Brooks
®
Model 5851E
4-3
Section 4 Maintenance
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Table 4-1 Bench Troubleshooting
Note: Do not attempt to disassemble the sensor.
D. Cleaning
No routine external cleaning is required for Brooks Thermal Mass Flow
Controller. Should the Model 5851E require cleaning due to deposition, use
the following procedures:
1. Remove the unit from the system.
2. Refer to Section 4-4 to disassemble the controller.
