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Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Brooks
®
Model 5851E
Section 1
Introduction
Paragraph
Page
Number
Number
Purpose ............................................................................................ 1-1
Description ........................................................................................ 1-1
Specifications .................................................................................... 1-3
Section 2
Installation
Receipt of Equipment ....................................................................... 2-1
Recommended Storage Practice ...................................................... 2-1
Gas Connections .............................................................................. 2-1
Installation ........................................................................................ 2-1
In-Line Filter ...................................................................................... 2-2
Soft Start ........................................................................................... 2-6
Remote Set Point (Command) Input ................................................. 2-6
Valve Override .................................................................................. 2-7
Remote Transducer Input (Factory Installed Option) ........................ 2-7
Valve Test Point ................................................................................ 2-7
Valve Off ........................................................................................... 2-8
Volt Reference Output/Valve Drive Configuration .............................. 2-8
Section 3
Operation
Theory of Operation .......................................................................... 3-1
Operating Procedure ........................................................................ 3-3
Zero Adjustment ............................................................................... 3-3
Calibration Procedure ....................................................................... 3-6
Response ......................................................................................... 3-9
Section 4
Maintenance
General ............................................................................................. 4-1
Troubleshooting ................................................................................ 4-1
Sensor Tube ..................................................................................... 4-5
Disassembly and Assembly .............................................................. 4-5
Gas Conversion Factors .................................................................. 4-11
Orifice Sizing ................................................................................... 4-14
Restrictor Sizing ............................................................................... 4-18
Section 5
Parts List
General ............................................................................................. 5-1
Appendix A
CE Certification
Page
CE Certification of Mass Flow Equipment ......................................... A-1
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