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Installation and Operation Manual

X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008

Brooks

Model 5851E

Model 5851E
Mass Flow Meter

Model 5851E

Mass Flow Controller

with Card Edge Connector

Model 5851E

Mass Flow Controller

with D-Connector

Содержание 5851E

Страница 1: ...ion Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Brooks Model 5851E Model 5851E Mass Flow Meter Model 5851E Mass Flow Controller with Card Edge Connector Model 5851E Mass Flow Contr...

Страница 2: ...tedtechnicalproducts youmustproperlyinstall useand maintain them to ensure they continue to operate within their normal specifications The following instructions must be adhered to and integrated into...

Страница 3: ...and chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior perform...

Страница 4: ...Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Brooks Model 5851E THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Страница 5: ...d Input 2 6 Valve Override 2 7 Remote Transducer Input Factory Installed Option 2 7 Valve Test Point 2 7 Valve Off 2 8 Volt Reference Output Valve Drive Configuration 2 8 Section 3 Operation Theory of...

Страница 6: ...cation Function 3 5 3 5 Model 5851E Calibration Connections 3 7 3 6 Adjustment Potentiometer Location 3 8 3 7 Fast Response Adjustment 3 11 4 1 Torque Sequence for the Valve Retainer Plate 4 7 4 2 Val...

Страница 7: ...just gas pressures Standard features include FAST RESPONSE CONTROL permits rapid gas settling times with little or no over undershoot Refer to Figure 1 1 SOFT START provides a flow ramping function wh...

Страница 8: ...valve voltage during operation Refer to Section 2 10 REMOTE TRANSDUCER INPUT accessed via Terminal 5 on the Card Edge or Pin 15 on the D Connector version This features allows the use of the integral...

Страница 9: ...of rate Response Time Less than 3 seconds response to within 2 of full scale final value with a 0 to 100 command step Power Requirements 15 Vdc 5 350 mA 15 Vdc 5 350 mA 10 5 watts power consumption Cl...

Страница 10: ...k ohm Leak Integrity 1 x 10 9 Atm scc sec Helium Control Range 50 to 1 Mechanical Connection Refer to Figure 2 1 Electrical Connection Card Edge 20 terminals gold over low stress nickel plated copper...

Страница 11: ...com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 011 81 3 5633 7100 6710 BK Ede Netherlands Fax 011 81 3 5633 71...

Страница 12: ...x 428 Tel 011 81 3 5633 7100 6710 BK Ede Netherlands Fax 011 81 3 5633 7101 Tel 31 318 549 300 Email BrooksAs BrooksInstrument com Fax 31 318 549 309 E mail BrooksEu BrooksInstrument com Also completi...

Страница 13: ...greater be aware that sharp abrupt angles in the system piping directly upstream of the controller may cause a small shift in accu racy If possible have at least ten pipe diameters of straight tubing...

Страница 14: ...w installations Chassis Ground 0 5 Volt Signal Common 0 5 Volt Signal Output 15 Vdc Supply 15 Vdc Supply Command Input Command Common Supply Voltage Common For installations which replace Unit Instrum...

Страница 15: ...2 5 Brooks Model 5851E Section 2 Installation Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Figure 2 1 Model 5851E Dimensions Inches Millimeters...

Страница 16: ...2 6 Brooks Model 5851E Section 2 Installation Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Figure 2 2 Model 5851E Card Edge Connector Comparison Guide...

Страница 17: ...N C Red 4 Valve Off Green 5 15 Vdc Supply Orange 6 15 Vdc Supply Blue 7 Valve Test Point Wht Blk 8 Cmd Input or Cmd Pot S Red Blk 9 Supply Voltage Common Grn Blk 10 0 5 Volt Signal Common Org Blk 11 5...

Страница 18: ...alve independent of the command setting The unique command reset feature prevents flow overshoot when the controller goes from valve override closed to normal control The valve override for the mass f...

Страница 19: ...high or floating at this pin has no effect 2 13 Five Volt Reference Out Valve Drive Configuration A Card Edge Refer to Figures 2 3 and 3 3 Terminal 10 can be jumper selected as 5 Volt reference output...

Страница 20: ...2 10 Brooks Model 5851E Section 2 Installation Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Страница 21: ...ow rate The flow restrictor shown in Figure 3 1 performs a ranging function similar to a shunt resistor in an electrical ammeter The restrictor provides a pressure drop that is linear with flow rate T...

Страница 22: ...le adjustments of command to 1 part in 1000 Refer to Section 2 12 for activation Valve Override Allows full opening and closing of the control valve independent of the command setting Refer to Section...

Страница 23: ...p and stabilize its temperature b Turn on the gas supply c Command 0 flow and observe the controllers output signal If the output is not 0 mVdc 10 mVdc check for leaks and if none are found refer to t...

Страница 24: ...3 4 Brooks Model 5851E Section 3 Operation Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Figure 3 3 Card Edge PC Board Jumper Location Function...

Страница 25: ...3 5 Brooks Model 5851E Section 3 Operation Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Figure 3 4 D Connector PC Board Jumper Location Function...

Страница 26: ...on gas apply the appropriate sensor conversion factor Size the orifice for actual operating conditions For the card edge model do not ground Pin 10 with the 5Volt reference enabled Irreparable damage...

Страница 27: ...typical For metal seat controllers close a downstream shut off valve and observe the zero signal e Set the command potentiometer connected to Terminals A B and 10 of the Card Edge connector and Termin...

Страница 28: ...tween 2 0 and 9 0 Volts for proper operation If the recommended voltage range exceeds the desired accuracy signal stability may not be achieved If one of the limits is reached check the orifice and re...

Страница 29: ...ect the DVM positive lead to TP2 linearity voltage and the negative lead to TP4 circuit common Calculate a new TP2 voltage as follows error measured New TP2 voltage recorded in x 0 450 V TP2 Step i vo...

Страница 30: ...ntiometer is properly adjusted 2 If the flow signal decays rapidly and goes below 5 V before rising to 0 V the anticipate potentiometer must be adjusted clockwise and Steps a and b repeated 3 If the f...

Страница 31: ...3 11 Brooks Model 5851E Section 3 Operation Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Figure 3 7 Fast Response Adjustment...

Страница 32: ...3 12 Brooks Model 5851E Section 3 Operation Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Страница 33: ...by a magnet CAUTION A System Checks The Model 5851E is generally used as a component in gas handling systems which can be quite complex This can make the task of isolating a malfunction in the system...

Страница 34: ...procedure Section 3 3 If the output signal will not zero properly refer to the sensor troubleshooting section and check the sensor If the sensor is electrically functional the printed circuit board i...

Страница 35: ...e 4 1 Bench Troubleshooting Note Do not attempt to disassemble the sensor D Cleaning No routine external cleaning is required for Brooks Thermal Mass Flow Controller Should the Model 5851E require cle...

Страница 36: ...ownstream end of the sensor tube end closest to the control valve The sensor tube can be flushed with a non residuous solvent Freon TFTM recommended A hypodermic needle filled with solvent is a conven...

Страница 37: ...n dry Nitrogen for 30 minutes prior to start up to prevent the formation of deposits 4 3 Sensor Tube The sensor tube is part of a calibrated flow divider that is designed to operate within a preset ga...

Страница 38: ...t CAUTION 9 Unplug the sensor connector from the PC Board Remove the two screws securing the bracket 24 and PC Board 15 Remove the bracket and PC Board 10 Remove the two allen nuts using an 1 8 allen...

Страница 39: ...ngeable The end block screws are stronger and are needed for the pressure rating The end block screws are darker in color and can be attracted by a magnet CAUTION 4 Press the lubricated sensor O rings...

Страница 40: ...urce for contamination Refer to Figure 4 2 for spacer locations The preload determines the initial force that is required to raise the valve seat off the orifice and start gas flow If the preload is i...

Страница 41: ...Brooks Model 5851E 4 9 Section 4 Maintenance Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Figure 4 2 Valve Adjusting Spacer Locations...

Страница 42: ...ing a 0 005 inches small preload spacer or by adding a 0 005 inches large preload spacer Refer to Figure 4 2 e Reassemble the valve following the assembly procedure in Section 4 4A f Command 0 flow ap...

Страница 43: ...cedure if re quired 4 5 Gas Conversion Factors If a mass flow controller is operated on a gas other than the gas it was calibrated with a scale shift will occur in the relation between the output sign...

Страница 44: ...yanogen CN 2 0 498 1 366 2 322 Cyanogen Chloride CLCN 0 618 1 480 2 730 Cyclobutane C4 H8 0 387 1 413 2 491 Cyclopropane C3 H6 0 505 1 224 1 877 Deuterium D2 0 995 0 379 0 177 Diborane B2 H6 0 448 1 0...

Страница 45: ...ctofluorocyclobutane C4 F8 0 169 2 672 8 933 Oxygen O2 0 988 1 067 1 429 Oxygen Difluoride OF2 0 672 1 388 2 402 Ozone O3 0 738 1 310 2 138 Pentafluorethane f 125 C2 HF5 0 287 2 070 5 360 Pentane n Pe...

Страница 46: ...ely from these reference conditions may cause an additional error due to the change in specific heat caused by pressure and or temperature 4 6 Orifice Sizing The Orifice Sizing Nomograph Table 4 4 is...

Страница 47: ...Brooks Model 5851E 4 15 Section 4 Maintenance Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Table 4 4 Orifice Sizing Nomograph...

Страница 48: ...cm Nitrogen In order to calculate the orifice conversion factor when using a gas mixture the following formula must be used Orifice Conversion Factor 1 P1 Orifice Conversion Factor Mixture P2 Orifice...

Страница 49: ...he outlet pressure psia is less than half the inlet pressure psia or P outlet P inlet 2 If these conditions exist the pressure drop p should be calculated as follows Pin p 2 p Pressure drop psi Pin In...

Страница 50: ...ure drops and produce controllers with different full scale flow rates For a discussion of the interaction of the various parts of the meter you are urged to review Section 3 1 Theory of Operation If...

Страница 51: ...in the MFC body restrictor element s go in first It is important that the restrictor assembly is put into the body in the correct orientation Refer to Figure 4 6 Push this assembly in with your finger...

Страница 52: ...5851E Section 4 Maintenance Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Figure 4 5 Restrictor Element Assembly Figure 4 6 Restrictor Element Orientation...

Страница 53: ...lation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 4 1 General When ordering parts please specify Brooks serial number model number part description part number and q...

Страница 54: ...5 2 Brooks Model 5851E Section 5 Parts List Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 Figure 5 1 Model 5851E Parts Drawing...

Страница 55: ...0 0160 577Z286BMT ID 0 0210 577Z289BMT 12 1 Orifice ID 0 0260 577Z293BMT ID 0 0310 577Z296BMT ID 0 0360 577Z300BMT ID 0 0410 577Z305BMT ID 0 0465 577Z308BMT ID 0 0550 577Z310BMT Refer to Section 4 6 I...

Страница 56: ...er to Brooks publication DS 5800 for additional accessories Table 5 1 Model 5851E Replacement Parts List Continued Item Qty Description Part Number No Fittings 1 4 Compression Swagelok 320B136BMA 1 4...

Страница 57: ...venlig hilsen Deutsch Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Nachtrag zur Bedienungsanleitung Referenz CE Zertifizierung f r Massedurchflu ger te Datum Januar 1996 Nach erf...

Страница 58: ...Please refer to the enclosed Instruction Manual Espa ol Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Asunto Addendum al Manual de Instrucciones Referencia Certificaci n CE de los Equipos...

Страница 59: ...du c ble des presse toupes et des connecteurs Brooks fournit des c bles de haute qualit r pondant aux sp cifications de la certification CE Si vous approvisionnez vous m me ce c ble vous devez utilise...

Страница 60: ...ollegato ad un terminale di terra Per il corretto cablaggio dei terminali occorre fare riferimento agli schemi del manuale di istruzioni dello strumento Nederlands Brooks Instrument 407 West Vine St H...

Страница 61: ...k jord p riktig pinne i pluggen for m te CE sertifiseringskrav For tilkobling av medleverte plugger vennligst se h ndboken som h rer til utstyret Vennlig hilsen Portugu s Brooks Instrument 407 West Vi...

Страница 62: ...maadoitettu Nastojen liitt minen katso liitteen oleva manuaali Yst v llisin terveisin Svensk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Manual Refe...

Страница 63: ...Brooks Model 5851E Installation and Operation Manual X TMF 5851E MFC eng Part Number 541B104AAG November 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Страница 64: ...e by Seller and can be amended only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow...

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