QmB Series IP40, IP65, IP65XP
Section 5 Specifications
5-3
Installation and Operation Manual
X-CM-QmB-eng
Part Number: 541B029AHG
June, 2008
Repeatability
(6)
:
± 0.05% or ± [0.5 x (zero stability/flowrate) x 100]% of rate whichever is greater
Device Leak Integrity:
Elastomer Sealed Device:Outboard 1 x 10
-9
atm. cc/sec., helium (maximum)
Metal Sealed Device:1 x 10
-10
atm. cc/sec., helium (maximum)
Turn Down:
Controller: 100:1 or down to the minimum measurable flow, whichever flow rate is greater
Meter: to minimum measurable flow
Settling Time:
Controller(Stainless Steel sensor tube): Less than 2 seconds within 2 % full scale of final
value, ± [(zero stability/flowrate) x 100]% of rate per SEMI Guideline E17-91
Controller(Hasteloy sensor tube): Less than 12 seconds within 2 % full scale of final
value per SEMI Guideline E17-91
Meter: Less than 0.5 seconds within 2 % full scale of final value, ± [(zero stability/flowrate)
x 100]% of rate per SEMI Guideline E17-91
Maximum Operating Pressure:
Standard: 3.5 MPa, 35 bar or 500 psi
Optional: 10 MPa, 100 bar or 1500 psi
Optional: 30 MPa, 300 bar or 4500 psi (Hastelloy sensor tube only)
0.1
1.0
10.0
100.0
10
100
1,000
10,000
100,000
Mass Flow (grams/hr)
Pr
essure Dro
p
(psi)
Tube Size 2
Tube Size 3
Tube Size 4
Differential Pressures , Meter
(7)
Pressure Drop Liquid - (H
2
0)
Differential Pressure Requirements, Controller
(7)
Liquid
Gas
QUANTIM
QUANTIM
KpA
bar
psi
KpA
bar
psi
Model
(1)
Tube Size
min
max* min max* min max* min
max*
min
max*
min
max*
2
69
1034
0.7
10.3
10
150
69
1724
0.7
17.2
10
250
QMBC
3
69
1379
0.7
13.8
10
200
69
1034
0.7
10.3
10
150
4
69
1379
0.7
13.8
10
200
69
1034
0.7
10.3
10
150
* Actual maximum pressure drop will depend on process conditions and orifice selection.
