalent (0° C Reference)
SH48 030L SH48 030L SH48 030L SH48 030L SH48 030L Standard Configuration #48, 15001-30000 sccm Nitrogen Equivalent (0° C Reference)
SH49 040L SH49 040L SH49 040L SH49 040L SH49 040L Standard Configuration #49, 30001-40000 sccm Nitrogen Equivalent (0° C Reference)
SH50 055L SH50 055L SH50 055L SH50 055L SH50 055L Standard Configuration #50, 40001-55000 sccm Nitrogen Equivalent (0° C Reference)
VII. VII. VII. VII. VII. Fitting VX VX VX VX VX 1-1/2” body width, 124mm 1/4” VCR male
VS VS VS VS VS 1-1/8” body width, 124mm 1/4” VCR male
CX CX
CX CX CX 1-1/8” body width, 92mm C Seal
DX DX DX DX DX 1-1/8” body width, 79.8mm C Seal
EX EX EX EX EX 1-1/2” body width, 79.8mm W Seal
WX WX WX WX WX 1-1/8” body width, 92mm W Seal
YX YX
YX YX YX 1-1/8” body width, 79.8mm W Seal
AX AX
AX AX
AX 1-1/2” body width, 92mm C Seal
BX BX BX BX BX 1-1/2” body width, 92mm W Seal
LX LX LX LX LX 1-1/8” body width, 92mm C Seal w/Poke Yoke
AS AS
AS AS AS 1-1/2” body width, 92mm 0.440” large bore C Seal (only for bins SH45-SH50)
VIII. VIII. VIII. VIII. VIII. Downstream Condition A A A A A Atmosphere
V V
V V V Vacuum; Default for SD, SL and HA special application
IX. IX. IX. IX. IX. Sensor O O O O O Default Sensor Orientation
Model Code continued on next page.
Overview
Reference Tables 5-1 through 5-5 for specific Product Description Codes.