Brooks Instrument 5860E, Инструкция по установке и эксплуатации

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Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008
Brooks
®
Model 5860E
Contents
Section 1
Introduction
Paragraph Page
Number Number
1-1 Purpose ............................................................................. 1-1
1-2 Description ........................................................................ 1-1
1-3 Specifications .................................................................... 1-2
Section 2
Installation
2-1 Receipt of Equipment ........................................................ 2-1
2-2 Recommended Storage Practice ....................................... 2-1
2-3 Return Shipment ................................................................ 2-2
2-4 Gas Connections ............................................................... 2-2
2-5 Installation ......................................................................... 2-2
2-6 In-Line Filter ....................................................................... 2-4
2-7 Electrical Interfacing .......................................................... 2-5
Section 3
Operation
3-1 Theory of Operation ........................................................... 3-1
3-2 Operating Procedure ......................................................... 3-2
3-3 Zero Adjustment ................................................................ 3-2
3-4 Calibration Procedure ........................................................ 3-3
3-5 Response (Flow Output Signal) ......................................... 3-6
Section 4
Maintenance
4-1 General .............................................................................. 4-1
4-2 Troubleshooting ................................................................. 4-1
4-3 Sensor Tube ...................................................................... 4-4
4-4 Disassembly and Assembly ............................................... 4-4
4-5 Use of the Conversion Tables ............................................ 4-6
4-6 Restrictor Sizing ................................................................ 4-9
Section 5
Parts List
5-1 General .............................................................................. 5-1
Section A
CE Certification
CE Certification of Mass Flow Equipment .......................... A-1