2-3
Brooks
®
Model 5851E
Section 2 Installation
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Recommended installation procedures:
a. The Model 5850E should be located in a clean dry atmosphere
relatively free from shock and vibration.
b. Leave sufficient room for access to the electrical components.
c. Install in such a manner that permits easy removal if the instrument
requires cleaning.
d. The Model 5850E Mass Flow Controller can be installed in any
position. However, mounting orientations other than the original
factory calibration (see data sheet) will result in a ±0.5% maximum
full scale shift after re-zeroing.
e. When installing controllers with full scale flow rates of 10 slpm or
greater, be aware that sharp abrupt angles in the system piping
directly upstream of the controller may cause a small shift in accu-
racy. If possible, have at least ten pipe diameters of straight tubing
upstream of the 5850E
MFC.
Note: The control valve in the Model 5851E provides precision control
and is not designed for positive shut-off. If positive shut-off is required,
it is recommended that a separate shut-off valve be installed in-line.
Since the Model 5851E control valve is not a positive shut-off, a
separate solenoid valve may have been installed for that purpose.
It should be noted that a small amount of gas may be trapped
between the downstream side of the mass flow controller and the
solenoid resulting in a surge upon actuation of the controller. This
surge can be reduced in magnitude by locating the controller and
solenoid valve close together or by moving the solenoid valve
upstream of the controller.
CAUTION
