5-4
Brooks
®
Model 5851E
Section 5 Parts List
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Table 5-2. Tool and Spare Kits for Model 5851E.
5850 Series Service Tool Kit
Model 5851 Header Removal Tool
P/N S778D017AAA
P/N S817Z036AAA
Permits the complete disassembly of the 5850E Series
Model 0550/5851 Orifice Removal Tool
for servicing
P/N S908Z049AAA
Contains:
1 - O-ring Removal Tool
1 - Potentiometer Adjustment Tool
1 - Ball Point Allen Wrench
1 - Nut Driver for Orifice
1 - Restrictor Removal Tool
1 - Common Screw Driver
5850 Series Break Out Board Assembly
5850 Series Valve Shim Kit
P/N S273Z649AAA for Card Edge version
P/N S810A372BMA
S273Z668AAA for D-Connector version
Installs directly between mass flow controller and
Contains:
interconnecting cable. Allows convenient access to
1 - .010" Large Spacer
all signals for easy troubleshooting of system
2 - .005" Large Spacers
1 - .010" Small Spacer
Contains:
2 - .005" Small Spacers
1 - Break Out PC Board
1 - 5 foot Extension Cable
1 - Terminal PC Board
***QTA = Viton, SUA = Buna, TTA = Kalrez
Note: Refer to Brooks publication DS-5800 for additional accessories.
Table 5-1 Model 5851E Replacement Parts List (Continued)
Item
Qty.
Description
Part Number
No.
Fittings:
1/4" Compression, Swagelok
320B136BMA
1/4" Male VCR, Cajon
315Z036BMA
NS
2
1/4" Male VCO, Cajon
315Z035BMA
3/8" Compression Fitting
320B150BMA
3/8" Male VCO (3/8" or 1/2" Tube)
315Z033BMA
3/8" Male VCR (3/8" or 1/2" Tube)
315Z034BMA
27
2
O-ring, Fitting, Size 906
375B906***
NS
2
O-ring, Fitting, Size 010
375B010***
NS
1
O-ring, End Block, Size 029
375B029***
Interconnecting Cables:
Length
Card Edge
D-Connector
Connector on one end
5 Feet
S124Z469AAA
S124Z361AAA
with no termination
10 Feet
S124Z470AAA
S124Z362AAA
NS
on other end
25 Feet
S124Z471AAA
S124Z363AAA
1
50 Feet
S124Z472AAA
S124Z435AAA
Card Edge
D-Connector
Connector on one end
5 Feet
S124Z669AAA
S124Z576AAA
NS
with Connector for Model 5870
10 Feet
S124Z539AAA
S124Z577AAA
Series Secondary
25 Feet
S124Z562AAA
S124Z578AAA
Electronics on other end
50 Feet
S124Z670AAA
S124Z579AAA
NS
2
8-32 Mounting Screw
Customer Supplied
28
1
End-block with integral inlet screen
S079Z200AAA
29
4
Screw, End-block
751Z105AA0
***QTA = Viton, SUA = Buna, TTA = Kalrez, AR = As Required, NS = Not Shown
Additional publications available: MFC Contamination Control & Valve Application Guide/Service Manual
