1-3
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008
Brooks
®
Model 5860E
Section 1 Introduction
Response Time
Less than 3 seconds response to within 2% of full scale final value for a
0 to 100% command step.
Control / Usable Range
50 to 1
Sensitivity to Mounting Attitude
±0.5% F.S. maximum deviation from specified accuracy after re-zeroing
under 200 psig.
Temperature Sensitivity
Zero: Less than ±0.075% F.S. per degree C
Span: Less than ±1.0% F.S. shift from original calibration over
10-50° C range
Pressure Sensitivity
0.03% per PSI up to 200 PSIG
Power Supply Sensitivity
±0.09% full scale per % power supply voltage variation
Output Signal
0-5 Vdc into 2000 ohms (or greater) load.
Maximum ripple 3 mV.
Leak Integrity
1 x 10
-9
Atmosphere scc/sec. Helium
Power Requirements
+15 Vdc (±5%) at 35 mA dc
-15 Vdc (±5%) at 35 mA dc
1.05 watts power consumption
Materials of Construction
Fittings and Transducer Assembly - Wetted parts 316 stainless steel
O-rings and gaskets - Standard: Viton®
fluoroelastomers and Buna-N;
Optional: Kalrez®
Electrical Connection
D-connector, 15 pin type (DA-15P)