12
Section 1 Introduction
Table 1-6 Specifications for GF135 Series
PPPPPerformance
erformance
erformance
erformance
erformance
Full Scale Flow Range:
Full Scale Flow Range:
Full Scale Flow Range:
Full Scale Flow Range:
Full Scale Flow Range:
3 sccm to 5 slm (N2 Eq.)
Gasses Supported:
Gasses Supported:
Gasses Supported:
Gasses Supported:
Gasses Supported:
N2, O2, Ar, H2, SF6, NH3, CO2, Cl2, HBr, NF3, CF4, CH4, CH3F, CH2F2, SiCl4 (@ 100 Torr),
C4F6-q (@ 800 Torr), C4F8 (@ 1200 Torr), N2O, CHF3, SiH2Cl2, C5F8, He
Flow
Flow
Flow
Flow
Flow Accur
Accur
Accur
Accur
Accuracy:
acy:
acy:
acy:
acy:
+/-1.0% S.P. (10-100% F.S.), +/-1% S.P. plus +/-0.04% F.S. (2-10% F.S.)
Repeatability & Repr
Repeatability & Repr
Repeatability & Repr
Repeatability & Repr
Repeatability & Reproducibility:
oducibility:
oducibility:
oducibility:
oducibility:
< +/- 0.15% S.P.
Linearity:
Linearity:
Linearity:
Linearity:
Linearity:
Included in accuracy
Settling
Settling
Settling
Settling
Settling Time (to /-2% FS):
Time (to /-2% FS):
Time (to /-2% FS):
Time (to /-2% FS):
Time (to /-2% FS):
<300ms (<860 sccm N2 Equivalent), <400ms (861-5000 sccm N2 Equivalent)
Pr
Pr
Pr
Pr
Pressur
essur
essur
essur
essure Insensitivity:
e Insensitivity:
e Insensitivity:
e Insensitivity:
e Insensitivity:
< 1% S.P. up to 5 psi/sec upstream press. spike
Con
Con
Con
Con
Contr
tr
tr
tr
trol Range:
ol Range:
ol Range:
ol Range:
ol Range:
1-100%
VVVVValve Shut Down:
alve Shut Down:
alve Shut Down:
alve Shut Down:
alve Shut Down:
< 0.5% of F.S. N2
ZZZZZer
er
er
er
ero Stability:
o Stability:
o Stability:
o Stability:
o Stability:
< +/- 0.5% F.S. per year
TTTTTemper
emper
emper
emper
emperatur
atur
atur
atur
ature Coefficien
e Coefficien
e Coefficien
e Coefficien
e Coefficient:
t:t:
t:
t:
Span: 0.05% setpoint per °C, Zero: 0.005% F.S. per °C
Rate-of-Decay P
Rate-of-Decay P
Rate-of-Decay P
Rate-of-Decay P
Rate-of-Decay Performance:
erformance:
erformance:
erformance:
erformance:
(ROD by default is disabled/off. It should not be enabled until after MFC is installed and properly commissioned)
Flow Rate:
Flow Rate:
Flow Rate:
Flow Rate:
Flow Rate:
Maximum flow rate for which an ROD measurement can be obtained is 800 sccm
TTTTTemper
emper
emper
emper
emperatur
atur
atur
atur
ature Sensitivity:
e Sensitivity:
e Sensitivity:
e Sensitivity:
e Sensitivity:
+/- 0.04% S.P./Deg C
Pr
Pr
Pr
Pr
Pressur
essur
essur
essur
essure Sensitivity:
e Sensitivity:
e Sensitivity:
e Sensitivity:
e Sensitivity:
+/- 0.04% F.S./psi
Minimum Detectable Change
Minimum Detectable Change
Minimum Detectable Change
Minimum Detectable Change
Minimum Detectable Change
Zero Drift: +/- 0.02% F.S.
fr
fr
fr
fr
from Commissioning Baseline:
om Commissioning Baseline:
om Commissioning Baseline:
om Commissioning Baseline:
om Commissioning Baseline:
Valve Leak: +0.1% F.S.
Repeatability: +/- 0.3% S.P. (SiCl4 +/- 0.5% from 5-100% S.P. up to 100 sccm flow)
Ratings
Ratings
Ratings
Ratings
Ratings
Oper
Oper
Oper
Oper
Operating
ating
ating
ating
ating TTTTTemper
emper
emper
emper
emperatur
atur
atur
atur
ature Range:
e Range:
e Range:
e Range:
e Range:
10-50°C
Differ
Differ
Differ
Differ
Differen
en
en
en
ential Pr
tial Pr
tial Pr
tial Pr
tial Pressur
essur
essur
essur
essure Range**:
e Range**:
e Range**:
e Range**:
e Range**:
3-860 sccm = 7-45 psid, 861- 5000 sccm = 10-45 psid
**Typical pressure drop. Actual pressure drop will be gas and flow dependent.
Argon gas applications require higher differential pressure.
Low vapor pressure gases require an inlet pressure of > 100 Torr, with vacuum on outlet
(example SiCl4). Contact Brooks Technical Support for more information.
Maximum Oper
Maximum Oper
Maximum Oper
Maximum Oper
Maximum Operating Pr
ating Pr
ating Pr
ating Pr
ating Pressur
essur
essur
essur
essure:
e:
e:
e:
e:
100 psia max
Pneumatic
Pneumatic
Pneumatic
Pneumatic
Pneumatic VVVVValve Oper
alve Oper
alve Oper
alve Oper
alve Operating Pr
ating Pr
ating Pr
ating Pr
ating Pressur
essur
essur
essur
essure:
e:
e:
e:
e:
43.5 psia - 72.5 psia
Leak In
Leak In
Leak In
Leak In
Leak Integrity (external):
tegrity (external):
tegrity (external):
tegrity (external):
tegrity (external):
1x10-10 atm. cc/sec He
Mec
Mec
Mec
Mec
Mechanical
hanical
hanical
hanical
hanical
VVVVValve
alve
alve
alve
alve TTTTType:
ype:
ype:
ype:
ype:
Normally Closed
W
W
W
W
Wetted Materials:
etted Materials:
etted Materials:
etted Materials:
etted Materials:
SEMI F20 UHP Compliant 316L VIM/VAR, Hastelloy C-22,316L Stainless Steel, 304 Stainless Steel, KM-45
Surface Finish:
Surface Finish:
Surface Finish:
Surface Finish:
Surface Finish:
4
μ
inch Ra (0.1
μ
m Ra)
Diagnostics & Display
Diagnostics & Display
Diagnostics & Display
Diagnostics & Display
Diagnostics & Display
Status Lights:
Status Lights:
Status Lights:
Status Lights:
Status Lights:
MFC Health, Network Status
Alarms:
Alarms:
Alarms:
Alarms:
Alarms:
Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption,
Sensor Drift, Flow Error, Valve Leak
Display
Display
Display
Display
Display TTTTType:
ype:
ype:
ype:
ype:
Top Mount Electronically Rotatable Integrated LCD
Viewing Distance:
Viewing Distance:
Viewing Distance:
Viewing Distance:
Viewing Distance:
Fixed / 10 feet
Units Displayed / Resolution:
Units Displayed / Resolution:
Units Displayed / Resolution:
Units Displayed / Resolution:
Units Displayed / Resolution:
Flow (%), Temp. (°C), Pressure (psia, kPa) / 0.1 (unit)
Electrical
Electrical
Electrical
Electrical
Electrical
Electrical Connection:
Electrical Connection:
Electrical Connection:
Electrical Connection:
Electrical Connection:
Analog/RS-485 via 9-Pin “D” connector, DeviceNet via 5-Pin “M12” connector
Digital Communication:
Digital Communication:
Digital Communication:
Digital Communication:
Digital Communication:
RS485+ (model specific), DeviceNet (model specific), RS485 Diagnostic Port (all models)
Diagnostic / Service P
Diagnostic / Service P
Diagnostic / Service P
Diagnostic / Service P
Diagnostic / Service Port:
ort:
ort:
ort:
ort:
RS485 via 2.5 mm jack
PPPPPower Supply/Consumption:
ower Supply/Consumption:
ower Supply/Consumption:
ower Supply/Consumption:
ower Supply/Consumption:
DeviceNet: +11-25 Vdc., 545 mA max. @ 11 Vdc., 250 mA (max.) @ 24 Vdc.,
Analog /RS485: +/-15 Vdc. (+10%), 6 Watts (max) or +24 Vdc +/-10%
Compliance
Compliance
Compliance
Compliance
Compliance
EMC
EMC
EMC
EMC
EMC
EC Directive 2004/108/EC CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
En
En
En
En
Envir
vir
vir
vir
vironmen
onmen
onmen
onmen
onmental Compliance
tal Compliance
tal Compliance
tal Compliance
tal Compliance
RoHS Directive 2011/65/2006
Reach Directive EC 1907/2006
