13
Section 1 Introduction
Table 1-7 Specifications for GF101/GF121/GF126 Series
GF101
GF101
GF101
GF101
GF101
GF121
GF121
GF121
GF121
GF121
GF126
GF126
GF126
GF126
GF126
Performance
Performance
Performance
Performance
Performance
Full Scale Flow Range (N
Full Scale Flow Range (N
Full Scale Flow Range (N
Full Scale Flow Range (N
Full Scale Flow Range (N
2
2
2
2
2
Eq.)
Eq.)
Eq.)
Eq.)
Eq.)
55 to 300 slm
Flow Accuracy
Flow Accuracy
Flow Accuracy
Flow Accuracy
Flow Accuracy
+1% S.P. > 35-100%, +0.35% F.S. 2-35%
Repeatability & Reproducibility
Repeatability & Reproducibility
Repeatability & Reproducibility
Repeatability & Reproducibility
Repeatability & Reproducibility
< + 0.15% S.P.
Linearity
Linearity
Linearity
Linearity
Linearity
+ 0.5% F.S. (included in accuracy)
Response Time (Settling Time)
Response Time (Settling Time)
Response Time (Settling Time)
Response Time (Settling Time)
Response Time (Settling Time)
Normally Closed Valve
Normally Closed Valve
Normally Closed Valve
Normally Closed Valve
Normally Closed Valve
< 1 sec
Pressure Transducer
Pressure Transducer
Pressure Transducer
Pressure Transducer
Pressure Transducer
Ability to measure inlet pressure
Control Range
Control Range
Control Range
Control Range
Control Range
5-100% (Normally Closed Valve)
MultiFlo
MultiFlo
MultiFlo
MultiFlo
MultiFlo
Standard (All typical high flow rate process gases & mixtures supported)
# of Bins
# of Bins
# of Bins
# of Bins
# of Bins
4 Bins
Control Range
Control Range
Control Range
Control Range
Control Range
5-100% (Normally Closed Valve)
Valve Shut Down (N.C. Valve)
Valve Shut Down (N.C. Valve)
Valve Shut Down (N.C. Valve)
Valve Shut Down (N.C. Valve)
Valve Shut Down (N.C. Valve)
< 2% of F.S. @ 30 N2 psig/atm out
Zero Stability
Zero Stability
Zero Stability
Zero Stability
Zero Stability
< + 0.5% F.S. per year
Temperature Coefficient
Temperature Coefficient
Temperature Coefficient
Temperature Coefficient
Temperature Coefficient
Span: 0.05% S.P. per
o
C, Zero: 0.005% F.S. per
o
C
Ratings
Ratings
Ratings
Ratings
Ratings
Operating Temperature Range
Operating Temperature Range
Operating Temperature Range
Operating Temperature Range
Operating Temperature Range
10-50
o
C
Differential Pressure Range
Differential Pressure Range
Differential Pressure Range
Differential Pressure Range
Differential Pressure Range
30-90 psid
Maximum Operating Pressure
Maximum Operating Pressure
Maximum Operating Pressure
Maximum Operating Pressure
Maximum Operating Pressure
Controller: 75 psig / Meter: 150 psig
Leak Integrity (external)
Leak Integrity (external)
Leak Integrity (external)
Leak Integrity (external)
Leak Integrity (external)
1x10
-10
atm. cc/sec He
Mechanical
Mechanical
Mechanical
Mechanical
Mechanical
Valve Type
Valve Type
Valve Type
Valve Type
Valve Type
Normally Closed
Meter (no valve)
Wetted Materials
Wetted Materials
Wetted Materials
Wetted Materials
Wetted Materials
GF101: SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45
GF121/GF126: SEMI F20 UHP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45
Surface Finish
Surface Finish
Surface Finish
Surface Finish
Surface Finish
10
μ
inch Ra
5
μ
inch Ra (0.1
μ
m Ra)
Diagnostics & Display
Diagnostics & Display
Diagnostics & Display
Diagnostics & Display
Diagnostics & Display
Status Lights
Status Lights
Status Lights
Status Lights
Status Lights
MFC Health, Network Status
Alarms
Alarms
Alarms
Alarms
Alarms
Control Valve Output, Network Interruption
Display Type
Display Type
Display Type
Display Type
Display Type
Top Mount Integrated LCD
Viewing Angle / Viewing Distance
Viewing Angle / Viewing Distance
Viewing Angle / Viewing Distance
Viewing Angle / Viewing Distance
Viewing Angle / Viewing Distance
Fixed / 10 feet
Units Displayed / Resolution
Units Displayed / Resolution
Units Displayed / Resolution
Units Displayed / Resolution
Units Displayed / Resolution
Flow (%), Temp. (
o
C), Pressure (psia, kPa) / 0.1 (unit)
Electrical
Electrical
Electrical
Electrical
Electrical
Electrical Connection
Electrical Connection
Electrical Connection
Electrical Connection
Electrical Connection
RS485/Analog via 9-Pin “D” connector, DeviceNet
TM
via 5-Pin “M12” connector
Digital Communication
Digital Communication
Digital Communication
Digital Communication
Digital Communication
RS485+ (model specific), DeviceNet (model specific), RS485 Diagnostic Port (all models)
Diagnostic /Service Port
Diagnostic /Service Port
Diagnostic /Service Port
Diagnostic /Service Port
Diagnostic /Service Port
RS485 via 2.5mm jack
Power Supply/Consumption
Power Supply/Consumption
Power Supply/Consumption
Power Supply/Consumption
Power Supply/Consumption
DeviceNet: 545 mA max. @ +11-25 Vdc., 250mA max. @ 24 Vdc (Under typical operating conditions)
RS485/Analog: 6 Watts max @ +15 Vdc. (+10%) (Under typical operating conditions)
Compliance
Compliance
Compliance
Compliance
Compliance
EMC
EMC
EMC
EMC
EMC
EC Directive 2004/108/EC CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
Environmental Compliance
Environmental Compliance
Environmental Compliance
Environmental Compliance
Environmental Compliance
RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006
