Brooks GF135, Руководство по установке и эксплуатации

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9
Section 1 Introduction
Table 1-3 Specifications for Standard GF100/GF120/GF125 Series
GF100 GF100 GF100 GF100 GF100 GF120 GF120 GF120 GF120 GF120 GF125 GF125 GF125 GF125 GF125
Electrical Electrical Electrical Electrical Electrical
Electrical Connection Electrical Connection
Electrical Connection Electrical Connection Electrical Connection RS485/Analog via 9-Pin “D” connector, DeviceNet TM via 5-Pin “M12” connector
Digital Communication Digital Communication Digital Communication Digital Communication Digital Communication RS485+ (model specific), DeviceNet (model specific), RS485 Diagnostic Port (all models)
Diagnostic /Service Port Diagnostic /Service Port
Diagnostic /Service Port Diagnostic /Service Port Diagnostic /Service Port RS485 via 2.5mm jack
Power Supply/Consumption Power Supply/Consumption Power Supply/Consumption Power Supply/Consumption Power Supply/Consumption DeviceNet: 545mA max. @ +11-25 Vdc., 250mA max. @ 24Vdc
RS485/Analog: 6 Watts max @ +15Vdc. (+10%) or +24 Vdc (±10%)
Performance Performance
Performance Performance Performance
Full Scale Flow Range (N Full Scale Flow Range (N
Full Scale Flow Range (N Full Scale Flow Range (N Full Scale Flow Range (N
2 2 2 2 2
Eq.) Eq.)
Eq.) Eq.) Eq.) 3 sccm to 55 slm
Flow Accuracy Flow Accuracy Flow Accuracy Flow Accuracy Flow Accuracy +1% S.P. > 35-100%, +0.35% F.S. 2-35%
Repeatability & Reproducibility Repeatability & Reproducibility
Repeatability & Reproducibility Repeatability & Reproducibility Repeatability & Reproducibility < + 0.15% S.P.
Linearity Linearity Linearity Linearity Linearity + 0.5% F.S. (included in accuracy)
Response Time (Settling Time) Response Time (Settling Time)
Response Time (Settling Time) Response Time (Settling Time) Response Time (Settling Time) 300ms (3-860 sccm N2 Eq.)
Normally Closed Valve Normally Closed Valve
Normally Closed Valve Normally Closed Valve Normally Closed Valve < 1 sec 700ms 400ms (861-7200 sccm N2 Eq.)
500ms (7201-30000 sccm N2 Eq.)
<700ms (30001-55000 sccm N2 Eq.)
Normally Open Valve Normally Open Valve
Normally Open Valve Normally Open Valve
Normally Open Valve <1.5 sec
Pressure Insensitivity Pressure Insensitivity Pressure Insensitivity Pressure Insensitivity Pressure Insensitivity Not Applicable < 5% SP up to 5 psi/sec upstream press. spike
Control Range Control Range
Control Range Control Range
Control Range 2-100% (Normally Closed Valve) 3-100% (Normally Open Valve)
MultiFlo MultiFlo MultiFlo MultiFlo MultiFlo standard
#of Bins #of Bins
#of Bins #of Bins
#of Bins 11 bins
Valve Shut Down (N.C. Valve) Valve Shut Down (N.C. Valve) Valve Shut Down (N.C. Valve) Valve Shut Down (N.C. Valve) Valve Shut Down (N.C. Valve) < 1% of F.S.
Valve Shut Down (N.O. Valve) Valve Shut Down (N.O. Valve) Valve Shut Down (N.O. Valve) Valve Shut Down (N.O. Valve) Valve Shut Down (N.O. Valve) 2% of F.S.
Zero Stability Zero Stability
Zero Stability Zero Stability
Zero Stability < + 0.5% F.S. per year
Temperature Coefficient Temperature Coefficient Temperature Coefficient Temperature Coefficient Temperature Coefficient Span: 0.05% S.P. per o C, Zero: 0.005% F.S. per o C
Ratings Ratings Ratings Ratings Ratings
Operating Temperature Range Operating Temperature Range Operating Temperature Range Operating Temperature Range Operating Temperature Range 10-50
o
C
Differential Pressure Range* Differential Pressure Range* Differential Pressure Range* Differential Pressure Range* Differential Pressure Range* 3-860 sccm = 7-45 psid, 861- 7200 sccm = 10-45 psid, 7201-55000 sccm = 15-45 psid
*Argon gas applications require an additional 10 psid differential pressure.
Low vapor pressure gases require an inlet pressure of > 100 Torr, with vacuum on outlet
(example SiCl4). Contact Brooks Technical Support for more information.
Maximum Operating Pressure Maximum Operating Pressure Maximum Operating Pressure Maximum Operating Pressure Maximum Operating Pressure 500 psia max 100 psia max
Leak Integrity (external) Leak Integrity (external) Leak Integrity (external) Leak Integrity (external) Leak Integrity (external) 1x10 -10 atm. cc/sec He
Compliance Compliance Compliance Compliance Compliance
EMC EMC
EMC EMC
EMC EC Directive 2004/108/EC CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
Environmental Compliance Environmental Compliance Environmental Compliance Environmental Compliance Environmental Compliance RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006
NOTE: See the following Safe Delivery System (SDS) section for optional detailed specifications
Diagnostics & Display Diagnostics & Display Diagnostics & Display Diagnostics & Display Diagnostics & Display
Status Lights Status Lights
Status Lights Status Lights Status Lights MFC Health, Network Status
Alarms Alarms Alarms Alarms Alarms Control Valve Output, Network Interruption
Display Type Display Type
Display Type Display Type Display Type Top Mount Integrated LCD
Viewing Angle / Viewing Distance Viewing Angle / Viewing Distance
Viewing Angle / Viewing Distance Viewing Angle / Viewing Distance Viewing Angle / Viewing Distance Fixed / 10 feet
Units Displayed / Resolution Units Displayed / Resolution
Units Displayed / Resolution Units Displayed / Resolution
Units Displayed / Resolution Flow (%), Temp. (
o
C), Pressure (psia, kPa) / 0.1 (unit)
Mechanical Mechanical Mechanical Mechanical Mechanical
Valve Type Valve Type
Valve Type Valve Type
Valve Type Normally Closed
Normally Open
Meter (no valve)
Wetted Materials Wetted Materials Wetted Materials Wetted Materials Wetted Materials GF100: SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45
GF120/GF125: SEMI F20 UHP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45
Surface Finish Surface Finish
Surface Finish Surface Finish Surface Finish 10
μ
inch Ra 4
μ
inch Ra (0.1
μ
m Ra)