Brooks GF135, Руководство по установке и эксплуатации

Страница: 18 / 63

14
Section 1 Introduction
Table 1-8 Specifications for GF101/GF121/GF126 Series with EtherCAT Communications
Performance Performance Performance Performance Performance
GF101 GF101 GF101 GF101 GF101 GF121 GF121 GF121 GF121 GF121 GF126 GF126 GF126 GF126 GF126
Full Scale Flow Range Full Scale Flow Range Full Scale Flow Range Full Scale Flow Range Full Scale Flow Range 55 slm to 300 slm
Flow Accuracy Flow Accuracy
Flow Accuracy Flow Accuracy
Flow Accuracy +1% S.P. > 35-100%; +0.35% F.S. 2-35%
Repeatability & Reproducibility Repeatability & Reproducibility
Repeatability & Reproducibility Repeatability & Reproducibility Repeatability & Reproducibility < + 0.15% S.P.
Response Time/Settling Time Response Time/Settling Time Response Time/Settling Time Response Time/Settling Time Response Time/Settling Time < 1 sec
(NC Valve) (NC Valve)
(NC Valve) (NC Valve) (NC Valve)
Pressure Insensitivity Pressure Insensitivity Pressure Insensitivity Pressure Insensitivity Pressure Insensitivity Not Applicable Ability to measure inlet presssure
Control Range Control Range Control Range Control Range Control Range 5-100% (Normally Closed Valve)
MultiFlo MultiFlo MultiFlo MultiFlo MultiFlo Standard
#of Bins #of Bins
#of Bins #of Bins
#of Bins 4 bins
Valve Shut Down (N.C. Valve) Valve Shut Down (N.C. Valve) Valve Shut Down (N.C. Valve) Valve Shut Down (N.C. Valve) Valve Shut Down (N.C. Valve) <2% of F.S. @30 N2 psig/atm out
Zero Stability Zero Stability Zero Stability Zero Stability Zero Stability < + 0.15% F.S. per year
Temperature Coefficient Temperature Coefficient Temperature Coefficient Temperature Coefficient Temperature Coefficient Zero: 0.005% F.S. per
o
C
Ratings Ratings Ratings Ratings Ratings
Operating Temperature Range Operating Temperature Range
Operating Temperature Range Operating Temperature Range
Operating Temperature Range 10-50
o
C
Differential Pressure Range Differential Pressure Range
Differential Pressure Range Differential Pressure Range Differential Pressure Range 30-90 psid
Maximum Operating Pressure Maximum Operating Pressure Maximum Operating Pressure Maximum Operating Pressure Maximum Operating Pressure Controller: 75 psig
Meter: 150 psig
Leak Integrity (external) Leak Integrity (external) Leak Integrity (external) Leak Integrity (external) Leak Integrity (external) 1x10^ -10 atm. cc/sec He
Mechanical Mechanical Mechanical Mechanical Mechanical
Valve Type Valve Type Valve Type Valve Type Valve Type Normally Closed
Meter (no valve)
Wetted Materials Wetted Materials Wetted Materials Wetted Materials Wetted Materials SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45
Surface Finish Surface Finish Surface Finish Surface Finish Surface Finish 10
μ
inch Ra 5
μ
inch Ra
Diagnostics & Display Diagnostics & Display Diagnostics & Display Diagnostics & Display Diagnostics & Display
Status Lights Status Lights
Status Lights Status Lights
Status Lights Run, Error, Power, Network Status
Alarms Alarms
Alarms Alarms Alarms Control Valve Output, Network Interruption, Temperature High/Low, Pressure High/Low, Power Surge/Sag
Display Type Display Type Display Type Display Type Display Type Top Mount Integrated LCD
V V V V Viewing Angle / Viewing Distance iewing Angle / Viewing Distance iewing Angle / Viewing Distance iewing Angle / Viewing Distance iewing Angle / Viewing Distance Rotatable / 10 feet
U U U U Units Displayed / Resolution nits Displayed / Resolution nits Displayed / Resolution nits Displayed / Resolution nits Displayed / Resolution Flow (%), Temp. (
o
C), Pressure (psia, kPa) / 0.1 (unit)
Electrical Electrical Electrical Electrical Electrical
Electrical Connection Electrical Connection
Electrical Connection Electrical Connection
Electrical Connection Power via 5-pin M8 Connector, EtherCAT via RJ45 jacks
Digital Communication Digital Communication
Digital Communication Digital Communication Digital Communication EtherCAT
Diagnostic /Service Port Diagnostic /Service Port Diagnostic /Service Port Diagnostic /Service Port Diagnostic /Service Port Micro-USB
Power Supply/Consumption Power Supply/Consumption
Power Supply/Consumption Power Supply/Consumption
Power Supply/Consumption 320 mA max. @ 18-30 Vdc, 230 mA max. @ 24 Vdc (under typical operating conditions)
Compliance Compliance Compliance Compliance Compliance
EMC EMC EMC EMC EMC EMC Directive 2014/30/EU Evaluation Standard EN61326-1:2013
Environmental Compliance Environmental Compliance Environmental Compliance Environmental Compliance Environmental Compliance RoHS Directive (2011/65/EU)
REACH Directive EC (1907/2006)